10/31/2011	9:32:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	9:32:36 AM	Recipe started at 9:32 AM
10/31/2011	9:32:36 AM	Helium valve closed
10/31/2011	9:32:36 AM	H2 valve closed
10/31/2011	9:32:36 AM	BCl3 valve closed
10/31/2011	9:32:36 AM	PH3 valve closed
10/31/2011	9:32:36 AM	SiCl4 pre valve closed
10/31/2011	9:32:36 AM	SiCl4 post valve closed
10/31/2011	9:32:36 AM	Main Vac valve closed
10/31/2011	9:32:36 AM	Bypass valve closed
10/31/2011	9:32:36 AM	Bubbler valve closed
10/31/2011	9:32:36 AM	Helium MFC set to  0.000000
10/31/2011	9:32:36 AM	H2 MFC set to  0.000000
10/31/2011	9:32:36 AM	BCl3 MFC set to  0.000000
10/31/2011	9:32:36 AM	PHl3 MFC set to  0.000000
10/31/2011	9:32:36 AM	SiCl4 MFC set to  0.000000
10/31/2011	9:32:36 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	9:32:37 AM	Tube furnace set to 0
10/31/2011	9:32:40 AM	H2 valve closed
10/31/2011	9:32:40 AM	BCl3 valve closed
10/31/2011	9:32:40 AM	PH3 valve closed
10/31/2011	9:32:40 AM	SiCl4 pre valve closed
10/31/2011	9:32:40 AM	SiCl4 post valve closed
10/31/2011	9:32:40 AM	Main Vac valve closed
10/31/2011	9:32:40 AM	Bypass valve closed
10/31/2011	9:32:40 AM	Bubbler valve closed
10/31/2011	9:32:40 AM	Helium valve opened
10/31/2011	9:32:40 AM	Helium MFC set to  500.000000
10/31/2011	9:32:40 AM	H2 MFC set to  0.000000
10/31/2011	9:32:40 AM	BCl3 MFC set to  0.000000
10/31/2011	9:32:40 AM	PHl3 MFC set to  0.000000
10/31/2011	9:32:40 AM	SiCl4 MFC set to  0.000000
10/31/2011	9:32:40 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	9:32:40 AM	Tube furnace set to 0
10/31/2011	9:33:46 AM	Helium valve closed
10/31/2011	9:33:46 AM	H2 valve closed
10/31/2011	9:33:46 AM	BCl3 valve closed
10/31/2011	9:33:46 AM	PH3 valve closed
10/31/2011	9:33:46 AM	SiCl4 pre valve closed
10/31/2011	9:33:46 AM	SiCl4 post valve closed
10/31/2011	9:33:46 AM	Main Vac valve closed
10/31/2011	9:33:46 AM	Bypass valve closed
10/31/2011	9:33:46 AM	Bubbler valve closed
10/31/2011	9:33:46 AM	Helium MFC set to  0.000000
10/31/2011	9:33:46 AM	H2 MFC set to  0.000000
10/31/2011	9:33:46 AM	BCl3 MFC set to  0.000000
10/31/2011	9:33:46 AM	PHl3 MFC set to  0.000000
10/31/2011	9:33:46 AM	SiCl4 MFC set to  0.000000
10/31/2011	9:33:46 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	9:33:46 AM	Tube furnace set to 0
10/31/2011	9:33:47 AM	Run finished at 9:33 AM
10/31/2011	9:33:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	9:57:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	9:57:51 AM	Recipe started at 9:57 AM
10/31/2011	9:57:51 AM	Helium valve closed
10/31/2011	9:57:51 AM	H2 valve closed
10/31/2011	9:57:51 AM	BCl3 valve closed
10/31/2011	9:57:51 AM	PH3 valve closed
10/31/2011	9:57:51 AM	SiCl4 pre valve closed
10/31/2011	9:57:51 AM	SiCl4 post valve closed
10/31/2011	9:57:51 AM	Main Vac valve closed
10/31/2011	9:57:51 AM	Bubbler valve closed
10/31/2011	9:57:51 AM	Bypass valve opened
10/31/2011	9:57:51 AM	Helium MFC set to  0.000000
10/31/2011	9:57:51 AM	H2 MFC set to  0.000000
10/31/2011	9:57:51 AM	BCl3 MFC set to  0.000000
10/31/2011	9:57:51 AM	PHl3 MFC set to  0.000000
10/31/2011	9:57:51 AM	SiCl4 MFC set to  0.000000
10/31/2011	9:57:51 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	9:57:51 AM	Tube furnace set to 0
10/31/2011	9:59:02 AM	Helium valve closed
10/31/2011	9:59:02 AM	H2 valve closed
10/31/2011	9:59:02 AM	BCl3 valve closed
10/31/2011	9:59:02 AM	PH3 valve closed
10/31/2011	9:59:02 AM	SiCl4 pre valve closed
10/31/2011	9:59:02 AM	SiCl4 post valve closed
10/31/2011	9:59:02 AM	Main Vac valve closed
10/31/2011	9:59:02 AM	Bubbler valve closed
10/31/2011	9:59:02 AM	Bypass valve opened
10/31/2011	9:59:02 AM	Helium MFC set to  0.000000
10/31/2011	9:59:02 AM	H2 MFC set to  0.000000
10/31/2011	9:59:02 AM	BCl3 MFC set to  0.000000
10/31/2011	9:59:02 AM	PHl3 MFC set to  0.000000
10/31/2011	9:59:02 AM	SiCl4 MFC set to  0.000000
10/31/2011	9:59:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	9:59:02 AM	Tube furnace set to 0
10/31/2011	10:00:02 AM	Helium valve closed
10/31/2011	10:00:02 AM	H2 valve closed
10/31/2011	10:00:02 AM	BCl3 valve closed
10/31/2011	10:00:02 AM	PH3 valve closed
10/31/2011	10:00:02 AM	SiCl4 pre valve closed
10/31/2011	10:00:02 AM	SiCl4 post valve closed
10/31/2011	10:00:02 AM	Bypass valve closed
10/31/2011	10:00:02 AM	Bubbler valve closed
10/31/2011	10:00:02 AM	Main Vac valve opened
10/31/2011	10:00:02 AM	Helium MFC set to  0.000000
10/31/2011	10:00:02 AM	H2 MFC set to  0.000000
10/31/2011	10:00:02 AM	BCl3 MFC set to  0.000000
10/31/2011	10:00:02 AM	PHl3 MFC set to  0.000000
10/31/2011	10:00:02 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:00:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:00:03 AM	Tube furnace set to 0
10/31/2011	10:00:04 AM	Run finished at 10:00 AM
10/31/2011	10:00:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	10:01:13 AM	Recipe started at 10:00 AM
10/31/2011	10:01:13 AM	Helium valve closed
10/31/2011	10:01:13 AM	H2 valve closed
10/31/2011	10:01:13 AM	BCl3 valve closed
10/31/2011	10:01:13 AM	PH3 valve closed
10/31/2011	10:01:13 AM	SiCl4 pre valve closed
10/31/2011	10:01:13 AM	SiCl4 post valve closed
10/31/2011	10:01:13 AM	Main Vac valve closed
10/31/2011	10:01:13 AM	Bubbler valve closed
10/31/2011	10:01:13 AM	Bypass valve opened
10/31/2011	10:01:13 AM	Helium MFC set to  0.000000
10/31/2011	10:01:13 AM	H2 MFC set to  0.000000
10/31/2011	10:01:13 AM	BCl3 MFC set to  0.000000
10/31/2011	10:01:13 AM	PHl3 MFC set to  0.000000
10/31/2011	10:01:13 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:01:13 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:01:13 AM	Tube furnace set to 150
10/31/2011	10:01:13 AM	Helium valve closed
10/31/2011	10:01:13 AM	H2 valve closed
10/31/2011	10:01:13 AM	BCl3 valve closed
10/31/2011	10:01:13 AM	PH3 valve closed
10/31/2011	10:01:13 AM	SiCl4 pre valve closed
10/31/2011	10:01:13 AM	SiCl4 post valve closed
10/31/2011	10:01:13 AM	Main Vac valve closed
10/31/2011	10:01:13 AM	Bubbler valve closed
10/31/2011	10:01:13 AM	Bypass valve opened
10/31/2011	10:01:13 AM	Helium MFC set to  0.000000
10/31/2011	10:01:13 AM	H2 MFC set to  0.000000
10/31/2011	10:01:13 AM	BCl3 MFC set to  0.000000
10/31/2011	10:01:13 AM	PHl3 MFC set to  0.000000
10/31/2011	10:01:13 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:01:13 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:01:13 AM	Tube furnace set to 150
10/31/2011	10:01:23 AM	Helium valve closed
10/31/2011	10:01:23 AM	H2 valve closed
10/31/2011	10:01:23 AM	BCl3 valve closed
10/31/2011	10:01:23 AM	PH3 valve closed
10/31/2011	10:01:23 AM	SiCl4 pre valve closed
10/31/2011	10:01:23 AM	SiCl4 post valve closed
10/31/2011	10:01:23 AM	Bypass valve closed
10/31/2011	10:01:23 AM	Bubbler valve closed
10/31/2011	10:01:23 AM	Main Vac valve opened
10/31/2011	10:01:23 AM	Helium MFC set to  0.000000
10/31/2011	10:01:23 AM	H2 MFC set to  0.000000
10/31/2011	10:01:23 AM	BCl3 MFC set to  0.000000
10/31/2011	10:01:23 AM	PHl3 MFC set to  0.000000
10/31/2011	10:01:23 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:01:23 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:01:23 AM	Tube furnace set to 150
10/31/2011	10:01:53 AM	H2 valve closed
10/31/2011	10:01:53 AM	BCl3 valve closed
10/31/2011	10:01:53 AM	PH3 valve closed
10/31/2011	10:01:53 AM	SiCl4 pre valve closed
10/31/2011	10:01:53 AM	SiCl4 post valve closed
10/31/2011	10:01:53 AM	Bypass valve closed
10/31/2011	10:01:53 AM	Bubbler valve closed
10/31/2011	10:01:53 AM	Helium valve opened
10/31/2011	10:01:53 AM	Main Vac valve opened
10/31/2011	10:01:53 AM	Helium MFC set to  20.000000
10/31/2011	10:01:53 AM	H2 MFC set to  0.000000
10/31/2011	10:01:53 AM	BCl3 MFC set to  0.000000
10/31/2011	10:01:53 AM	PHl3 MFC set to  0.000000
10/31/2011	10:01:53 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:01:53 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:01:54 AM	Tube furnace set to 150
10/31/2011	10:02:24 AM	Helium valve closed
10/31/2011	10:02:24 AM	H2 valve closed
10/31/2011	10:02:24 AM	BCl3 valve closed
10/31/2011	10:02:24 AM	PH3 valve closed
10/31/2011	10:02:24 AM	SiCl4 pre valve closed
10/31/2011	10:02:24 AM	SiCl4 post valve closed
10/31/2011	10:02:24 AM	Bypass valve closed
10/31/2011	10:02:24 AM	Bubbler valve closed
10/31/2011	10:02:24 AM	Main Vac valve opened
10/31/2011	10:02:24 AM	Helium MFC set to  0.000000
10/31/2011	10:02:24 AM	H2 MFC set to  0.000000
10/31/2011	10:02:24 AM	BCl3 MFC set to  0.000000
10/31/2011	10:02:24 AM	PHl3 MFC set to  0.000000
10/31/2011	10:02:24 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:02:24 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:02:24 AM	Tube furnace set to 150
10/31/2011	10:02:54 AM	H2 valve closed
10/31/2011	10:02:54 AM	BCl3 valve closed
10/31/2011	10:02:54 AM	PH3 valve closed
10/31/2011	10:02:54 AM	SiCl4 pre valve closed
10/31/2011	10:02:54 AM	SiCl4 post valve closed
10/31/2011	10:02:54 AM	Bypass valve closed
10/31/2011	10:02:54 AM	Bubbler valve closed
10/31/2011	10:02:54 AM	Helium valve opened
10/31/2011	10:02:54 AM	Main Vac valve opened
10/31/2011	10:02:54 AM	Helium MFC set to  20.000000
10/31/2011	10:02:54 AM	H2 MFC set to  0.000000
10/31/2011	10:02:54 AM	BCl3 MFC set to  0.000000
10/31/2011	10:02:54 AM	PHl3 MFC set to  0.000000
10/31/2011	10:02:54 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:02:54 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:02:54 AM	Tube furnace set to 150
10/31/2011	10:03:24 AM	Helium valve closed
10/31/2011	10:03:24 AM	H2 valve closed
10/31/2011	10:03:24 AM	BCl3 valve closed
10/31/2011	10:03:24 AM	PH3 valve closed
10/31/2011	10:03:24 AM	SiCl4 pre valve closed
10/31/2011	10:03:24 AM	SiCl4 post valve closed
10/31/2011	10:03:24 AM	Bypass valve closed
10/31/2011	10:03:24 AM	Bubbler valve closed
10/31/2011	10:03:24 AM	Main Vac valve opened
10/31/2011	10:03:24 AM	Helium MFC set to  0.000000
10/31/2011	10:03:24 AM	H2 MFC set to  0.000000
10/31/2011	10:03:24 AM	BCl3 MFC set to  0.000000
10/31/2011	10:03:24 AM	PHl3 MFC set to  0.000000
10/31/2011	10:03:24 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:03:24 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:03:24 AM	Tube furnace set to 150
10/31/2011	10:03:54 AM	H2 valve closed
10/31/2011	10:03:54 AM	BCl3 valve closed
10/31/2011	10:03:54 AM	PH3 valve closed
10/31/2011	10:03:54 AM	SiCl4 pre valve closed
10/31/2011	10:03:54 AM	SiCl4 post valve closed
10/31/2011	10:03:54 AM	Bypass valve closed
10/31/2011	10:03:54 AM	Bubbler valve closed
10/31/2011	10:03:54 AM	Helium valve opened
10/31/2011	10:03:54 AM	Main Vac valve opened
10/31/2011	10:03:54 AM	Helium MFC set to  20.000000
10/31/2011	10:03:54 AM	H2 MFC set to  0.000000
10/31/2011	10:03:54 AM	BCl3 MFC set to  0.000000
10/31/2011	10:03:54 AM	PHl3 MFC set to  0.000000
10/31/2011	10:03:54 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:03:54 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:03:54 AM	Tube furnace set to 150
10/31/2011	10:04:25 AM	Helium valve closed
10/31/2011	10:04:25 AM	H2 valve closed
10/31/2011	10:04:25 AM	BCl3 valve closed
10/31/2011	10:04:25 AM	PH3 valve closed
10/31/2011	10:04:25 AM	SiCl4 pre valve closed
10/31/2011	10:04:25 AM	SiCl4 post valve closed
10/31/2011	10:04:25 AM	Bypass valve closed
10/31/2011	10:04:25 AM	Bubbler valve closed
10/31/2011	10:04:25 AM	Main Vac valve opened
10/31/2011	10:04:25 AM	Helium MFC set to  0.000000
10/31/2011	10:04:25 AM	H2 MFC set to  0.000000
10/31/2011	10:04:25 AM	BCl3 MFC set to  0.000000
10/31/2011	10:04:25 AM	PHl3 MFC set to  0.000000
10/31/2011	10:04:25 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:04:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:04:25 AM	Tube furnace set to 150
10/31/2011	10:04:55 AM	H2 valve closed
10/31/2011	10:04:55 AM	BCl3 valve closed
10/31/2011	10:04:55 AM	PH3 valve closed
10/31/2011	10:04:55 AM	SiCl4 pre valve closed
10/31/2011	10:04:55 AM	SiCl4 post valve closed
10/31/2011	10:04:55 AM	Bypass valve closed
10/31/2011	10:04:55 AM	Bubbler valve closed
10/31/2011	10:04:55 AM	Helium valve opened
10/31/2011	10:04:55 AM	Main Vac valve opened
10/31/2011	10:04:55 AM	Helium MFC set to  20.000000
10/31/2011	10:04:55 AM	H2 MFC set to  0.000000
10/31/2011	10:04:55 AM	BCl3 MFC set to  0.000000
10/31/2011	10:04:55 AM	PHl3 MFC set to  0.000000
10/31/2011	10:04:55 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:04:55 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:04:55 AM	Tube furnace set to 150
10/31/2011	10:05:25 AM	Helium valve closed
10/31/2011	10:05:25 AM	H2 valve closed
10/31/2011	10:05:25 AM	BCl3 valve closed
10/31/2011	10:05:25 AM	PH3 valve closed
10/31/2011	10:05:25 AM	SiCl4 pre valve closed
10/31/2011	10:05:25 AM	SiCl4 post valve closed
10/31/2011	10:05:25 AM	Bypass valve closed
10/31/2011	10:05:25 AM	Bubbler valve closed
10/31/2011	10:05:25 AM	Main Vac valve opened
10/31/2011	10:05:25 AM	Helium MFC set to  0.000000
10/31/2011	10:05:25 AM	H2 MFC set to  0.000000
10/31/2011	10:05:25 AM	BCl3 MFC set to  0.000000
10/31/2011	10:05:25 AM	PHl3 MFC set to  0.000000
10/31/2011	10:05:25 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:05:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:05:25 AM	Tube furnace set to 150
10/31/2011	10:05:55 AM	H2 valve closed
10/31/2011	10:05:55 AM	BCl3 valve closed
10/31/2011	10:05:55 AM	PH3 valve closed
10/31/2011	10:05:55 AM	SiCl4 pre valve closed
10/31/2011	10:05:55 AM	SiCl4 post valve closed
10/31/2011	10:05:55 AM	Bypass valve closed
10/31/2011	10:05:55 AM	Bubbler valve closed
10/31/2011	10:05:55 AM	Helium valve opened
10/31/2011	10:05:55 AM	Main Vac valve opened
10/31/2011	10:05:55 AM	Helium MFC set to  20.000000
10/31/2011	10:05:55 AM	H2 MFC set to  0.000000
10/31/2011	10:05:55 AM	BCl3 MFC set to  0.000000
10/31/2011	10:05:55 AM	PHl3 MFC set to  0.000000
10/31/2011	10:05:55 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:05:55 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:05:55 AM	Tube furnace set to 150
10/31/2011	10:06:25 AM	Helium valve closed
10/31/2011	10:06:25 AM	H2 valve closed
10/31/2011	10:06:25 AM	BCl3 valve closed
10/31/2011	10:06:25 AM	PH3 valve closed
10/31/2011	10:06:25 AM	SiCl4 pre valve closed
10/31/2011	10:06:25 AM	SiCl4 post valve closed
10/31/2011	10:06:25 AM	Bypass valve closed
10/31/2011	10:06:25 AM	Bubbler valve closed
10/31/2011	10:06:25 AM	Main Vac valve opened
10/31/2011	10:06:25 AM	Helium MFC set to  0.000000
10/31/2011	10:06:25 AM	H2 MFC set to  0.000000
10/31/2011	10:06:25 AM	BCl3 MFC set to  0.000000
10/31/2011	10:06:25 AM	PHl3 MFC set to  0.000000
10/31/2011	10:06:25 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:06:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:06:26 AM	Tube furnace set to 150
10/31/2011	10:06:56 AM	H2 valve closed
10/31/2011	10:06:56 AM	BCl3 valve closed
10/31/2011	10:06:56 AM	PH3 valve closed
10/31/2011	10:06:56 AM	SiCl4 pre valve closed
10/31/2011	10:06:56 AM	SiCl4 post valve closed
10/31/2011	10:06:56 AM	Bypass valve closed
10/31/2011	10:06:56 AM	Bubbler valve closed
10/31/2011	10:06:56 AM	Helium valve opened
10/31/2011	10:06:56 AM	Main Vac valve opened
10/31/2011	10:06:56 AM	Helium MFC set to  20.000000
10/31/2011	10:06:56 AM	H2 MFC set to  0.000000
10/31/2011	10:06:56 AM	BCl3 MFC set to  0.000000
10/31/2011	10:06:56 AM	PHl3 MFC set to  0.000000
10/31/2011	10:06:56 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:06:56 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:06:56 AM	Tube furnace set to 150
10/31/2011	10:07:26 AM	Helium valve closed
10/31/2011	10:07:26 AM	H2 valve closed
10/31/2011	10:07:26 AM	BCl3 valve closed
10/31/2011	10:07:26 AM	PH3 valve closed
10/31/2011	10:07:26 AM	SiCl4 pre valve closed
10/31/2011	10:07:26 AM	SiCl4 post valve closed
10/31/2011	10:07:26 AM	Bypass valve closed
10/31/2011	10:07:26 AM	Bubbler valve closed
10/31/2011	10:07:26 AM	Main Vac valve opened
10/31/2011	10:07:26 AM	Helium MFC set to  0.000000
10/31/2011	10:07:26 AM	H2 MFC set to  0.000000
10/31/2011	10:07:26 AM	BCl3 MFC set to  0.000000
10/31/2011	10:07:26 AM	PHl3 MFC set to  0.000000
10/31/2011	10:07:26 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:07:26 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:07:26 AM	Tube furnace set to 150
10/31/2011	10:07:56 AM	H2 valve closed
10/31/2011	10:07:56 AM	BCl3 valve closed
10/31/2011	10:07:56 AM	PH3 valve closed
10/31/2011	10:07:56 AM	SiCl4 pre valve closed
10/31/2011	10:07:56 AM	SiCl4 post valve closed
10/31/2011	10:07:56 AM	Bypass valve closed
10/31/2011	10:07:56 AM	Bubbler valve closed
10/31/2011	10:07:56 AM	Helium valve opened
10/31/2011	10:07:56 AM	Main Vac valve opened
10/31/2011	10:07:56 AM	Helium MFC set to  20.000000
10/31/2011	10:07:56 AM	H2 MFC set to  0.000000
10/31/2011	10:07:56 AM	BCl3 MFC set to  0.000000
10/31/2011	10:07:56 AM	PHl3 MFC set to  0.000000
10/31/2011	10:07:56 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:07:56 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:07:56 AM	Tube furnace set to 150
10/31/2011	10:08:26 AM	Helium valve closed
10/31/2011	10:08:26 AM	H2 valve closed
10/31/2011	10:08:26 AM	BCl3 valve closed
10/31/2011	10:08:26 AM	PH3 valve closed
10/31/2011	10:08:26 AM	SiCl4 pre valve closed
10/31/2011	10:08:26 AM	SiCl4 post valve closed
10/31/2011	10:08:26 AM	Bypass valve closed
10/31/2011	10:08:26 AM	Bubbler valve closed
10/31/2011	10:08:26 AM	Main Vac valve opened
10/31/2011	10:08:26 AM	Helium MFC set to  0.000000
10/31/2011	10:08:26 AM	H2 MFC set to  0.000000
10/31/2011	10:08:26 AM	BCl3 MFC set to  0.000000
10/31/2011	10:08:26 AM	PHl3 MFC set to  0.000000
10/31/2011	10:08:26 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:08:26 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:08:26 AM	Tube furnace set to 150
10/31/2011	10:08:56 AM	H2 valve closed
10/31/2011	10:08:56 AM	BCl3 valve closed
10/31/2011	10:08:56 AM	PH3 valve closed
10/31/2011	10:08:56 AM	SiCl4 pre valve closed
10/31/2011	10:08:56 AM	SiCl4 post valve closed
10/31/2011	10:08:56 AM	Bypass valve closed
10/31/2011	10:08:56 AM	Bubbler valve closed
10/31/2011	10:08:56 AM	Helium valve opened
10/31/2011	10:08:56 AM	Main Vac valve opened
10/31/2011	10:08:56 AM	Helium MFC set to  20.000000
10/31/2011	10:08:56 AM	H2 MFC set to  0.000000
10/31/2011	10:08:56 AM	BCl3 MFC set to  0.000000
10/31/2011	10:08:56 AM	PHl3 MFC set to  0.000000
10/31/2011	10:08:56 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:08:56 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:08:57 AM	Tube furnace set to 150
10/31/2011	10:09:27 AM	Helium valve closed
10/31/2011	10:09:27 AM	H2 valve closed
10/31/2011	10:09:27 AM	BCl3 valve closed
10/31/2011	10:09:27 AM	PH3 valve closed
10/31/2011	10:09:27 AM	SiCl4 pre valve closed
10/31/2011	10:09:27 AM	SiCl4 post valve closed
10/31/2011	10:09:27 AM	Bypass valve closed
10/31/2011	10:09:27 AM	Bubbler valve closed
10/31/2011	10:09:27 AM	Main Vac valve opened
10/31/2011	10:09:27 AM	Helium MFC set to  0.000000
10/31/2011	10:09:27 AM	H2 MFC set to  0.000000
10/31/2011	10:09:27 AM	BCl3 MFC set to  0.000000
10/31/2011	10:09:27 AM	PHl3 MFC set to  0.000000
10/31/2011	10:09:27 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:09:27 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:09:27 AM	Tube furnace set to 150
10/31/2011	10:09:57 AM	H2 valve closed
10/31/2011	10:09:57 AM	BCl3 valve closed
10/31/2011	10:09:57 AM	PH3 valve closed
10/31/2011	10:09:57 AM	SiCl4 pre valve closed
10/31/2011	10:09:57 AM	SiCl4 post valve closed
10/31/2011	10:09:57 AM	Bypass valve closed
10/31/2011	10:09:57 AM	Bubbler valve closed
10/31/2011	10:09:57 AM	Helium valve opened
10/31/2011	10:09:57 AM	Main Vac valve opened
10/31/2011	10:09:57 AM	Helium MFC set to  20.000000
10/31/2011	10:09:57 AM	H2 MFC set to  0.000000
10/31/2011	10:09:57 AM	BCl3 MFC set to  0.000000
10/31/2011	10:09:57 AM	PHl3 MFC set to  0.000000
10/31/2011	10:09:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:09:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:09:57 AM	Tube furnace set to 150
10/31/2011	10:10:27 AM	Helium valve closed
10/31/2011	10:10:27 AM	H2 valve closed
10/31/2011	10:10:27 AM	BCl3 valve closed
10/31/2011	10:10:27 AM	PH3 valve closed
10/31/2011	10:10:27 AM	SiCl4 pre valve closed
10/31/2011	10:10:27 AM	SiCl4 post valve closed
10/31/2011	10:10:27 AM	Bypass valve closed
10/31/2011	10:10:27 AM	Bubbler valve closed
10/31/2011	10:10:27 AM	Main Vac valve opened
10/31/2011	10:10:27 AM	Helium MFC set to  0.000000
10/31/2011	10:10:27 AM	H2 MFC set to  0.000000
10/31/2011	10:10:27 AM	BCl3 MFC set to  0.000000
10/31/2011	10:10:27 AM	PHl3 MFC set to  0.000000
10/31/2011	10:10:27 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:10:27 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:10:27 AM	Tube furnace set to 150
10/31/2011	10:10:57 AM	H2 valve closed
10/31/2011	10:10:57 AM	BCl3 valve closed
10/31/2011	10:10:57 AM	PH3 valve closed
10/31/2011	10:10:57 AM	SiCl4 pre valve closed
10/31/2011	10:10:57 AM	SiCl4 post valve closed
10/31/2011	10:10:57 AM	Bypass valve closed
10/31/2011	10:10:57 AM	Bubbler valve closed
10/31/2011	10:10:57 AM	Helium valve opened
10/31/2011	10:10:57 AM	Main Vac valve opened
10/31/2011	10:10:57 AM	Helium MFC set to  20.000000
10/31/2011	10:10:57 AM	H2 MFC set to  0.000000
10/31/2011	10:10:57 AM	BCl3 MFC set to  0.000000
10/31/2011	10:10:57 AM	PHl3 MFC set to  0.000000
10/31/2011	10:10:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:10:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:10:58 AM	Tube furnace set to 150
10/31/2011	10:11:28 AM	Helium valve closed
10/31/2011	10:11:28 AM	H2 valve closed
10/31/2011	10:11:28 AM	BCl3 valve closed
10/31/2011	10:11:28 AM	PH3 valve closed
10/31/2011	10:11:28 AM	SiCl4 pre valve closed
10/31/2011	10:11:28 AM	SiCl4 post valve closed
10/31/2011	10:11:28 AM	Bypass valve closed
10/31/2011	10:11:28 AM	Bubbler valve closed
10/31/2011	10:11:28 AM	Main Vac valve opened
10/31/2011	10:11:28 AM	Helium MFC set to  0.000000
10/31/2011	10:11:28 AM	H2 MFC set to  0.000000
10/31/2011	10:11:28 AM	BCl3 MFC set to  0.000000
10/31/2011	10:11:28 AM	PHl3 MFC set to  0.000000
10/31/2011	10:11:28 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:11:28 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:11:28 AM	Tube furnace set to 150
10/31/2011	10:11:58 AM	H2 valve closed
10/31/2011	10:11:58 AM	BCl3 valve closed
10/31/2011	10:11:58 AM	PH3 valve closed
10/31/2011	10:11:58 AM	SiCl4 pre valve closed
10/31/2011	10:11:58 AM	SiCl4 post valve closed
10/31/2011	10:11:58 AM	Bypass valve closed
10/31/2011	10:11:58 AM	Bubbler valve closed
10/31/2011	10:11:58 AM	Helium valve opened
10/31/2011	10:11:58 AM	Main Vac valve opened
10/31/2011	10:11:58 AM	Helium MFC set to  20.000000
10/31/2011	10:11:58 AM	H2 MFC set to  0.000000
10/31/2011	10:11:58 AM	BCl3 MFC set to  0.000000
10/31/2011	10:11:58 AM	PHl3 MFC set to  0.000000
10/31/2011	10:11:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:11:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:11:58 AM	Tube furnace set to 150
10/31/2011	10:12:28 AM	Helium valve closed
10/31/2011	10:12:28 AM	H2 valve closed
10/31/2011	10:12:28 AM	BCl3 valve closed
10/31/2011	10:12:28 AM	PH3 valve closed
10/31/2011	10:12:28 AM	SiCl4 pre valve closed
10/31/2011	10:12:28 AM	SiCl4 post valve closed
10/31/2011	10:12:28 AM	Bypass valve closed
10/31/2011	10:12:28 AM	Bubbler valve closed
10/31/2011	10:12:28 AM	Main Vac valve opened
10/31/2011	10:12:28 AM	Helium MFC set to  0.000000
10/31/2011	10:12:28 AM	H2 MFC set to  0.000000
10/31/2011	10:12:28 AM	BCl3 MFC set to  0.000000
10/31/2011	10:12:28 AM	PHl3 MFC set to  0.000000
10/31/2011	10:12:28 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:12:28 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:12:28 AM	Tube furnace set to 150
10/31/2011	10:12:58 AM	H2 valve closed
10/31/2011	10:12:58 AM	BCl3 valve closed
10/31/2011	10:12:58 AM	PH3 valve closed
10/31/2011	10:12:58 AM	SiCl4 pre valve closed
10/31/2011	10:12:58 AM	SiCl4 post valve closed
10/31/2011	10:12:58 AM	Bypass valve closed
10/31/2011	10:12:58 AM	Bubbler valve closed
10/31/2011	10:12:58 AM	Helium valve opened
10/31/2011	10:12:58 AM	Main Vac valve opened
10/31/2011	10:12:58 AM	Helium MFC set to  20.000000
10/31/2011	10:12:58 AM	H2 MFC set to  0.000000
10/31/2011	10:12:58 AM	BCl3 MFC set to  0.000000
10/31/2011	10:12:58 AM	PHl3 MFC set to  0.000000
10/31/2011	10:12:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:12:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:12:58 AM	Tube furnace set to 150
10/31/2011	10:13:28 AM	Helium valve closed
10/31/2011	10:13:28 AM	H2 valve closed
10/31/2011	10:13:28 AM	BCl3 valve closed
10/31/2011	10:13:28 AM	PH3 valve closed
10/31/2011	10:13:28 AM	SiCl4 pre valve closed
10/31/2011	10:13:28 AM	SiCl4 post valve closed
10/31/2011	10:13:28 AM	Bypass valve closed
10/31/2011	10:13:28 AM	Bubbler valve closed
10/31/2011	10:13:28 AM	Main Vac valve opened
10/31/2011	10:13:28 AM	Helium MFC set to  0.000000
10/31/2011	10:13:28 AM	H2 MFC set to  0.000000
10/31/2011	10:13:28 AM	BCl3 MFC set to  0.000000
10/31/2011	10:13:28 AM	PHl3 MFC set to  0.000000
10/31/2011	10:13:28 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:13:28 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:13:29 AM	Tube furnace set to 150
10/31/2011	10:13:59 AM	H2 valve closed
10/31/2011	10:13:59 AM	BCl3 valve closed
10/31/2011	10:13:59 AM	PH3 valve closed
10/31/2011	10:13:59 AM	SiCl4 pre valve closed
10/31/2011	10:13:59 AM	SiCl4 post valve closed
10/31/2011	10:13:59 AM	Bypass valve closed
10/31/2011	10:13:59 AM	Bubbler valve closed
10/31/2011	10:13:59 AM	Helium valve opened
10/31/2011	10:13:59 AM	Main Vac valve opened
10/31/2011	10:13:59 AM	Helium MFC set to  20.000000
10/31/2011	10:13:59 AM	H2 MFC set to  0.000000
10/31/2011	10:13:59 AM	BCl3 MFC set to  0.000000
10/31/2011	10:13:59 AM	PHl3 MFC set to  0.000000
10/31/2011	10:13:59 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:13:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:13:59 AM	Tube furnace set to 150
10/31/2011	10:14:29 AM	Helium valve closed
10/31/2011	10:14:29 AM	H2 valve closed
10/31/2011	10:14:29 AM	BCl3 valve closed
10/31/2011	10:14:29 AM	PH3 valve closed
10/31/2011	10:14:29 AM	SiCl4 pre valve closed
10/31/2011	10:14:29 AM	SiCl4 post valve closed
10/31/2011	10:14:29 AM	Bypass valve closed
10/31/2011	10:14:29 AM	Bubbler valve closed
10/31/2011	10:14:29 AM	Main Vac valve opened
10/31/2011	10:14:29 AM	Helium MFC set to  0.000000
10/31/2011	10:14:29 AM	H2 MFC set to  0.000000
10/31/2011	10:14:29 AM	BCl3 MFC set to  0.000000
10/31/2011	10:14:29 AM	PHl3 MFC set to  0.000000
10/31/2011	10:14:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:14:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:14:29 AM	Tube furnace set to 150
10/31/2011	10:14:59 AM	H2 valve closed
10/31/2011	10:14:59 AM	BCl3 valve closed
10/31/2011	10:14:59 AM	PH3 valve closed
10/31/2011	10:14:59 AM	SiCl4 pre valve closed
10/31/2011	10:14:59 AM	SiCl4 post valve closed
10/31/2011	10:14:59 AM	Bypass valve closed
10/31/2011	10:14:59 AM	Bubbler valve closed
10/31/2011	10:14:59 AM	Helium valve opened
10/31/2011	10:14:59 AM	Main Vac valve opened
10/31/2011	10:14:59 AM	Helium MFC set to  20.000000
10/31/2011	10:14:59 AM	H2 MFC set to  0.000000
10/31/2011	10:14:59 AM	BCl3 MFC set to  0.000000
10/31/2011	10:14:59 AM	PHl3 MFC set to  0.000000
10/31/2011	10:14:59 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:14:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:14:59 AM	Tube furnace set to 150
10/31/2011	10:15:29 AM	Helium valve closed
10/31/2011	10:15:29 AM	H2 valve closed
10/31/2011	10:15:29 AM	BCl3 valve closed
10/31/2011	10:15:29 AM	PH3 valve closed
10/31/2011	10:15:29 AM	SiCl4 pre valve closed
10/31/2011	10:15:29 AM	SiCl4 post valve closed
10/31/2011	10:15:29 AM	Bypass valve closed
10/31/2011	10:15:29 AM	Bubbler valve closed
10/31/2011	10:15:29 AM	Main Vac valve opened
10/31/2011	10:15:29 AM	Helium MFC set to  0.000000
10/31/2011	10:15:29 AM	H2 MFC set to  0.000000
10/31/2011	10:15:29 AM	BCl3 MFC set to  0.000000
10/31/2011	10:15:29 AM	PHl3 MFC set to  0.000000
10/31/2011	10:15:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:15:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:15:29 AM	Tube furnace set to 150
10/31/2011	10:15:59 AM	H2 valve closed
10/31/2011	10:15:59 AM	BCl3 valve closed
10/31/2011	10:15:59 AM	PH3 valve closed
10/31/2011	10:15:59 AM	SiCl4 pre valve closed
10/31/2011	10:15:59 AM	SiCl4 post valve closed
10/31/2011	10:15:59 AM	Bypass valve closed
10/31/2011	10:15:59 AM	Bubbler valve closed
10/31/2011	10:15:59 AM	Helium valve opened
10/31/2011	10:15:59 AM	Main Vac valve opened
10/31/2011	10:15:59 AM	Helium MFC set to  20.000000
10/31/2011	10:15:59 AM	H2 MFC set to  0.000000
10/31/2011	10:16:00 AM	BCl3 MFC set to  0.000000
10/31/2011	10:16:00 AM	PHl3 MFC set to  0.000000
10/31/2011	10:16:00 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:16:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:16:00 AM	Tube furnace set to 150
10/31/2011	10:16:30 AM	Helium valve closed
10/31/2011	10:16:30 AM	H2 valve closed
10/31/2011	10:16:30 AM	BCl3 valve closed
10/31/2011	10:16:30 AM	PH3 valve closed
10/31/2011	10:16:30 AM	SiCl4 pre valve closed
10/31/2011	10:16:30 AM	SiCl4 post valve closed
10/31/2011	10:16:30 AM	Bypass valve closed
10/31/2011	10:16:30 AM	Bubbler valve closed
10/31/2011	10:16:30 AM	Main Vac valve opened
10/31/2011	10:16:30 AM	Helium MFC set to  0.000000
10/31/2011	10:16:30 AM	H2 MFC set to  0.000000
10/31/2011	10:16:30 AM	BCl3 MFC set to  0.000000
10/31/2011	10:16:30 AM	PHl3 MFC set to  0.000000
10/31/2011	10:16:30 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:16:30 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:16:30 AM	Tube furnace set to 150
10/31/2011	10:17:00 AM	H2 valve closed
10/31/2011	10:17:00 AM	BCl3 valve closed
10/31/2011	10:17:00 AM	PH3 valve closed
10/31/2011	10:17:00 AM	SiCl4 pre valve closed
10/31/2011	10:17:00 AM	SiCl4 post valve closed
10/31/2011	10:17:00 AM	Bypass valve closed
10/31/2011	10:17:00 AM	Bubbler valve closed
10/31/2011	10:17:00 AM	Helium valve opened
10/31/2011	10:17:00 AM	Main Vac valve opened
10/31/2011	10:17:00 AM	Helium MFC set to  20.000000
10/31/2011	10:17:00 AM	H2 MFC set to  0.000000
10/31/2011	10:17:00 AM	BCl3 MFC set to  0.000000
10/31/2011	10:17:00 AM	PHl3 MFC set to  0.000000
10/31/2011	10:17:00 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:17:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:17:00 AM	Tube furnace set to 150
10/31/2011	10:17:30 AM	Helium valve closed
10/31/2011	10:17:30 AM	H2 valve closed
10/31/2011	10:17:30 AM	BCl3 valve closed
10/31/2011	10:17:30 AM	PH3 valve closed
10/31/2011	10:17:30 AM	SiCl4 pre valve closed
10/31/2011	10:17:30 AM	SiCl4 post valve closed
10/31/2011	10:17:30 AM	Bypass valve closed
10/31/2011	10:17:30 AM	Bubbler valve closed
10/31/2011	10:17:30 AM	Main Vac valve opened
10/31/2011	10:17:30 AM	Helium MFC set to  0.000000
10/31/2011	10:17:30 AM	H2 MFC set to  0.000000
10/31/2011	10:17:30 AM	BCl3 MFC set to  0.000000
10/31/2011	10:17:30 AM	PHl3 MFC set to  0.000000
10/31/2011	10:17:30 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:17:30 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:17:30 AM	Tube furnace set to 150
10/31/2011	10:18:00 AM	H2 valve closed
10/31/2011	10:18:00 AM	BCl3 valve closed
10/31/2011	10:18:00 AM	PH3 valve closed
10/31/2011	10:18:00 AM	SiCl4 pre valve closed
10/31/2011	10:18:00 AM	SiCl4 post valve closed
10/31/2011	10:18:00 AM	Bypass valve closed
10/31/2011	10:18:00 AM	Bubbler valve closed
10/31/2011	10:18:00 AM	Helium valve opened
10/31/2011	10:18:00 AM	Main Vac valve opened
10/31/2011	10:18:00 AM	Helium MFC set to  20.000000
10/31/2011	10:18:00 AM	H2 MFC set to  0.000000
10/31/2011	10:18:00 AM	BCl3 MFC set to  0.000000
10/31/2011	10:18:00 AM	PHl3 MFC set to  0.000000
10/31/2011	10:18:00 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:18:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:18:01 AM	Tube furnace set to 150
10/31/2011	10:18:31 AM	Helium valve closed
10/31/2011	10:18:31 AM	H2 valve closed
10/31/2011	10:18:31 AM	BCl3 valve closed
10/31/2011	10:18:31 AM	PH3 valve closed
10/31/2011	10:18:31 AM	SiCl4 pre valve closed
10/31/2011	10:18:31 AM	SiCl4 post valve closed
10/31/2011	10:18:31 AM	Bypass valve closed
10/31/2011	10:18:31 AM	Bubbler valve closed
10/31/2011	10:18:31 AM	Main Vac valve opened
10/31/2011	10:18:31 AM	Helium MFC set to  0.000000
10/31/2011	10:18:31 AM	H2 MFC set to  0.000000
10/31/2011	10:18:31 AM	BCl3 MFC set to  0.000000
10/31/2011	10:18:31 AM	PHl3 MFC set to  0.000000
10/31/2011	10:18:31 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:18:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:18:31 AM	Tube furnace set to 150
10/31/2011	10:19:01 AM	H2 valve closed
10/31/2011	10:19:01 AM	BCl3 valve closed
10/31/2011	10:19:01 AM	PH3 valve closed
10/31/2011	10:19:01 AM	SiCl4 pre valve closed
10/31/2011	10:19:01 AM	SiCl4 post valve closed
10/31/2011	10:19:01 AM	Bypass valve closed
10/31/2011	10:19:01 AM	Bubbler valve closed
10/31/2011	10:19:01 AM	Helium valve opened
10/31/2011	10:19:01 AM	Main Vac valve opened
10/31/2011	10:19:01 AM	Helium MFC set to  20.000000
10/31/2011	10:19:01 AM	H2 MFC set to  0.000000
10/31/2011	10:19:01 AM	BCl3 MFC set to  0.000000
10/31/2011	10:19:01 AM	PHl3 MFC set to  0.000000
10/31/2011	10:19:01 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:19:01 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:19:01 AM	Tube furnace set to 150
10/31/2011	10:19:31 AM	Helium valve closed
10/31/2011	10:19:31 AM	H2 valve closed
10/31/2011	10:19:31 AM	BCl3 valve closed
10/31/2011	10:19:31 AM	PH3 valve closed
10/31/2011	10:19:31 AM	SiCl4 pre valve closed
10/31/2011	10:19:31 AM	SiCl4 post valve closed
10/31/2011	10:19:31 AM	Bypass valve closed
10/31/2011	10:19:31 AM	Bubbler valve closed
10/31/2011	10:19:31 AM	Main Vac valve opened
10/31/2011	10:19:31 AM	Helium MFC set to  0.000000
10/31/2011	10:19:31 AM	H2 MFC set to  0.000000
10/31/2011	10:19:31 AM	BCl3 MFC set to  0.000000
10/31/2011	10:19:31 AM	PHl3 MFC set to  0.000000
10/31/2011	10:19:31 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:19:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:19:31 AM	Tube furnace set to 150
10/31/2011	10:20:01 AM	H2 valve closed
10/31/2011	10:20:01 AM	BCl3 valve closed
10/31/2011	10:20:01 AM	PH3 valve closed
10/31/2011	10:20:01 AM	SiCl4 pre valve closed
10/31/2011	10:20:01 AM	SiCl4 post valve closed
10/31/2011	10:20:01 AM	Bypass valve closed
10/31/2011	10:20:01 AM	Bubbler valve closed
10/31/2011	10:20:01 AM	Helium valve opened
10/31/2011	10:20:01 AM	Main Vac valve opened
10/31/2011	10:20:01 AM	Helium MFC set to  20.000000
10/31/2011	10:20:01 AM	H2 MFC set to  0.000000
10/31/2011	10:20:01 AM	BCl3 MFC set to  0.000000
10/31/2011	10:20:01 AM	PHl3 MFC set to  0.000000
10/31/2011	10:20:01 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:20:01 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:20:01 AM	Tube furnace set to 150
10/31/2011	10:20:31 AM	Helium valve closed
10/31/2011	10:20:31 AM	H2 valve closed
10/31/2011	10:20:31 AM	BCl3 valve closed
10/31/2011	10:20:31 AM	PH3 valve closed
10/31/2011	10:20:31 AM	SiCl4 pre valve closed
10/31/2011	10:20:31 AM	SiCl4 post valve closed
10/31/2011	10:20:31 AM	Bypass valve closed
10/31/2011	10:20:31 AM	Bubbler valve closed
10/31/2011	10:20:31 AM	Main Vac valve opened
10/31/2011	10:20:31 AM	Helium MFC set to  0.000000
10/31/2011	10:20:31 AM	H2 MFC set to  0.000000
10/31/2011	10:20:31 AM	BCl3 MFC set to  0.000000
10/31/2011	10:20:31 AM	PHl3 MFC set to  0.000000
10/31/2011	10:20:31 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:20:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:20:32 AM	Tube furnace set to 150
10/31/2011	10:21:02 AM	H2 valve closed
10/31/2011	10:21:02 AM	BCl3 valve closed
10/31/2011	10:21:02 AM	PH3 valve closed
10/31/2011	10:21:02 AM	SiCl4 pre valve closed
10/31/2011	10:21:02 AM	SiCl4 post valve closed
10/31/2011	10:21:02 AM	Bypass valve closed
10/31/2011	10:21:02 AM	Bubbler valve closed
10/31/2011	10:21:02 AM	Helium valve opened
10/31/2011	10:21:02 AM	Main Vac valve opened
10/31/2011	10:21:02 AM	Helium MFC set to  20.000000
10/31/2011	10:21:02 AM	H2 MFC set to  0.000000
10/31/2011	10:21:02 AM	BCl3 MFC set to  0.000000
10/31/2011	10:21:02 AM	PHl3 MFC set to  0.000000
10/31/2011	10:21:02 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:21:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:21:02 AM	Tube furnace set to 150
10/31/2011	10:21:32 AM	Helium valve closed
10/31/2011	10:21:32 AM	H2 valve closed
10/31/2011	10:21:32 AM	BCl3 valve closed
10/31/2011	10:21:32 AM	PH3 valve closed
10/31/2011	10:21:32 AM	SiCl4 pre valve closed
10/31/2011	10:21:32 AM	SiCl4 post valve closed
10/31/2011	10:21:32 AM	Bypass valve closed
10/31/2011	10:21:32 AM	Bubbler valve closed
10/31/2011	10:21:32 AM	Main Vac valve opened
10/31/2011	10:21:32 AM	Helium MFC set to  0.000000
10/31/2011	10:21:32 AM	H2 MFC set to  0.000000
10/31/2011	10:21:32 AM	BCl3 MFC set to  0.000000
10/31/2011	10:21:32 AM	PHl3 MFC set to  0.000000
10/31/2011	10:21:32 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:21:32 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:21:32 AM	Tube furnace set to 180
10/31/2011	10:21:37 AM	Run finished at 10:21 AM
10/31/2011	10:28:16 AM	Recipe started at 10:27 AM
10/31/2011	10:28:16 AM	Helium valve closed
10/31/2011	10:28:16 AM	H2 valve closed
10/31/2011	10:28:16 AM	BCl3 valve closed
10/31/2011	10:28:16 AM	PH3 valve closed
10/31/2011	10:28:16 AM	SiCl4 pre valve closed
10/31/2011	10:28:16 AM	SiCl4 post valve closed
10/31/2011	10:28:16 AM	Main Vac valve closed
10/31/2011	10:28:16 AM	Bubbler valve closed
10/31/2011	10:28:16 AM	Bypass valve opened
10/31/2011	10:28:16 AM	Helium MFC set to  0.000000
10/31/2011	10:28:16 AM	H2 MFC set to  0.000000
10/31/2011	10:28:16 AM	BCl3 MFC set to  0.000000
10/31/2011	10:28:16 AM	PHl3 MFC set to  0.000000
10/31/2011	10:28:16 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:28:16 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:28:16 AM	Tube furnace set to 150
10/31/2011	10:28:17 AM	Helium valve closed
10/31/2011	10:28:17 AM	H2 valve closed
10/31/2011	10:28:17 AM	BCl3 valve closed
10/31/2011	10:28:17 AM	PH3 valve closed
10/31/2011	10:28:17 AM	SiCl4 pre valve closed
10/31/2011	10:28:17 AM	SiCl4 post valve closed
10/31/2011	10:28:17 AM	Main Vac valve closed
10/31/2011	10:28:17 AM	Bubbler valve closed
10/31/2011	10:28:17 AM	Bypass valve opened
10/31/2011	10:28:17 AM	Helium MFC set to  0.000000
10/31/2011	10:28:17 AM	H2 MFC set to  0.000000
10/31/2011	10:28:17 AM	BCl3 MFC set to  0.000000
10/31/2011	10:28:17 AM	PHl3 MFC set to  0.000000
10/31/2011	10:28:17 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:28:17 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:28:17 AM	Tube furnace set to 150
10/31/2011	10:28:21 AM	Helium valve closed
10/31/2011	10:28:21 AM	H2 valve closed
10/31/2011	10:28:21 AM	BCl3 valve closed
10/31/2011	10:28:21 AM	PH3 valve closed
10/31/2011	10:28:21 AM	SiCl4 pre valve closed
10/31/2011	10:28:21 AM	SiCl4 post valve closed
10/31/2011	10:28:21 AM	Bypass valve closed
10/31/2011	10:28:21 AM	Bubbler valve closed
10/31/2011	10:28:21 AM	Main Vac valve opened
10/31/2011	10:28:21 AM	Helium MFC set to  0.000000
10/31/2011	10:28:21 AM	H2 MFC set to  0.000000
10/31/2011	10:28:21 AM	BCl3 MFC set to  0.000000
10/31/2011	10:28:21 AM	PHl3 MFC set to  0.000000
10/31/2011	10:28:21 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:28:21 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:28:21 AM	Tube furnace set to 150
10/31/2011	10:28:51 AM	H2 valve closed
10/31/2011	10:28:51 AM	BCl3 valve closed
10/31/2011	10:28:51 AM	PH3 valve closed
10/31/2011	10:28:51 AM	SiCl4 pre valve closed
10/31/2011	10:28:51 AM	SiCl4 post valve closed
10/31/2011	10:28:51 AM	Bypass valve closed
10/31/2011	10:28:51 AM	Bubbler valve closed
10/31/2011	10:28:51 AM	Helium valve opened
10/31/2011	10:28:51 AM	Main Vac valve opened
10/31/2011	10:28:51 AM	Helium MFC set to  20.000000
10/31/2011	10:28:51 AM	H2 MFC set to  0.000000
10/31/2011	10:28:51 AM	BCl3 MFC set to  0.000000
10/31/2011	10:28:51 AM	PHl3 MFC set to  0.000000
10/31/2011	10:28:51 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:28:51 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:28:51 AM	Tube furnace set to 150
10/31/2011	10:29:21 AM	Helium valve closed
10/31/2011	10:29:21 AM	H2 valve closed
10/31/2011	10:29:22 AM	BCl3 valve closed
10/31/2011	10:29:22 AM	PH3 valve closed
10/31/2011	10:29:22 AM	SiCl4 pre valve closed
10/31/2011	10:29:22 AM	SiCl4 post valve closed
10/31/2011	10:29:22 AM	Bypass valve closed
10/31/2011	10:29:22 AM	Bubbler valve closed
10/31/2011	10:29:22 AM	Main Vac valve opened
10/31/2011	10:29:22 AM	Helium MFC set to  0.000000
10/31/2011	10:29:22 AM	H2 MFC set to  0.000000
10/31/2011	10:29:22 AM	BCl3 MFC set to  0.000000
10/31/2011	10:29:22 AM	PHl3 MFC set to  0.000000
10/31/2011	10:29:22 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:29:22 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:29:22 AM	Tube furnace set to 150
10/31/2011	10:29:52 AM	H2 valve closed
10/31/2011	10:29:52 AM	BCl3 valve closed
10/31/2011	10:29:52 AM	PH3 valve closed
10/31/2011	10:29:52 AM	SiCl4 pre valve closed
10/31/2011	10:29:52 AM	SiCl4 post valve closed
10/31/2011	10:29:52 AM	Bypass valve closed
10/31/2011	10:29:52 AM	Bubbler valve closed
10/31/2011	10:29:52 AM	Helium valve opened
10/31/2011	10:29:52 AM	Main Vac valve opened
10/31/2011	10:29:52 AM	Helium MFC set to  20.000000
10/31/2011	10:29:52 AM	H2 MFC set to  0.000000
10/31/2011	10:29:52 AM	BCl3 MFC set to  0.000000
10/31/2011	10:29:52 AM	PHl3 MFC set to  0.000000
10/31/2011	10:29:52 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:29:52 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:29:52 AM	Tube furnace set to 150
10/31/2011	10:30:22 AM	Helium valve closed
10/31/2011	10:30:22 AM	H2 valve closed
10/31/2011	10:30:22 AM	BCl3 valve closed
10/31/2011	10:30:22 AM	PH3 valve closed
10/31/2011	10:30:22 AM	SiCl4 pre valve closed
10/31/2011	10:30:22 AM	SiCl4 post valve closed
10/31/2011	10:30:22 AM	Bypass valve closed
10/31/2011	10:30:22 AM	Bubbler valve closed
10/31/2011	10:30:22 AM	Main Vac valve opened
10/31/2011	10:30:22 AM	Helium MFC set to  0.000000
10/31/2011	10:30:22 AM	H2 MFC set to  0.000000
10/31/2011	10:30:22 AM	BCl3 MFC set to  0.000000
10/31/2011	10:30:22 AM	PHl3 MFC set to  0.000000
10/31/2011	10:30:22 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:30:22 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:30:22 AM	Tube furnace set to 150
10/31/2011	10:30:52 AM	H2 valve closed
10/31/2011	10:30:52 AM	BCl3 valve closed
10/31/2011	10:30:52 AM	PH3 valve closed
10/31/2011	10:30:52 AM	SiCl4 pre valve closed
10/31/2011	10:30:52 AM	SiCl4 post valve closed
10/31/2011	10:30:52 AM	Bypass valve closed
10/31/2011	10:30:52 AM	Bubbler valve closed
10/31/2011	10:30:52 AM	Helium valve opened
10/31/2011	10:30:52 AM	Main Vac valve opened
10/31/2011	10:30:52 AM	Helium MFC set to  20.000000
10/31/2011	10:30:52 AM	H2 MFC set to  0.000000
10/31/2011	10:30:52 AM	BCl3 MFC set to  0.000000
10/31/2011	10:30:52 AM	PHl3 MFC set to  0.000000
10/31/2011	10:30:52 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:30:52 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:30:52 AM	Tube furnace set to 150
10/31/2011	10:31:22 AM	Helium valve closed
10/31/2011	10:31:22 AM	H2 valve closed
10/31/2011	10:31:22 AM	BCl3 valve closed
10/31/2011	10:31:22 AM	PH3 valve closed
10/31/2011	10:31:22 AM	SiCl4 pre valve closed
10/31/2011	10:31:22 AM	SiCl4 post valve closed
10/31/2011	10:31:22 AM	Bypass valve closed
10/31/2011	10:31:22 AM	Bubbler valve closed
10/31/2011	10:31:22 AM	Main Vac valve opened
10/31/2011	10:31:22 AM	Helium MFC set to  0.000000
10/31/2011	10:31:22 AM	H2 MFC set to  0.000000
10/31/2011	10:31:22 AM	BCl3 MFC set to  0.000000
10/31/2011	10:31:22 AM	PHl3 MFC set to  0.000000
10/31/2011	10:31:22 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:31:22 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:31:22 AM	Tube furnace set to 150
10/31/2011	10:31:53 AM	H2 valve closed
10/31/2011	10:31:53 AM	BCl3 valve closed
10/31/2011	10:31:53 AM	PH3 valve closed
10/31/2011	10:31:53 AM	SiCl4 pre valve closed
10/31/2011	10:31:53 AM	SiCl4 post valve closed
10/31/2011	10:31:53 AM	Bypass valve closed
10/31/2011	10:31:53 AM	Bubbler valve closed
10/31/2011	10:31:53 AM	Helium valve opened
10/31/2011	10:31:53 AM	Main Vac valve opened
10/31/2011	10:31:53 AM	Helium MFC set to  20.000000
10/31/2011	10:31:53 AM	H2 MFC set to  0.000000
10/31/2011	10:31:53 AM	BCl3 MFC set to  0.000000
10/31/2011	10:31:53 AM	PHl3 MFC set to  0.000000
10/31/2011	10:31:53 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:31:53 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:31:53 AM	Tube furnace set to 150
10/31/2011	10:32:23 AM	Helium valve closed
10/31/2011	10:32:23 AM	H2 valve closed
10/31/2011	10:32:23 AM	BCl3 valve closed
10/31/2011	10:32:23 AM	PH3 valve closed
10/31/2011	10:32:23 AM	SiCl4 pre valve closed
10/31/2011	10:32:23 AM	SiCl4 post valve closed
10/31/2011	10:32:23 AM	Bypass valve closed
10/31/2011	10:32:23 AM	Bubbler valve closed
10/31/2011	10:32:23 AM	Main Vac valve opened
10/31/2011	10:32:23 AM	Helium MFC set to  0.000000
10/31/2011	10:32:23 AM	H2 MFC set to  0.000000
10/31/2011	10:32:23 AM	BCl3 MFC set to  0.000000
10/31/2011	10:32:23 AM	PHl3 MFC set to  0.000000
10/31/2011	10:32:23 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:32:23 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:32:23 AM	Tube furnace set to 150
10/31/2011	10:32:53 AM	H2 valve closed
10/31/2011	10:32:53 AM	BCl3 valve closed
10/31/2011	10:32:53 AM	PH3 valve closed
10/31/2011	10:32:53 AM	SiCl4 pre valve closed
10/31/2011	10:32:53 AM	SiCl4 post valve closed
10/31/2011	10:32:53 AM	Bypass valve closed
10/31/2011	10:32:53 AM	Bubbler valve closed
10/31/2011	10:32:53 AM	Helium valve opened
10/31/2011	10:32:53 AM	Main Vac valve opened
10/31/2011	10:32:53 AM	Helium MFC set to  20.000000
10/31/2011	10:32:53 AM	H2 MFC set to  0.000000
10/31/2011	10:32:53 AM	BCl3 MFC set to  0.000000
10/31/2011	10:32:53 AM	PHl3 MFC set to  0.000000
10/31/2011	10:32:53 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:32:53 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:32:53 AM	Tube furnace set to 150
10/31/2011	10:33:23 AM	Helium valve closed
10/31/2011	10:33:23 AM	H2 valve closed
10/31/2011	10:33:23 AM	BCl3 valve closed
10/31/2011	10:33:23 AM	PH3 valve closed
10/31/2011	10:33:23 AM	SiCl4 pre valve closed
10/31/2011	10:33:23 AM	SiCl4 post valve closed
10/31/2011	10:33:23 AM	Bypass valve closed
10/31/2011	10:33:23 AM	Bubbler valve closed
10/31/2011	10:33:23 AM	Main Vac valve opened
10/31/2011	10:33:23 AM	Helium MFC set to  0.000000
10/31/2011	10:33:23 AM	H2 MFC set to  0.000000
10/31/2011	10:33:23 AM	BCl3 MFC set to  0.000000
10/31/2011	10:33:23 AM	PHl3 MFC set to  0.000000
10/31/2011	10:33:23 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:33:23 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:33:23 AM	Tube furnace set to 150
10/31/2011	10:33:53 AM	H2 valve closed
10/31/2011	10:33:53 AM	BCl3 valve closed
10/31/2011	10:33:53 AM	PH3 valve closed
10/31/2011	10:33:53 AM	SiCl4 pre valve closed
10/31/2011	10:33:53 AM	SiCl4 post valve closed
10/31/2011	10:33:53 AM	Bypass valve closed
10/31/2011	10:33:53 AM	Bubbler valve closed
10/31/2011	10:33:53 AM	Helium valve opened
10/31/2011	10:33:53 AM	Main Vac valve opened
10/31/2011	10:33:53 AM	Helium MFC set to  20.000000
10/31/2011	10:33:53 AM	H2 MFC set to  0.000000
10/31/2011	10:33:53 AM	BCl3 MFC set to  0.000000
10/31/2011	10:33:53 AM	PHl3 MFC set to  0.000000
10/31/2011	10:33:53 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:33:53 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:33:54 AM	Tube furnace set to 150
10/31/2011	10:34:24 AM	Helium valve closed
10/31/2011	10:34:24 AM	H2 valve closed
10/31/2011	10:34:24 AM	BCl3 valve closed
10/31/2011	10:34:24 AM	PH3 valve closed
10/31/2011	10:34:24 AM	SiCl4 pre valve closed
10/31/2011	10:34:24 AM	SiCl4 post valve closed
10/31/2011	10:34:24 AM	Bypass valve closed
10/31/2011	10:34:24 AM	Bubbler valve closed
10/31/2011	10:34:24 AM	Main Vac valve opened
10/31/2011	10:34:24 AM	Helium MFC set to  0.000000
10/31/2011	10:34:24 AM	H2 MFC set to  0.000000
10/31/2011	10:34:24 AM	BCl3 MFC set to  0.000000
10/31/2011	10:34:24 AM	PHl3 MFC set to  0.000000
10/31/2011	10:34:24 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:34:24 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:34:24 AM	Tube furnace set to 150
10/31/2011	10:34:54 AM	H2 valve closed
10/31/2011	10:34:54 AM	BCl3 valve closed
10/31/2011	10:34:54 AM	PH3 valve closed
10/31/2011	10:34:54 AM	SiCl4 pre valve closed
10/31/2011	10:34:54 AM	SiCl4 post valve closed
10/31/2011	10:34:54 AM	Bypass valve closed
10/31/2011	10:34:54 AM	Bubbler valve closed
10/31/2011	10:34:54 AM	Helium valve opened
10/31/2011	10:34:54 AM	Main Vac valve opened
10/31/2011	10:34:54 AM	Helium MFC set to  20.000000
10/31/2011	10:34:54 AM	H2 MFC set to  0.000000
10/31/2011	10:34:54 AM	BCl3 MFC set to  0.000000
10/31/2011	10:34:54 AM	PHl3 MFC set to  0.000000
10/31/2011	10:34:54 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:34:54 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:34:54 AM	Tube furnace set to 150
10/31/2011	10:35:24 AM	Helium valve closed
10/31/2011	10:35:24 AM	H2 valve closed
10/31/2011	10:35:24 AM	BCl3 valve closed
10/31/2011	10:35:24 AM	PH3 valve closed
10/31/2011	10:35:24 AM	SiCl4 pre valve closed
10/31/2011	10:35:24 AM	SiCl4 post valve closed
10/31/2011	10:35:24 AM	Bypass valve closed
10/31/2011	10:35:24 AM	Bubbler valve closed
10/31/2011	10:35:24 AM	Main Vac valve opened
10/31/2011	10:35:24 AM	Helium MFC set to  0.000000
10/31/2011	10:35:24 AM	H2 MFC set to  0.000000
10/31/2011	10:35:24 AM	BCl3 MFC set to  0.000000
10/31/2011	10:35:24 AM	PHl3 MFC set to  0.000000
10/31/2011	10:35:24 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:35:24 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:35:24 AM	Tube furnace set to 150
10/31/2011	10:35:54 AM	H2 valve closed
10/31/2011	10:35:54 AM	BCl3 valve closed
10/31/2011	10:35:54 AM	PH3 valve closed
10/31/2011	10:35:54 AM	SiCl4 pre valve closed
10/31/2011	10:35:54 AM	SiCl4 post valve closed
10/31/2011	10:35:54 AM	Bypass valve closed
10/31/2011	10:35:54 AM	Bubbler valve closed
10/31/2011	10:35:54 AM	Helium valve opened
10/31/2011	10:35:54 AM	Main Vac valve opened
10/31/2011	10:35:54 AM	Helium MFC set to  20.000000
10/31/2011	10:35:54 AM	H2 MFC set to  0.000000
10/31/2011	10:35:54 AM	BCl3 MFC set to  0.000000
10/31/2011	10:35:54 AM	PHl3 MFC set to  0.000000
10/31/2011	10:35:54 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:35:54 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:35:54 AM	Tube furnace set to 150
10/31/2011	10:36:24 AM	Helium valve closed
10/31/2011	10:36:24 AM	H2 valve closed
10/31/2011	10:36:24 AM	BCl3 valve closed
10/31/2011	10:36:24 AM	PH3 valve closed
10/31/2011	10:36:24 AM	SiCl4 pre valve closed
10/31/2011	10:36:24 AM	SiCl4 post valve closed
10/31/2011	10:36:24 AM	Bypass valve closed
10/31/2011	10:36:24 AM	Bubbler valve closed
10/31/2011	10:36:24 AM	Main Vac valve opened
10/31/2011	10:36:24 AM	Helium MFC set to  0.000000
10/31/2011	10:36:24 AM	H2 MFC set to  0.000000
10/31/2011	10:36:24 AM	BCl3 MFC set to  0.000000
10/31/2011	10:36:24 AM	PHl3 MFC set to  0.000000
10/31/2011	10:36:24 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:36:24 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:36:25 AM	Tube furnace set to 150
10/31/2011	10:36:55 AM	H2 valve closed
10/31/2011	10:36:55 AM	BCl3 valve closed
10/31/2011	10:36:55 AM	PH3 valve closed
10/31/2011	10:36:55 AM	SiCl4 pre valve closed
10/31/2011	10:36:55 AM	SiCl4 post valve closed
10/31/2011	10:36:55 AM	Bypass valve closed
10/31/2011	10:36:55 AM	Bubbler valve closed
10/31/2011	10:36:55 AM	Helium valve opened
10/31/2011	10:36:55 AM	Main Vac valve opened
10/31/2011	10:36:55 AM	Helium MFC set to  20.000000
10/31/2011	10:36:55 AM	H2 MFC set to  0.000000
10/31/2011	10:36:55 AM	BCl3 MFC set to  0.000000
10/31/2011	10:36:55 AM	PHl3 MFC set to  0.000000
10/31/2011	10:36:55 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:36:55 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:36:55 AM	Tube furnace set to 150
10/31/2011	10:37:25 AM	Helium valve closed
10/31/2011	10:37:25 AM	H2 valve closed
10/31/2011	10:37:25 AM	BCl3 valve closed
10/31/2011	10:37:25 AM	PH3 valve closed
10/31/2011	10:37:25 AM	SiCl4 pre valve closed
10/31/2011	10:37:25 AM	SiCl4 post valve closed
10/31/2011	10:37:25 AM	Bypass valve closed
10/31/2011	10:37:25 AM	Bubbler valve closed
10/31/2011	10:37:25 AM	Main Vac valve opened
10/31/2011	10:37:25 AM	Helium MFC set to  0.000000
10/31/2011	10:37:25 AM	H2 MFC set to  0.000000
10/31/2011	10:37:25 AM	BCl3 MFC set to  0.000000
10/31/2011	10:37:25 AM	PHl3 MFC set to  0.000000
10/31/2011	10:37:25 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:37:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:37:25 AM	Tube furnace set to 150
10/31/2011	10:37:55 AM	H2 valve closed
10/31/2011	10:37:55 AM	BCl3 valve closed
10/31/2011	10:37:55 AM	PH3 valve closed
10/31/2011	10:37:55 AM	SiCl4 pre valve closed
10/31/2011	10:37:55 AM	SiCl4 post valve closed
10/31/2011	10:37:55 AM	Bypass valve closed
10/31/2011	10:37:55 AM	Bubbler valve closed
10/31/2011	10:37:55 AM	Helium valve opened
10/31/2011	10:37:55 AM	Main Vac valve opened
10/31/2011	10:37:55 AM	Helium MFC set to  20.000000
10/31/2011	10:37:55 AM	H2 MFC set to  0.000000
10/31/2011	10:37:55 AM	BCl3 MFC set to  0.000000
10/31/2011	10:37:55 AM	PHl3 MFC set to  0.000000
10/31/2011	10:37:55 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:37:55 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:37:55 AM	Tube furnace set to 150
10/31/2011	10:38:25 AM	Helium valve closed
10/31/2011	10:38:25 AM	H2 valve closed
10/31/2011	10:38:25 AM	BCl3 valve closed
10/31/2011	10:38:25 AM	PH3 valve closed
10/31/2011	10:38:25 AM	SiCl4 pre valve closed
10/31/2011	10:38:25 AM	SiCl4 post valve closed
10/31/2011	10:38:25 AM	Bypass valve closed
10/31/2011	10:38:25 AM	Bubbler valve closed
10/31/2011	10:38:25 AM	Main Vac valve opened
10/31/2011	10:38:25 AM	Helium MFC set to  0.000000
10/31/2011	10:38:25 AM	H2 MFC set to  0.000000
10/31/2011	10:38:25 AM	BCl3 MFC set to  0.000000
10/31/2011	10:38:25 AM	PHl3 MFC set to  0.000000
10/31/2011	10:38:25 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:38:25 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:38:25 AM	Tube furnace set to 150
10/31/2011	10:38:55 AM	H2 valve closed
10/31/2011	10:38:55 AM	BCl3 valve closed
10/31/2011	10:38:55 AM	PH3 valve closed
10/31/2011	10:38:55 AM	SiCl4 pre valve closed
10/31/2011	10:38:55 AM	SiCl4 post valve closed
10/31/2011	10:38:55 AM	Bypass valve closed
10/31/2011	10:38:55 AM	Bubbler valve closed
10/31/2011	10:38:56 AM	Helium valve opened
10/31/2011	10:38:56 AM	Main Vac valve opened
10/31/2011	10:38:56 AM	Helium MFC set to  20.000000
10/31/2011	10:38:56 AM	H2 MFC set to  0.000000
10/31/2011	10:38:56 AM	BCl3 MFC set to  0.000000
10/31/2011	10:38:56 AM	PHl3 MFC set to  0.000000
10/31/2011	10:38:56 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:38:56 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:38:56 AM	Tube furnace set to 150
10/31/2011	10:39:26 AM	Helium valve closed
10/31/2011	10:39:26 AM	H2 valve closed
10/31/2011	10:39:26 AM	BCl3 valve closed
10/31/2011	10:39:26 AM	PH3 valve closed
10/31/2011	10:39:26 AM	SiCl4 pre valve closed
10/31/2011	10:39:26 AM	SiCl4 post valve closed
10/31/2011	10:39:26 AM	Bypass valve closed
10/31/2011	10:39:26 AM	Bubbler valve closed
10/31/2011	10:39:26 AM	Main Vac valve opened
10/31/2011	10:39:26 AM	Helium MFC set to  0.000000
10/31/2011	10:39:26 AM	H2 MFC set to  0.000000
10/31/2011	10:39:26 AM	BCl3 MFC set to  0.000000
10/31/2011	10:39:26 AM	PHl3 MFC set to  0.000000
10/31/2011	10:39:26 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:39:26 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:39:26 AM	Tube furnace set to 150
10/31/2011	10:39:56 AM	H2 valve closed
10/31/2011	10:39:56 AM	BCl3 valve closed
10/31/2011	10:39:56 AM	PH3 valve closed
10/31/2011	10:39:56 AM	SiCl4 pre valve closed
10/31/2011	10:39:56 AM	SiCl4 post valve closed
10/31/2011	10:39:56 AM	Bypass valve closed
10/31/2011	10:39:56 AM	Bubbler valve closed
10/31/2011	10:39:56 AM	Helium valve opened
10/31/2011	10:39:56 AM	Main Vac valve opened
10/31/2011	10:39:56 AM	Helium MFC set to  20.000000
10/31/2011	10:39:56 AM	H2 MFC set to  0.000000
10/31/2011	10:39:56 AM	BCl3 MFC set to  0.000000
10/31/2011	10:39:56 AM	PHl3 MFC set to  0.000000
10/31/2011	10:39:56 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:39:56 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:39:56 AM	Tube furnace set to 150
10/31/2011	10:40:26 AM	Helium valve closed
10/31/2011	10:40:26 AM	H2 valve closed
10/31/2011	10:40:26 AM	BCl3 valve closed
10/31/2011	10:40:26 AM	PH3 valve closed
10/31/2011	10:40:26 AM	SiCl4 pre valve closed
10/31/2011	10:40:26 AM	SiCl4 post valve closed
10/31/2011	10:40:26 AM	Bypass valve closed
10/31/2011	10:40:26 AM	Bubbler valve closed
10/31/2011	10:40:26 AM	Main Vac valve opened
10/31/2011	10:40:26 AM	Helium MFC set to  0.000000
10/31/2011	10:40:26 AM	H2 MFC set to  0.000000
10/31/2011	10:40:26 AM	BCl3 MFC set to  0.000000
10/31/2011	10:40:26 AM	PHl3 MFC set to  0.000000
10/31/2011	10:40:26 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:40:26 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:40:26 AM	Tube furnace set to 150
10/31/2011	10:40:56 AM	H2 valve closed
10/31/2011	10:40:56 AM	BCl3 valve closed
10/31/2011	10:40:56 AM	PH3 valve closed
10/31/2011	10:40:56 AM	SiCl4 pre valve closed
10/31/2011	10:40:56 AM	SiCl4 post valve closed
10/31/2011	10:40:56 AM	Bypass valve closed
10/31/2011	10:40:56 AM	Bubbler valve closed
10/31/2011	10:40:56 AM	Helium valve opened
10/31/2011	10:40:56 AM	Main Vac valve opened
10/31/2011	10:40:56 AM	Helium MFC set to  20.000000
10/31/2011	10:40:56 AM	H2 MFC set to  0.000000
10/31/2011	10:40:56 AM	BCl3 MFC set to  0.000000
10/31/2011	10:40:56 AM	PHl3 MFC set to  0.000000
10/31/2011	10:40:56 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:40:56 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:40:57 AM	Tube furnace set to 150
10/31/2011	10:41:27 AM	Helium valve closed
10/31/2011	10:41:27 AM	H2 valve closed
10/31/2011	10:41:27 AM	BCl3 valve closed
10/31/2011	10:41:27 AM	PH3 valve closed
10/31/2011	10:41:27 AM	SiCl4 pre valve closed
10/31/2011	10:41:27 AM	SiCl4 post valve closed
10/31/2011	10:41:27 AM	Bypass valve closed
10/31/2011	10:41:27 AM	Bubbler valve closed
10/31/2011	10:41:27 AM	Main Vac valve opened
10/31/2011	10:41:27 AM	Helium MFC set to  0.000000
10/31/2011	10:41:27 AM	H2 MFC set to  0.000000
10/31/2011	10:41:27 AM	BCl3 MFC set to  0.000000
10/31/2011	10:41:27 AM	PHl3 MFC set to  0.000000
10/31/2011	10:41:27 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:41:27 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:41:27 AM	Tube furnace set to 150
10/31/2011	10:41:57 AM	H2 valve closed
10/31/2011	10:41:57 AM	BCl3 valve closed
10/31/2011	10:41:57 AM	PH3 valve closed
10/31/2011	10:41:57 AM	SiCl4 pre valve closed
10/31/2011	10:41:57 AM	SiCl4 post valve closed
10/31/2011	10:41:57 AM	Bypass valve closed
10/31/2011	10:41:57 AM	Bubbler valve closed
10/31/2011	10:41:57 AM	Helium valve opened
10/31/2011	10:41:57 AM	Main Vac valve opened
10/31/2011	10:41:57 AM	Helium MFC set to  20.000000
10/31/2011	10:41:57 AM	H2 MFC set to  0.000000
10/31/2011	10:41:57 AM	BCl3 MFC set to  0.000000
10/31/2011	10:41:57 AM	PHl3 MFC set to  0.000000
10/31/2011	10:41:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:41:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:41:57 AM	Tube furnace set to 150
10/31/2011	10:42:27 AM	Helium valve closed
10/31/2011	10:42:27 AM	H2 valve closed
10/31/2011	10:42:27 AM	BCl3 valve closed
10/31/2011	10:42:27 AM	PH3 valve closed
10/31/2011	10:42:27 AM	SiCl4 pre valve closed
10/31/2011	10:42:27 AM	SiCl4 post valve closed
10/31/2011	10:42:27 AM	Bypass valve closed
10/31/2011	10:42:27 AM	Bubbler valve closed
10/31/2011	10:42:27 AM	Main Vac valve opened
10/31/2011	10:42:27 AM	Helium MFC set to  0.000000
10/31/2011	10:42:27 AM	H2 MFC set to  0.000000
10/31/2011	10:42:27 AM	BCl3 MFC set to  0.000000
10/31/2011	10:42:27 AM	PHl3 MFC set to  0.000000
10/31/2011	10:42:27 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:42:27 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:42:27 AM	Tube furnace set to 150
10/31/2011	10:42:57 AM	H2 valve closed
10/31/2011	10:42:57 AM	BCl3 valve closed
10/31/2011	10:42:57 AM	PH3 valve closed
10/31/2011	10:42:57 AM	SiCl4 pre valve closed
10/31/2011	10:42:57 AM	SiCl4 post valve closed
10/31/2011	10:42:57 AM	Bypass valve closed
10/31/2011	10:42:57 AM	Bubbler valve closed
10/31/2011	10:42:57 AM	Helium valve opened
10/31/2011	10:42:57 AM	Main Vac valve opened
10/31/2011	10:42:57 AM	Helium MFC set to  20.000000
10/31/2011	10:42:57 AM	H2 MFC set to  0.000000
10/31/2011	10:42:57 AM	BCl3 MFC set to  0.000000
10/31/2011	10:42:57 AM	PHl3 MFC set to  0.000000
10/31/2011	10:42:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:42:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:42:57 AM	Tube furnace set to 150
10/31/2011	10:43:27 AM	Helium valve closed
10/31/2011	10:43:27 AM	H2 valve closed
10/31/2011	10:43:27 AM	BCl3 valve closed
10/31/2011	10:43:27 AM	PH3 valve closed
10/31/2011	10:43:27 AM	SiCl4 pre valve closed
10/31/2011	10:43:27 AM	SiCl4 post valve closed
10/31/2011	10:43:27 AM	Bypass valve closed
10/31/2011	10:43:27 AM	Bubbler valve closed
10/31/2011	10:43:27 AM	Main Vac valve opened
10/31/2011	10:43:27 AM	Helium MFC set to  0.000000
10/31/2011	10:43:27 AM	H2 MFC set to  0.000000
10/31/2011	10:43:27 AM	BCl3 MFC set to  0.000000
10/31/2011	10:43:27 AM	PHl3 MFC set to  0.000000
10/31/2011	10:43:27 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:43:27 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:43:28 AM	Tube furnace set to 150
10/31/2011	10:43:58 AM	H2 valve closed
10/31/2011	10:43:58 AM	BCl3 valve closed
10/31/2011	10:43:58 AM	PH3 valve closed
10/31/2011	10:43:58 AM	SiCl4 pre valve closed
10/31/2011	10:43:58 AM	SiCl4 post valve closed
10/31/2011	10:43:58 AM	Bypass valve closed
10/31/2011	10:43:58 AM	Bubbler valve closed
10/31/2011	10:43:58 AM	Helium valve opened
10/31/2011	10:43:58 AM	Main Vac valve opened
10/31/2011	10:43:58 AM	Helium MFC set to  20.000000
10/31/2011	10:43:58 AM	H2 MFC set to  0.000000
10/31/2011	10:43:58 AM	BCl3 MFC set to  0.000000
10/31/2011	10:43:58 AM	PHl3 MFC set to  0.000000
10/31/2011	10:43:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:43:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:43:58 AM	Tube furnace set to 150
10/31/2011	10:44:28 AM	Helium valve closed
10/31/2011	10:44:28 AM	H2 valve closed
10/31/2011	10:44:28 AM	BCl3 valve closed
10/31/2011	10:44:28 AM	PH3 valve closed
10/31/2011	10:44:28 AM	SiCl4 pre valve closed
10/31/2011	10:44:28 AM	SiCl4 post valve closed
10/31/2011	10:44:28 AM	Bypass valve closed
10/31/2011	10:44:28 AM	Bubbler valve closed
10/31/2011	10:44:28 AM	Main Vac valve opened
10/31/2011	10:44:28 AM	Helium MFC set to  0.000000
10/31/2011	10:44:28 AM	H2 MFC set to  0.000000
10/31/2011	10:44:28 AM	BCl3 MFC set to  0.000000
10/31/2011	10:44:28 AM	PHl3 MFC set to  0.000000
10/31/2011	10:44:28 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:44:28 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:44:28 AM	Tube furnace set to 150
10/31/2011	10:44:58 AM	H2 valve closed
10/31/2011	10:44:58 AM	BCl3 valve closed
10/31/2011	10:44:58 AM	PH3 valve closed
10/31/2011	10:44:58 AM	SiCl4 pre valve closed
10/31/2011	10:44:58 AM	SiCl4 post valve closed
10/31/2011	10:44:58 AM	Bypass valve closed
10/31/2011	10:44:58 AM	Bubbler valve closed
10/31/2011	10:44:58 AM	Helium valve opened
10/31/2011	10:44:58 AM	Main Vac valve opened
10/31/2011	10:44:58 AM	Helium MFC set to  20.000000
10/31/2011	10:44:58 AM	H2 MFC set to  0.000000
10/31/2011	10:44:58 AM	BCl3 MFC set to  0.000000
10/31/2011	10:44:58 AM	PHl3 MFC set to  0.000000
10/31/2011	10:44:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:44:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:44:58 AM	Tube furnace set to 150
10/31/2011	10:45:28 AM	Helium valve closed
10/31/2011	10:45:28 AM	H2 valve closed
10/31/2011	10:45:28 AM	BCl3 valve closed
10/31/2011	10:45:28 AM	PH3 valve closed
10/31/2011	10:45:28 AM	SiCl4 pre valve closed
10/31/2011	10:45:28 AM	SiCl4 post valve closed
10/31/2011	10:45:28 AM	Bypass valve closed
10/31/2011	10:45:28 AM	Bubbler valve closed
10/31/2011	10:45:28 AM	Main Vac valve opened
10/31/2011	10:45:28 AM	Helium MFC set to  0.000000
10/31/2011	10:45:28 AM	H2 MFC set to  0.000000
10/31/2011	10:45:28 AM	BCl3 MFC set to  0.000000
10/31/2011	10:45:28 AM	PHl3 MFC set to  0.000000
10/31/2011	10:45:28 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:45:28 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:45:28 AM	Tube furnace set to 150
10/31/2011	10:45:58 AM	H2 valve closed
10/31/2011	10:45:58 AM	BCl3 valve closed
10/31/2011	10:45:58 AM	PH3 valve closed
10/31/2011	10:45:58 AM	SiCl4 pre valve closed
10/31/2011	10:45:59 AM	SiCl4 post valve closed
10/31/2011	10:45:59 AM	Bypass valve closed
10/31/2011	10:45:59 AM	Bubbler valve closed
10/31/2011	10:45:59 AM	Helium valve opened
10/31/2011	10:45:59 AM	Main Vac valve opened
10/31/2011	10:45:59 AM	Helium MFC set to  20.000000
10/31/2011	10:45:59 AM	H2 MFC set to  0.000000
10/31/2011	10:45:59 AM	BCl3 MFC set to  0.000000
10/31/2011	10:45:59 AM	PHl3 MFC set to  0.000000
10/31/2011	10:45:59 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:45:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:45:59 AM	Tube furnace set to 150
10/31/2011	10:46:29 AM	Helium valve closed
10/31/2011	10:46:29 AM	H2 valve closed
10/31/2011	10:46:29 AM	BCl3 valve closed
10/31/2011	10:46:29 AM	PH3 valve closed
10/31/2011	10:46:29 AM	SiCl4 pre valve closed
10/31/2011	10:46:29 AM	SiCl4 post valve closed
10/31/2011	10:46:29 AM	Bypass valve closed
10/31/2011	10:46:29 AM	Bubbler valve closed
10/31/2011	10:46:29 AM	Main Vac valve opened
10/31/2011	10:46:29 AM	Helium MFC set to  0.000000
10/31/2011	10:46:29 AM	H2 MFC set to  0.000000
10/31/2011	10:46:29 AM	BCl3 MFC set to  0.000000
10/31/2011	10:46:29 AM	PHl3 MFC set to  0.000000
10/31/2011	10:46:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:46:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:46:29 AM	Tube furnace set to 150
10/31/2011	10:46:59 AM	H2 valve closed
10/31/2011	10:46:59 AM	BCl3 valve closed
10/31/2011	10:46:59 AM	PH3 valve closed
10/31/2011	10:46:59 AM	SiCl4 pre valve closed
10/31/2011	10:46:59 AM	SiCl4 post valve closed
10/31/2011	10:46:59 AM	Bypass valve closed
10/31/2011	10:46:59 AM	Bubbler valve closed
10/31/2011	10:46:59 AM	Helium valve opened
10/31/2011	10:46:59 AM	Main Vac valve opened
10/31/2011	10:46:59 AM	Helium MFC set to  20.000000
10/31/2011	10:46:59 AM	H2 MFC set to  0.000000
10/31/2011	10:46:59 AM	BCl3 MFC set to  0.000000
10/31/2011	10:46:59 AM	PHl3 MFC set to  0.000000
10/31/2011	10:46:59 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:46:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:46:59 AM	Tube furnace set to 150
10/31/2011	10:47:29 AM	Helium valve closed
10/31/2011	10:47:29 AM	H2 valve closed
10/31/2011	10:47:29 AM	BCl3 valve closed
10/31/2011	10:47:29 AM	PH3 valve closed
10/31/2011	10:47:29 AM	SiCl4 pre valve closed
10/31/2011	10:47:29 AM	SiCl4 post valve closed
10/31/2011	10:47:29 AM	Bypass valve closed
10/31/2011	10:47:29 AM	Bubbler valve closed
10/31/2011	10:47:29 AM	Main Vac valve opened
10/31/2011	10:47:29 AM	Helium MFC set to  0.000000
10/31/2011	10:47:29 AM	H2 MFC set to  0.000000
10/31/2011	10:47:29 AM	BCl3 MFC set to  0.000000
10/31/2011	10:47:29 AM	PHl3 MFC set to  0.000000
10/31/2011	10:47:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:47:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:47:29 AM	Tube furnace set to 150
10/31/2011	10:47:59 AM	H2 valve closed
10/31/2011	10:47:59 AM	BCl3 valve closed
10/31/2011	10:47:59 AM	PH3 valve closed
10/31/2011	10:47:59 AM	SiCl4 pre valve closed
10/31/2011	10:47:59 AM	SiCl4 post valve closed
10/31/2011	10:47:59 AM	Bypass valve closed
10/31/2011	10:47:59 AM	Bubbler valve closed
10/31/2011	10:47:59 AM	Helium valve opened
10/31/2011	10:47:59 AM	Main Vac valve opened
10/31/2011	10:47:59 AM	Helium MFC set to  20.000000
10/31/2011	10:47:59 AM	H2 MFC set to  0.000000
10/31/2011	10:47:59 AM	BCl3 MFC set to  0.000000
10/31/2011	10:47:59 AM	PHl3 MFC set to  0.000000
10/31/2011	10:47:59 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:47:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:48:00 AM	Tube furnace set to 150
10/31/2011	10:48:30 AM	Helium valve closed
10/31/2011	10:48:30 AM	H2 valve closed
10/31/2011	10:48:30 AM	BCl3 valve closed
10/31/2011	10:48:30 AM	PH3 valve closed
10/31/2011	10:48:30 AM	SiCl4 pre valve closed
10/31/2011	10:48:30 AM	SiCl4 post valve closed
10/31/2011	10:48:30 AM	Bypass valve closed
10/31/2011	10:48:30 AM	Bubbler valve closed
10/31/2011	10:48:30 AM	Main Vac valve opened
10/31/2011	10:48:30 AM	Helium MFC set to  0.000000
10/31/2011	10:48:30 AM	H2 MFC set to  0.000000
10/31/2011	10:48:30 AM	BCl3 MFC set to  0.000000
10/31/2011	10:48:30 AM	PHl3 MFC set to  0.000000
10/31/2011	10:48:30 AM	SiCl4 MFC set to  0.000000
10/31/2011	10:48:30 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	10:48:30 AM	Tube furnace set to 180
10/31/2011	10:48:35 AM	Run finished at 10:48 AM
10/31/2011	11:02:22 AM	Main Vac valve closed
10/31/2011	11:02:29 AM	Main Vac valve opened
10/31/2011	11:02:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	11:02:51 AM	Recipe started at 11:02 AM
10/31/2011	11:02:51 AM	Helium valve closed
10/31/2011	11:02:51 AM	H2 valve closed
10/31/2011	11:02:51 AM	BCl3 valve closed
10/31/2011	11:02:51 AM	PH3 valve closed
10/31/2011	11:02:51 AM	SiCl4 pre valve closed
10/31/2011	11:02:51 AM	SiCl4 post valve closed
10/31/2011	11:02:51 AM	Main Vac valve closed
10/31/2011	11:02:51 AM	Bypass valve closed
10/31/2011	11:02:51 AM	Bubbler valve closed
10/31/2011	11:02:51 AM	Helium MFC set to  0.000000
10/31/2011	11:02:51 AM	H2 MFC set to  0.000000
10/31/2011	11:02:51 AM	BCl3 MFC set to  0.000000
10/31/2011	11:02:51 AM	PHl3 MFC set to  0.000000
10/31/2011	11:02:51 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:02:51 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:02:51 AM	Tube furnace set to 0
10/31/2011	11:02:54 AM	H2 valve closed
10/31/2011	11:02:54 AM	BCl3 valve closed
10/31/2011	11:02:54 AM	PH3 valve closed
10/31/2011	11:02:54 AM	SiCl4 pre valve closed
10/31/2011	11:02:54 AM	SiCl4 post valve closed
10/31/2011	11:02:54 AM	Main Vac valve closed
10/31/2011	11:02:54 AM	Bypass valve closed
10/31/2011	11:02:54 AM	Bubbler valve closed
10/31/2011	11:02:54 AM	Helium valve opened
10/31/2011	11:02:54 AM	Helium MFC set to  500.000000
10/31/2011	11:02:54 AM	H2 MFC set to  0.000000
10/31/2011	11:02:54 AM	BCl3 MFC set to  0.000000
10/31/2011	11:02:54 AM	PHl3 MFC set to  0.000000
10/31/2011	11:02:54 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:02:54 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:02:55 AM	Tube furnace set to 0
10/31/2011	11:03:57 AM	Helium valve closed
10/31/2011	11:03:57 AM	H2 valve closed
10/31/2011	11:03:57 AM	BCl3 valve closed
10/31/2011	11:03:57 AM	PH3 valve closed
10/31/2011	11:03:57 AM	SiCl4 pre valve closed
10/31/2011	11:03:57 AM	SiCl4 post valve closed
10/31/2011	11:03:57 AM	Main Vac valve closed
10/31/2011	11:03:57 AM	Bypass valve closed
10/31/2011	11:03:57 AM	Bubbler valve closed
10/31/2011	11:03:57 AM	Helium MFC set to  0.000000
10/31/2011	11:03:57 AM	H2 MFC set to  0.000000
10/31/2011	11:03:57 AM	BCl3 MFC set to  0.000000
10/31/2011	11:03:57 AM	PHl3 MFC set to  0.000000
10/31/2011	11:03:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:03:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:03:58 AM	Tube furnace set to 0
10/31/2011	11:03:59 AM	Run finished at 11:03 AM
10/31/2011	11:03:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	11:15:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	11:15:28 AM	Recipe started at 11:15 AM
10/31/2011	11:15:28 AM	Helium valve closed
10/31/2011	11:15:29 AM	H2 valve closed
10/31/2011	11:15:29 AM	BCl3 valve closed
10/31/2011	11:15:29 AM	PH3 valve closed
10/31/2011	11:15:29 AM	SiCl4 pre valve closed
10/31/2011	11:15:29 AM	SiCl4 post valve closed
10/31/2011	11:15:29 AM	Main Vac valve closed
10/31/2011	11:15:29 AM	Bubbler valve closed
10/31/2011	11:15:29 AM	Bypass valve opened
10/31/2011	11:15:29 AM	Helium MFC set to  0.000000
10/31/2011	11:15:29 AM	H2 MFC set to  0.000000
10/31/2011	11:15:29 AM	BCl3 MFC set to  0.000000
10/31/2011	11:15:29 AM	PHl3 MFC set to  0.000000
10/31/2011	11:15:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:15:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:15:29 AM	Tube furnace set to 0
10/31/2011	11:16:34 AM	Helium valve closed
10/31/2011	11:16:34 AM	H2 valve closed
10/31/2011	11:16:34 AM	BCl3 valve closed
10/31/2011	11:16:34 AM	PH3 valve closed
10/31/2011	11:16:34 AM	SiCl4 pre valve closed
10/31/2011	11:16:34 AM	SiCl4 post valve closed
10/31/2011	11:16:34 AM	Main Vac valve closed
10/31/2011	11:16:34 AM	Bubbler valve closed
10/31/2011	11:16:34 AM	Bypass valve opened
10/31/2011	11:16:34 AM	Helium MFC set to  0.000000
10/31/2011	11:16:34 AM	H2 MFC set to  0.000000
10/31/2011	11:16:34 AM	BCl3 MFC set to  0.000000
10/31/2011	11:16:34 AM	PHl3 MFC set to  0.000000
10/31/2011	11:16:34 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:16:34 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:16:35 AM	Tube furnace set to 0
10/31/2011	11:17:35 AM	Helium valve closed
10/31/2011	11:17:35 AM	H2 valve closed
10/31/2011	11:17:35 AM	BCl3 valve closed
10/31/2011	11:17:35 AM	PH3 valve closed
10/31/2011	11:17:35 AM	SiCl4 pre valve closed
10/31/2011	11:17:35 AM	SiCl4 post valve closed
10/31/2011	11:17:35 AM	Bypass valve closed
10/31/2011	11:17:35 AM	Bubbler valve closed
10/31/2011	11:17:35 AM	Main Vac valve opened
10/31/2011	11:17:35 AM	Helium MFC set to  0.000000
10/31/2011	11:17:35 AM	H2 MFC set to  0.000000
10/31/2011	11:17:35 AM	BCl3 MFC set to  0.000000
10/31/2011	11:17:35 AM	PHl3 MFC set to  0.000000
10/31/2011	11:17:35 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:17:35 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:17:35 AM	Tube furnace set to 0
10/31/2011	11:17:36 AM	Run finished at 11:17 AM
10/31/2011	11:17:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	11:17:54 AM	Recipe started at 11:17 AM
10/31/2011	11:17:54 AM	Helium valve closed
10/31/2011	11:17:54 AM	H2 valve closed
10/31/2011	11:17:54 AM	BCl3 valve closed
10/31/2011	11:17:54 AM	PH3 valve closed
10/31/2011	11:17:54 AM	SiCl4 pre valve closed
10/31/2011	11:17:54 AM	SiCl4 post valve closed
10/31/2011	11:17:54 AM	Main Vac valve closed
10/31/2011	11:17:54 AM	Bubbler valve closed
10/31/2011	11:17:54 AM	Bypass valve opened
10/31/2011	11:17:54 AM	Helium MFC set to  0.000000
10/31/2011	11:17:54 AM	H2 MFC set to  0.000000
10/31/2011	11:17:54 AM	BCl3 MFC set to  0.000000
10/31/2011	11:17:54 AM	PHl3 MFC set to  0.000000
10/31/2011	11:17:54 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:17:54 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:17:55 AM	Tube furnace set to 150
10/31/2011	11:17:55 AM	Helium valve closed
10/31/2011	11:17:55 AM	H2 valve closed
10/31/2011	11:17:55 AM	BCl3 valve closed
10/31/2011	11:17:55 AM	PH3 valve closed
10/31/2011	11:17:55 AM	SiCl4 pre valve closed
10/31/2011	11:17:55 AM	SiCl4 post valve closed
10/31/2011	11:17:55 AM	Main Vac valve closed
10/31/2011	11:17:55 AM	Bubbler valve closed
10/31/2011	11:17:55 AM	Bypass valve opened
10/31/2011	11:17:55 AM	Helium MFC set to  0.000000
10/31/2011	11:17:55 AM	H2 MFC set to  0.000000
10/31/2011	11:17:55 AM	BCl3 MFC set to  0.000000
10/31/2011	11:17:55 AM	PHl3 MFC set to  0.000000
10/31/2011	11:17:55 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:17:55 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:17:55 AM	Tube furnace set to 150
10/31/2011	11:17:57 AM	Helium valve closed
10/31/2011	11:17:57 AM	H2 valve closed
10/31/2011	11:17:57 AM	BCl3 valve closed
10/31/2011	11:17:57 AM	PH3 valve closed
10/31/2011	11:17:57 AM	SiCl4 pre valve closed
10/31/2011	11:17:57 AM	SiCl4 post valve closed
10/31/2011	11:17:57 AM	Bypass valve closed
10/31/2011	11:17:57 AM	Bubbler valve closed
10/31/2011	11:17:57 AM	Main Vac valve opened
10/31/2011	11:17:57 AM	Helium MFC set to  0.000000
10/31/2011	11:17:57 AM	H2 MFC set to  0.000000
10/31/2011	11:17:57 AM	BCl3 MFC set to  0.000000
10/31/2011	11:17:57 AM	PHl3 MFC set to  0.000000
10/31/2011	11:17:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:17:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:17:57 AM	Tube furnace set to 150
10/31/2011	11:18:27 AM	H2 valve closed
10/31/2011	11:18:27 AM	BCl3 valve closed
10/31/2011	11:18:27 AM	PH3 valve closed
10/31/2011	11:18:27 AM	SiCl4 pre valve closed
10/31/2011	11:18:27 AM	SiCl4 post valve closed
10/31/2011	11:18:27 AM	Bypass valve closed
10/31/2011	11:18:27 AM	Bubbler valve closed
10/31/2011	11:18:27 AM	Helium valve opened
10/31/2011	11:18:27 AM	Main Vac valve opened
10/31/2011	11:18:27 AM	Helium MFC set to  20.000000
10/31/2011	11:18:27 AM	H2 MFC set to  0.000000
10/31/2011	11:18:27 AM	BCl3 MFC set to  0.000000
10/31/2011	11:18:27 AM	PHl3 MFC set to  0.000000
10/31/2011	11:18:27 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:18:27 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:18:27 AM	Tube furnace set to 150
10/31/2011	11:18:57 AM	Helium valve closed
10/31/2011	11:18:57 AM	H2 valve closed
10/31/2011	11:18:57 AM	BCl3 valve closed
10/31/2011	11:18:57 AM	PH3 valve closed
10/31/2011	11:18:57 AM	SiCl4 pre valve closed
10/31/2011	11:18:57 AM	SiCl4 post valve closed
10/31/2011	11:18:57 AM	Bypass valve closed
10/31/2011	11:18:57 AM	Bubbler valve closed
10/31/2011	11:18:57 AM	Main Vac valve opened
10/31/2011	11:18:57 AM	Helium MFC set to  0.000000
10/31/2011	11:18:57 AM	H2 MFC set to  0.000000
10/31/2011	11:18:57 AM	BCl3 MFC set to  0.000000
10/31/2011	11:18:57 AM	PHl3 MFC set to  0.000000
10/31/2011	11:18:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:18:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:18:57 AM	Tube furnace set to 150
10/31/2011	11:19:27 AM	H2 valve closed
10/31/2011	11:19:27 AM	BCl3 valve closed
10/31/2011	11:19:27 AM	PH3 valve closed
10/31/2011	11:19:27 AM	SiCl4 pre valve closed
10/31/2011	11:19:27 AM	SiCl4 post valve closed
10/31/2011	11:19:27 AM	Bypass valve closed
10/31/2011	11:19:27 AM	Bubbler valve closed
10/31/2011	11:19:27 AM	Helium valve opened
10/31/2011	11:19:27 AM	Main Vac valve opened
10/31/2011	11:19:27 AM	Helium MFC set to  20.000000
10/31/2011	11:19:27 AM	H2 MFC set to  0.000000
10/31/2011	11:19:27 AM	BCl3 MFC set to  0.000000
10/31/2011	11:19:27 AM	PHl3 MFC set to  0.000000
10/31/2011	11:19:27 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:19:27 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:19:28 AM	Tube furnace set to 150
10/31/2011	11:19:58 AM	Helium valve closed
10/31/2011	11:19:58 AM	H2 valve closed
10/31/2011	11:19:58 AM	BCl3 valve closed
10/31/2011	11:19:58 AM	PH3 valve closed
10/31/2011	11:19:58 AM	SiCl4 pre valve closed
10/31/2011	11:19:58 AM	SiCl4 post valve closed
10/31/2011	11:19:58 AM	Bypass valve closed
10/31/2011	11:19:58 AM	Bubbler valve closed
10/31/2011	11:19:58 AM	Main Vac valve opened
10/31/2011	11:19:58 AM	Helium MFC set to  0.000000
10/31/2011	11:19:58 AM	H2 MFC set to  0.000000
10/31/2011	11:19:58 AM	BCl3 MFC set to  0.000000
10/31/2011	11:19:58 AM	PHl3 MFC set to  0.000000
10/31/2011	11:19:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:19:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:19:58 AM	Tube furnace set to 150
10/31/2011	11:20:28 AM	H2 valve closed
10/31/2011	11:20:28 AM	BCl3 valve closed
10/31/2011	11:20:28 AM	PH3 valve closed
10/31/2011	11:20:28 AM	SiCl4 pre valve closed
10/31/2011	11:20:28 AM	SiCl4 post valve closed
10/31/2011	11:20:28 AM	Bypass valve closed
10/31/2011	11:20:28 AM	Bubbler valve closed
10/31/2011	11:20:28 AM	Helium valve opened
10/31/2011	11:20:28 AM	Main Vac valve opened
10/31/2011	11:20:28 AM	Helium MFC set to  20.000000
10/31/2011	11:20:28 AM	H2 MFC set to  0.000000
10/31/2011	11:20:28 AM	BCl3 MFC set to  0.000000
10/31/2011	11:20:28 AM	PHl3 MFC set to  0.000000
10/31/2011	11:20:28 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:20:28 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:20:28 AM	Tube furnace set to 150
10/31/2011	11:20:58 AM	Helium valve closed
10/31/2011	11:20:58 AM	H2 valve closed
10/31/2011	11:20:58 AM	BCl3 valve closed
10/31/2011	11:20:58 AM	PH3 valve closed
10/31/2011	11:20:58 AM	SiCl4 pre valve closed
10/31/2011	11:20:58 AM	SiCl4 post valve closed
10/31/2011	11:20:58 AM	Bypass valve closed
10/31/2011	11:20:58 AM	Bubbler valve closed
10/31/2011	11:20:58 AM	Main Vac valve opened
10/31/2011	11:20:58 AM	Helium MFC set to  0.000000
10/31/2011	11:20:58 AM	H2 MFC set to  0.000000
10/31/2011	11:20:58 AM	BCl3 MFC set to  0.000000
10/31/2011	11:20:58 AM	PHl3 MFC set to  0.000000
10/31/2011	11:20:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:20:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:20:58 AM	Tube furnace set to 150
10/31/2011	11:21:28 AM	H2 valve closed
10/31/2011	11:21:28 AM	BCl3 valve closed
10/31/2011	11:21:28 AM	PH3 valve closed
10/31/2011	11:21:28 AM	SiCl4 pre valve closed
10/31/2011	11:21:28 AM	SiCl4 post valve closed
10/31/2011	11:21:28 AM	Bypass valve closed
10/31/2011	11:21:28 AM	Bubbler valve closed
10/31/2011	11:21:28 AM	Helium valve opened
10/31/2011	11:21:28 AM	Main Vac valve opened
10/31/2011	11:21:28 AM	Helium MFC set to  20.000000
10/31/2011	11:21:28 AM	H2 MFC set to  0.000000
10/31/2011	11:21:28 AM	BCl3 MFC set to  0.000000
10/31/2011	11:21:28 AM	PHl3 MFC set to  0.000000
10/31/2011	11:21:28 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:21:28 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:21:28 AM	Tube furnace set to 150
10/31/2011	11:21:58 AM	Helium valve closed
10/31/2011	11:21:58 AM	H2 valve closed
10/31/2011	11:21:58 AM	BCl3 valve closed
10/31/2011	11:21:58 AM	PH3 valve closed
10/31/2011	11:21:58 AM	SiCl4 pre valve closed
10/31/2011	11:21:58 AM	SiCl4 post valve closed
10/31/2011	11:21:58 AM	Bypass valve closed
10/31/2011	11:21:58 AM	Bubbler valve closed
10/31/2011	11:21:58 AM	Main Vac valve opened
10/31/2011	11:21:58 AM	Helium MFC set to  0.000000
10/31/2011	11:21:58 AM	H2 MFC set to  0.000000
10/31/2011	11:21:58 AM	BCl3 MFC set to  0.000000
10/31/2011	11:21:58 AM	PHl3 MFC set to  0.000000
10/31/2011	11:21:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:21:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:21:59 AM	Tube furnace set to 150
10/31/2011	11:22:29 AM	H2 valve closed
10/31/2011	11:22:29 AM	BCl3 valve closed
10/31/2011	11:22:29 AM	PH3 valve closed
10/31/2011	11:22:29 AM	SiCl4 pre valve closed
10/31/2011	11:22:29 AM	SiCl4 post valve closed
10/31/2011	11:22:29 AM	Bypass valve closed
10/31/2011	11:22:29 AM	Bubbler valve closed
10/31/2011	11:22:29 AM	Helium valve opened
10/31/2011	11:22:29 AM	Main Vac valve opened
10/31/2011	11:22:29 AM	Helium MFC set to  20.000000
10/31/2011	11:22:29 AM	H2 MFC set to  0.000000
10/31/2011	11:22:29 AM	BCl3 MFC set to  0.000000
10/31/2011	11:22:29 AM	PHl3 MFC set to  0.000000
10/31/2011	11:22:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:22:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:22:29 AM	Tube furnace set to 150
10/31/2011	11:22:59 AM	Helium valve closed
10/31/2011	11:22:59 AM	H2 valve closed
10/31/2011	11:22:59 AM	BCl3 valve closed
10/31/2011	11:22:59 AM	PH3 valve closed
10/31/2011	11:22:59 AM	SiCl4 pre valve closed
10/31/2011	11:22:59 AM	SiCl4 post valve closed
10/31/2011	11:22:59 AM	Bypass valve closed
10/31/2011	11:22:59 AM	Bubbler valve closed
10/31/2011	11:22:59 AM	Main Vac valve opened
10/31/2011	11:22:59 AM	Helium MFC set to  0.000000
10/31/2011	11:22:59 AM	H2 MFC set to  0.000000
10/31/2011	11:22:59 AM	BCl3 MFC set to  0.000000
10/31/2011	11:22:59 AM	PHl3 MFC set to  0.000000
10/31/2011	11:22:59 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:22:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:22:59 AM	Tube furnace set to 150
10/31/2011	11:23:29 AM	H2 valve closed
10/31/2011	11:23:29 AM	BCl3 valve closed
10/31/2011	11:23:29 AM	PH3 valve closed
10/31/2011	11:23:29 AM	SiCl4 pre valve closed
10/31/2011	11:23:29 AM	SiCl4 post valve closed
10/31/2011	11:23:29 AM	Bypass valve closed
10/31/2011	11:23:29 AM	Bubbler valve closed
10/31/2011	11:23:29 AM	Helium valve opened
10/31/2011	11:23:29 AM	Main Vac valve opened
10/31/2011	11:23:29 AM	Helium MFC set to  20.000000
10/31/2011	11:23:29 AM	H2 MFC set to  0.000000
10/31/2011	11:23:29 AM	BCl3 MFC set to  0.000000
10/31/2011	11:23:29 AM	PHl3 MFC set to  0.000000
10/31/2011	11:23:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:23:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:23:29 AM	Tube furnace set to 150
10/31/2011	11:23:59 AM	Helium valve closed
10/31/2011	11:23:59 AM	H2 valve closed
10/31/2011	11:23:59 AM	BCl3 valve closed
10/31/2011	11:23:59 AM	PH3 valve closed
10/31/2011	11:23:59 AM	SiCl4 pre valve closed
10/31/2011	11:23:59 AM	SiCl4 post valve closed
10/31/2011	11:23:59 AM	Bypass valve closed
10/31/2011	11:23:59 AM	Bubbler valve closed
10/31/2011	11:23:59 AM	Main Vac valve opened
10/31/2011	11:23:59 AM	Helium MFC set to  0.000000
10/31/2011	11:23:59 AM	H2 MFC set to  0.000000
10/31/2011	11:23:59 AM	BCl3 MFC set to  0.000000
10/31/2011	11:23:59 AM	PHl3 MFC set to  0.000000
10/31/2011	11:23:59 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:23:59 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:23:59 AM	Tube furnace set to 150
10/31/2011	11:24:29 AM	H2 valve closed
10/31/2011	11:24:29 AM	BCl3 valve closed
10/31/2011	11:24:29 AM	PH3 valve closed
10/31/2011	11:24:29 AM	SiCl4 pre valve closed
10/31/2011	11:24:29 AM	SiCl4 post valve closed
10/31/2011	11:24:29 AM	Bypass valve closed
10/31/2011	11:24:29 AM	Bubbler valve closed
10/31/2011	11:24:29 AM	Helium valve opened
10/31/2011	11:24:29 AM	Main Vac valve opened
10/31/2011	11:24:29 AM	Helium MFC set to  20.000000
10/31/2011	11:24:29 AM	H2 MFC set to  0.000000
10/31/2011	11:24:29 AM	BCl3 MFC set to  0.000000
10/31/2011	11:24:29 AM	PHl3 MFC set to  0.000000
10/31/2011	11:24:29 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:24:29 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:24:30 AM	Tube furnace set to 150
10/31/2011	11:25:00 AM	Helium valve closed
10/31/2011	11:25:00 AM	H2 valve closed
10/31/2011	11:25:00 AM	BCl3 valve closed
10/31/2011	11:25:00 AM	PH3 valve closed
10/31/2011	11:25:00 AM	SiCl4 pre valve closed
10/31/2011	11:25:00 AM	SiCl4 post valve closed
10/31/2011	11:25:00 AM	Bypass valve closed
10/31/2011	11:25:00 AM	Bubbler valve closed
10/31/2011	11:25:00 AM	Main Vac valve opened
10/31/2011	11:25:00 AM	Helium MFC set to  0.000000
10/31/2011	11:25:00 AM	H2 MFC set to  0.000000
10/31/2011	11:25:00 AM	BCl3 MFC set to  0.000000
10/31/2011	11:25:00 AM	PHl3 MFC set to  0.000000
10/31/2011	11:25:00 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:25:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:25:00 AM	Tube furnace set to 150
10/31/2011	11:25:30 AM	H2 valve closed
10/31/2011	11:25:30 AM	BCl3 valve closed
10/31/2011	11:25:30 AM	PH3 valve closed
10/31/2011	11:25:30 AM	SiCl4 pre valve closed
10/31/2011	11:25:30 AM	SiCl4 post valve closed
10/31/2011	11:25:30 AM	Bypass valve closed
10/31/2011	11:25:30 AM	Bubbler valve closed
10/31/2011	11:25:30 AM	Helium valve opened
10/31/2011	11:25:30 AM	Main Vac valve opened
10/31/2011	11:25:30 AM	Helium MFC set to  20.000000
10/31/2011	11:25:30 AM	H2 MFC set to  0.000000
10/31/2011	11:25:30 AM	BCl3 MFC set to  0.000000
10/31/2011	11:25:30 AM	PHl3 MFC set to  0.000000
10/31/2011	11:25:30 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:25:30 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:25:30 AM	Tube furnace set to 150
10/31/2011	11:26:00 AM	Helium valve closed
10/31/2011	11:26:00 AM	H2 valve closed
10/31/2011	11:26:00 AM	BCl3 valve closed
10/31/2011	11:26:00 AM	PH3 valve closed
10/31/2011	11:26:00 AM	SiCl4 pre valve closed
10/31/2011	11:26:00 AM	SiCl4 post valve closed
10/31/2011	11:26:00 AM	Bypass valve closed
10/31/2011	11:26:00 AM	Bubbler valve closed
10/31/2011	11:26:00 AM	Main Vac valve opened
10/31/2011	11:26:00 AM	Helium MFC set to  0.000000
10/31/2011	11:26:00 AM	H2 MFC set to  0.000000
10/31/2011	11:26:00 AM	BCl3 MFC set to  0.000000
10/31/2011	11:26:00 AM	PHl3 MFC set to  0.000000
10/31/2011	11:26:00 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:26:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:26:00 AM	Tube furnace set to 150
10/31/2011	11:26:30 AM	H2 valve closed
10/31/2011	11:26:30 AM	BCl3 valve closed
10/31/2011	11:26:30 AM	PH3 valve closed
10/31/2011	11:26:30 AM	SiCl4 pre valve closed
10/31/2011	11:26:30 AM	SiCl4 post valve closed
10/31/2011	11:26:30 AM	Bypass valve closed
10/31/2011	11:26:30 AM	Bubbler valve closed
10/31/2011	11:26:30 AM	Helium valve opened
10/31/2011	11:26:30 AM	Main Vac valve opened
10/31/2011	11:26:30 AM	Helium MFC set to  20.000000
10/31/2011	11:26:30 AM	H2 MFC set to  0.000000
10/31/2011	11:26:30 AM	BCl3 MFC set to  0.000000
10/31/2011	11:26:30 AM	PHl3 MFC set to  0.000000
10/31/2011	11:26:30 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:26:30 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:26:30 AM	Tube furnace set to 150
10/31/2011	11:27:00 AM	Helium valve closed
10/31/2011	11:27:00 AM	H2 valve closed
10/31/2011	11:27:00 AM	BCl3 valve closed
10/31/2011	11:27:00 AM	PH3 valve closed
10/31/2011	11:27:00 AM	SiCl4 pre valve closed
10/31/2011	11:27:00 AM	SiCl4 post valve closed
10/31/2011	11:27:00 AM	Bypass valve closed
10/31/2011	11:27:00 AM	Bubbler valve closed
10/31/2011	11:27:00 AM	Main Vac valve opened
10/31/2011	11:27:00 AM	Helium MFC set to  0.000000
10/31/2011	11:27:00 AM	H2 MFC set to  0.000000
10/31/2011	11:27:00 AM	BCl3 MFC set to  0.000000
10/31/2011	11:27:00 AM	PHl3 MFC set to  0.000000
10/31/2011	11:27:00 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:27:00 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:27:01 AM	Tube furnace set to 150
10/31/2011	11:27:31 AM	H2 valve closed
10/31/2011	11:27:31 AM	BCl3 valve closed
10/31/2011	11:27:31 AM	PH3 valve closed
10/31/2011	11:27:31 AM	SiCl4 pre valve closed
10/31/2011	11:27:31 AM	SiCl4 post valve closed
10/31/2011	11:27:31 AM	Bypass valve closed
10/31/2011	11:27:31 AM	Bubbler valve closed
10/31/2011	11:27:31 AM	Helium valve opened
10/31/2011	11:27:31 AM	Main Vac valve opened
10/31/2011	11:27:31 AM	Helium MFC set to  20.000000
10/31/2011	11:27:31 AM	H2 MFC set to  0.000000
10/31/2011	11:27:31 AM	BCl3 MFC set to  0.000000
10/31/2011	11:27:31 AM	PHl3 MFC set to  0.000000
10/31/2011	11:27:31 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:27:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:27:31 AM	Tube furnace set to 150
10/31/2011	11:28:01 AM	Helium valve closed
10/31/2011	11:28:01 AM	H2 valve closed
10/31/2011	11:28:01 AM	BCl3 valve closed
10/31/2011	11:28:01 AM	PH3 valve closed
10/31/2011	11:28:01 AM	SiCl4 pre valve closed
10/31/2011	11:28:01 AM	SiCl4 post valve closed
10/31/2011	11:28:01 AM	Bypass valve closed
10/31/2011	11:28:01 AM	Bubbler valve closed
10/31/2011	11:28:01 AM	Main Vac valve opened
10/31/2011	11:28:01 AM	Helium MFC set to  0.000000
10/31/2011	11:28:01 AM	H2 MFC set to  0.000000
10/31/2011	11:28:01 AM	BCl3 MFC set to  0.000000
10/31/2011	11:28:01 AM	PHl3 MFC set to  0.000000
10/31/2011	11:28:01 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:28:01 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:28:01 AM	Tube furnace set to 150
10/31/2011	11:28:31 AM	H2 valve closed
10/31/2011	11:28:31 AM	BCl3 valve closed
10/31/2011	11:28:31 AM	PH3 valve closed
10/31/2011	11:28:31 AM	SiCl4 pre valve closed
10/31/2011	11:28:31 AM	SiCl4 post valve closed
10/31/2011	11:28:31 AM	Bypass valve closed
10/31/2011	11:28:31 AM	Bubbler valve closed
10/31/2011	11:28:31 AM	Helium valve opened
10/31/2011	11:28:31 AM	Main Vac valve opened
10/31/2011	11:28:31 AM	Helium MFC set to  20.000000
10/31/2011	11:28:31 AM	H2 MFC set to  0.000000
10/31/2011	11:28:31 AM	BCl3 MFC set to  0.000000
10/31/2011	11:28:31 AM	PHl3 MFC set to  0.000000
10/31/2011	11:28:31 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:28:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:28:31 AM	Tube furnace set to 150
10/31/2011	11:29:01 AM	Helium valve closed
10/31/2011	11:29:01 AM	H2 valve closed
10/31/2011	11:29:01 AM	BCl3 valve closed
10/31/2011	11:29:01 AM	PH3 valve closed
10/31/2011	11:29:01 AM	SiCl4 pre valve closed
10/31/2011	11:29:01 AM	SiCl4 post valve closed
10/31/2011	11:29:01 AM	Bypass valve closed
10/31/2011	11:29:01 AM	Bubbler valve closed
10/31/2011	11:29:01 AM	Main Vac valve opened
10/31/2011	11:29:01 AM	Helium MFC set to  0.000000
10/31/2011	11:29:01 AM	H2 MFC set to  0.000000
10/31/2011	11:29:01 AM	BCl3 MFC set to  0.000000
10/31/2011	11:29:01 AM	PHl3 MFC set to  0.000000
10/31/2011	11:29:01 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:29:01 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:29:01 AM	Tube furnace set to 150
10/31/2011	11:29:31 AM	H2 valve closed
10/31/2011	11:29:31 AM	BCl3 valve closed
10/31/2011	11:29:31 AM	PH3 valve closed
10/31/2011	11:29:31 AM	SiCl4 pre valve closed
10/31/2011	11:29:31 AM	SiCl4 post valve closed
10/31/2011	11:29:31 AM	Bypass valve closed
10/31/2011	11:29:31 AM	Bubbler valve closed
10/31/2011	11:29:31 AM	Helium valve opened
10/31/2011	11:29:31 AM	Main Vac valve opened
10/31/2011	11:29:31 AM	Helium MFC set to  20.000000
10/31/2011	11:29:31 AM	H2 MFC set to  0.000000
10/31/2011	11:29:31 AM	BCl3 MFC set to  0.000000
10/31/2011	11:29:31 AM	PHl3 MFC set to  0.000000
10/31/2011	11:29:31 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:29:31 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:29:32 AM	Tube furnace set to 150
10/31/2011	11:30:02 AM	Helium valve closed
10/31/2011	11:30:02 AM	H2 valve closed
10/31/2011	11:30:02 AM	BCl3 valve closed
10/31/2011	11:30:02 AM	PH3 valve closed
10/31/2011	11:30:02 AM	SiCl4 pre valve closed
10/31/2011	11:30:02 AM	SiCl4 post valve closed
10/31/2011	11:30:02 AM	Bypass valve closed
10/31/2011	11:30:02 AM	Bubbler valve closed
10/31/2011	11:30:02 AM	Main Vac valve opened
10/31/2011	11:30:02 AM	Helium MFC set to  0.000000
10/31/2011	11:30:02 AM	H2 MFC set to  0.000000
10/31/2011	11:30:02 AM	BCl3 MFC set to  0.000000
10/31/2011	11:30:02 AM	PHl3 MFC set to  0.000000
10/31/2011	11:30:02 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:30:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:30:02 AM	Tube furnace set to 150
10/31/2011	11:30:32 AM	H2 valve closed
10/31/2011	11:30:32 AM	BCl3 valve closed
10/31/2011	11:30:32 AM	PH3 valve closed
10/31/2011	11:30:32 AM	SiCl4 pre valve closed
10/31/2011	11:30:32 AM	SiCl4 post valve closed
10/31/2011	11:30:32 AM	Bypass valve closed
10/31/2011	11:30:32 AM	Bubbler valve closed
10/31/2011	11:30:32 AM	Helium valve opened
10/31/2011	11:30:32 AM	Main Vac valve opened
10/31/2011	11:30:32 AM	Helium MFC set to  20.000000
10/31/2011	11:30:32 AM	H2 MFC set to  0.000000
10/31/2011	11:30:32 AM	BCl3 MFC set to  0.000000
10/31/2011	11:30:32 AM	PHl3 MFC set to  0.000000
10/31/2011	11:30:32 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:30:32 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:30:32 AM	Tube furnace set to 150
10/31/2011	11:31:02 AM	Helium valve closed
10/31/2011	11:31:02 AM	H2 valve closed
10/31/2011	11:31:02 AM	BCl3 valve closed
10/31/2011	11:31:02 AM	PH3 valve closed
10/31/2011	11:31:02 AM	SiCl4 pre valve closed
10/31/2011	11:31:02 AM	SiCl4 post valve closed
10/31/2011	11:31:02 AM	Bypass valve closed
10/31/2011	11:31:02 AM	Bubbler valve closed
10/31/2011	11:31:02 AM	Main Vac valve opened
10/31/2011	11:31:02 AM	Helium MFC set to  0.000000
10/31/2011	11:31:02 AM	H2 MFC set to  0.000000
10/31/2011	11:31:02 AM	BCl3 MFC set to  0.000000
10/31/2011	11:31:02 AM	PHl3 MFC set to  0.000000
10/31/2011	11:31:02 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:31:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:31:02 AM	Tube furnace set to 150
10/31/2011	11:31:32 AM	H2 valve closed
10/31/2011	11:31:32 AM	BCl3 valve closed
10/31/2011	11:31:32 AM	PH3 valve closed
10/31/2011	11:31:32 AM	SiCl4 pre valve closed
10/31/2011	11:31:32 AM	SiCl4 post valve closed
10/31/2011	11:31:32 AM	Bypass valve closed
10/31/2011	11:31:32 AM	Bubbler valve closed
10/31/2011	11:31:32 AM	Helium valve opened
10/31/2011	11:31:32 AM	Main Vac valve opened
10/31/2011	11:31:32 AM	Helium MFC set to  20.000000
10/31/2011	11:31:32 AM	H2 MFC set to  0.000000
10/31/2011	11:31:32 AM	BCl3 MFC set to  0.000000
10/31/2011	11:31:32 AM	PHl3 MFC set to  0.000000
10/31/2011	11:31:32 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:31:32 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:31:32 AM	Tube furnace set to 150
10/31/2011	11:32:02 AM	Helium valve closed
10/31/2011	11:32:02 AM	H2 valve closed
10/31/2011	11:32:02 AM	BCl3 valve closed
10/31/2011	11:32:02 AM	PH3 valve closed
10/31/2011	11:32:02 AM	SiCl4 pre valve closed
10/31/2011	11:32:02 AM	SiCl4 post valve closed
10/31/2011	11:32:02 AM	Bypass valve closed
10/31/2011	11:32:02 AM	Bubbler valve closed
10/31/2011	11:32:02 AM	Main Vac valve opened
10/31/2011	11:32:02 AM	Helium MFC set to  0.000000
10/31/2011	11:32:02 AM	H2 MFC set to  0.000000
10/31/2011	11:32:02 AM	BCl3 MFC set to  0.000000
10/31/2011	11:32:02 AM	PHl3 MFC set to  0.000000
10/31/2011	11:32:02 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:32:02 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:32:03 AM	Tube furnace set to 150
10/31/2011	11:32:33 AM	H2 valve closed
10/31/2011	11:32:33 AM	BCl3 valve closed
10/31/2011	11:32:33 AM	PH3 valve closed
10/31/2011	11:32:33 AM	SiCl4 pre valve closed
10/31/2011	11:32:33 AM	SiCl4 post valve closed
10/31/2011	11:32:33 AM	Bypass valve closed
10/31/2011	11:32:33 AM	Bubbler valve closed
10/31/2011	11:32:33 AM	Helium valve opened
10/31/2011	11:32:33 AM	Main Vac valve opened
10/31/2011	11:32:33 AM	Helium MFC set to  20.000000
10/31/2011	11:32:33 AM	H2 MFC set to  0.000000
10/31/2011	11:32:33 AM	BCl3 MFC set to  0.000000
10/31/2011	11:32:33 AM	PHl3 MFC set to  0.000000
10/31/2011	11:32:33 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:32:33 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:32:33 AM	Tube furnace set to 150
10/31/2011	11:33:03 AM	Helium valve closed
10/31/2011	11:33:03 AM	H2 valve closed
10/31/2011	11:33:03 AM	BCl3 valve closed
10/31/2011	11:33:03 AM	PH3 valve closed
10/31/2011	11:33:03 AM	SiCl4 pre valve closed
10/31/2011	11:33:03 AM	SiCl4 post valve closed
10/31/2011	11:33:03 AM	Bypass valve closed
10/31/2011	11:33:03 AM	Bubbler valve closed
10/31/2011	11:33:03 AM	Main Vac valve opened
10/31/2011	11:33:03 AM	Helium MFC set to  0.000000
10/31/2011	11:33:03 AM	H2 MFC set to  0.000000
10/31/2011	11:33:03 AM	BCl3 MFC set to  0.000000
10/31/2011	11:33:03 AM	PHl3 MFC set to  0.000000
10/31/2011	11:33:03 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:33:03 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:33:03 AM	Tube furnace set to 150
10/31/2011	11:33:33 AM	H2 valve closed
10/31/2011	11:33:33 AM	BCl3 valve closed
10/31/2011	11:33:33 AM	PH3 valve closed
10/31/2011	11:33:33 AM	SiCl4 pre valve closed
10/31/2011	11:33:33 AM	SiCl4 post valve closed
10/31/2011	11:33:33 AM	Bypass valve closed
10/31/2011	11:33:33 AM	Bubbler valve closed
10/31/2011	11:33:33 AM	Helium valve opened
10/31/2011	11:33:33 AM	Main Vac valve opened
10/31/2011	11:33:33 AM	Helium MFC set to  20.000000
10/31/2011	11:33:33 AM	H2 MFC set to  0.000000
10/31/2011	11:33:33 AM	BCl3 MFC set to  0.000000
10/31/2011	11:33:33 AM	PHl3 MFC set to  0.000000
10/31/2011	11:33:33 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:33:33 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:33:33 AM	Tube furnace set to 150
10/31/2011	11:34:03 AM	Helium valve closed
10/31/2011	11:34:03 AM	H2 valve closed
10/31/2011	11:34:03 AM	BCl3 valve closed
10/31/2011	11:34:03 AM	PH3 valve closed
10/31/2011	11:34:03 AM	SiCl4 pre valve closed
10/31/2011	11:34:03 AM	SiCl4 post valve closed
10/31/2011	11:34:03 AM	Bypass valve closed
10/31/2011	11:34:03 AM	Bubbler valve closed
10/31/2011	11:34:03 AM	Main Vac valve opened
10/31/2011	11:34:03 AM	Helium MFC set to  0.000000
10/31/2011	11:34:03 AM	H2 MFC set to  0.000000
10/31/2011	11:34:03 AM	BCl3 MFC set to  0.000000
10/31/2011	11:34:03 AM	PHl3 MFC set to  0.000000
10/31/2011	11:34:03 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:34:03 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:34:03 AM	Tube furnace set to 150
10/31/2011	11:34:33 AM	H2 valve closed
10/31/2011	11:34:33 AM	BCl3 valve closed
10/31/2011	11:34:33 AM	PH3 valve closed
10/31/2011	11:34:33 AM	SiCl4 pre valve closed
10/31/2011	11:34:33 AM	SiCl4 post valve closed
10/31/2011	11:34:33 AM	Bypass valve closed
10/31/2011	11:34:33 AM	Bubbler valve closed
10/31/2011	11:34:33 AM	Helium valve opened
10/31/2011	11:34:33 AM	Main Vac valve opened
10/31/2011	11:34:33 AM	Helium MFC set to  20.000000
10/31/2011	11:34:33 AM	H2 MFC set to  0.000000
10/31/2011	11:34:33 AM	BCl3 MFC set to  0.000000
10/31/2011	11:34:33 AM	PHl3 MFC set to  0.000000
10/31/2011	11:34:34 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:34:34 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:34:34 AM	Tube furnace set to 150
10/31/2011	11:35:04 AM	Helium valve closed
10/31/2011	11:35:04 AM	H2 valve closed
10/31/2011	11:35:04 AM	BCl3 valve closed
10/31/2011	11:35:04 AM	PH3 valve closed
10/31/2011	11:35:04 AM	SiCl4 pre valve closed
10/31/2011	11:35:04 AM	SiCl4 post valve closed
10/31/2011	11:35:04 AM	Bypass valve closed
10/31/2011	11:35:04 AM	Bubbler valve closed
10/31/2011	11:35:04 AM	Main Vac valve opened
10/31/2011	11:35:04 AM	Helium MFC set to  0.000000
10/31/2011	11:35:04 AM	H2 MFC set to  0.000000
10/31/2011	11:35:04 AM	BCl3 MFC set to  0.000000
10/31/2011	11:35:04 AM	PHl3 MFC set to  0.000000
10/31/2011	11:35:04 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:35:04 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:35:04 AM	Tube furnace set to 150
10/31/2011	11:35:34 AM	H2 valve closed
10/31/2011	11:35:34 AM	BCl3 valve closed
10/31/2011	11:35:34 AM	PH3 valve closed
10/31/2011	11:35:34 AM	SiCl4 pre valve closed
10/31/2011	11:35:34 AM	SiCl4 post valve closed
10/31/2011	11:35:34 AM	Bypass valve closed
10/31/2011	11:35:34 AM	Bubbler valve closed
10/31/2011	11:35:34 AM	Helium valve opened
10/31/2011	11:35:34 AM	Main Vac valve opened
10/31/2011	11:35:34 AM	Helium MFC set to  20.000000
10/31/2011	11:35:34 AM	H2 MFC set to  0.000000
10/31/2011	11:35:34 AM	BCl3 MFC set to  0.000000
10/31/2011	11:35:34 AM	PHl3 MFC set to  0.000000
10/31/2011	11:35:34 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:35:34 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:35:34 AM	Tube furnace set to 150
10/31/2011	11:36:04 AM	Helium valve closed
10/31/2011	11:36:04 AM	H2 valve closed
10/31/2011	11:36:04 AM	BCl3 valve closed
10/31/2011	11:36:04 AM	PH3 valve closed
10/31/2011	11:36:04 AM	SiCl4 pre valve closed
10/31/2011	11:36:04 AM	SiCl4 post valve closed
10/31/2011	11:36:04 AM	Bypass valve closed
10/31/2011	11:36:04 AM	Bubbler valve closed
10/31/2011	11:36:04 AM	Main Vac valve opened
10/31/2011	11:36:04 AM	Helium MFC set to  0.000000
10/31/2011	11:36:04 AM	H2 MFC set to  0.000000
10/31/2011	11:36:04 AM	BCl3 MFC set to  0.000000
10/31/2011	11:36:04 AM	PHl3 MFC set to  0.000000
10/31/2011	11:36:04 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:36:04 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:36:04 AM	Tube furnace set to 150
10/31/2011	11:36:34 AM	H2 valve closed
10/31/2011	11:36:34 AM	BCl3 valve closed
10/31/2011	11:36:34 AM	PH3 valve closed
10/31/2011	11:36:34 AM	SiCl4 pre valve closed
10/31/2011	11:36:34 AM	SiCl4 post valve closed
10/31/2011	11:36:34 AM	Bypass valve closed
10/31/2011	11:36:34 AM	Bubbler valve closed
10/31/2011	11:36:34 AM	Helium valve opened
10/31/2011	11:36:34 AM	Main Vac valve opened
10/31/2011	11:36:34 AM	Helium MFC set to  20.000000
10/31/2011	11:36:34 AM	H2 MFC set to  0.000000
10/31/2011	11:36:34 AM	BCl3 MFC set to  0.000000
10/31/2011	11:36:34 AM	PHl3 MFC set to  0.000000
10/31/2011	11:36:34 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:36:34 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:36:35 AM	Tube furnace set to 150
10/31/2011	11:37:05 AM	Helium valve closed
10/31/2011	11:37:05 AM	H2 valve closed
10/31/2011	11:37:05 AM	BCl3 valve closed
10/31/2011	11:37:05 AM	PH3 valve closed
10/31/2011	11:37:05 AM	SiCl4 pre valve closed
10/31/2011	11:37:05 AM	SiCl4 post valve closed
10/31/2011	11:37:05 AM	Bypass valve closed
10/31/2011	11:37:05 AM	Bubbler valve closed
10/31/2011	11:37:05 AM	Main Vac valve opened
10/31/2011	11:37:05 AM	Helium MFC set to  0.000000
10/31/2011	11:37:05 AM	H2 MFC set to  0.000000
10/31/2011	11:37:05 AM	BCl3 MFC set to  0.000000
10/31/2011	11:37:05 AM	PHl3 MFC set to  0.000000
10/31/2011	11:37:05 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:37:05 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:37:05 AM	Tube furnace set to 150
10/31/2011	11:37:35 AM	H2 valve closed
10/31/2011	11:37:35 AM	BCl3 valve closed
10/31/2011	11:37:35 AM	PH3 valve closed
10/31/2011	11:37:35 AM	SiCl4 pre valve closed
10/31/2011	11:37:35 AM	SiCl4 post valve closed
10/31/2011	11:37:35 AM	Bypass valve closed
10/31/2011	11:37:35 AM	Bubbler valve closed
10/31/2011	11:37:35 AM	Helium valve opened
10/31/2011	11:37:35 AM	Main Vac valve opened
10/31/2011	11:37:35 AM	Helium MFC set to  20.000000
10/31/2011	11:37:35 AM	H2 MFC set to  0.000000
10/31/2011	11:37:35 AM	BCl3 MFC set to  0.000000
10/31/2011	11:37:35 AM	PHl3 MFC set to  0.000000
10/31/2011	11:37:35 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:37:35 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:37:35 AM	Tube furnace set to 150
10/31/2011	11:38:05 AM	Helium valve closed
10/31/2011	11:38:05 AM	H2 valve closed
10/31/2011	11:38:05 AM	BCl3 valve closed
10/31/2011	11:38:05 AM	PH3 valve closed
10/31/2011	11:38:05 AM	SiCl4 pre valve closed
10/31/2011	11:38:05 AM	SiCl4 post valve closed
10/31/2011	11:38:05 AM	Bypass valve closed
10/31/2011	11:38:05 AM	Bubbler valve closed
10/31/2011	11:38:05 AM	Main Vac valve opened
10/31/2011	11:38:05 AM	Helium MFC set to  0.000000
10/31/2011	11:38:05 AM	H2 MFC set to  0.000000
10/31/2011	11:38:05 AM	BCl3 MFC set to  0.000000
10/31/2011	11:38:05 AM	PHl3 MFC set to  0.000000
10/31/2011	11:38:05 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:38:05 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:38:05 AM	Tube furnace set to 180
10/31/2011	11:38:10 AM	Run finished at 11:38 AM
10/31/2011	11:56:57 AM	Recipe started at 11:56 AM
10/31/2011	11:56:57 AM	Helium valve closed
10/31/2011	11:56:57 AM	H2 valve closed
10/31/2011	11:56:57 AM	BCl3 valve closed
10/31/2011	11:56:57 AM	PH3 valve closed
10/31/2011	11:56:57 AM	SiCl4 pre valve closed
10/31/2011	11:56:57 AM	SiCl4 post valve closed
10/31/2011	11:56:57 AM	Main Vac valve closed
10/31/2011	11:56:57 AM	Bubbler valve closed
10/31/2011	11:56:57 AM	Bypass valve opened
10/31/2011	11:56:57 AM	Helium MFC set to  0.000000
10/31/2011	11:56:57 AM	H2 MFC set to  0.000000
10/31/2011	11:56:57 AM	BCl3 MFC set to  0.000000
10/31/2011	11:56:57 AM	PHl3 MFC set to  0.000000
10/31/2011	11:56:57 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:56:57 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:56:57 AM	Tube furnace set to 150
10/31/2011	11:56:58 AM	Helium valve closed
10/31/2011	11:56:58 AM	H2 valve closed
10/31/2011	11:56:58 AM	BCl3 valve closed
10/31/2011	11:56:58 AM	PH3 valve closed
10/31/2011	11:56:58 AM	SiCl4 pre valve closed
10/31/2011	11:56:58 AM	SiCl4 post valve closed
10/31/2011	11:56:58 AM	Main Vac valve closed
10/31/2011	11:56:58 AM	Bubbler valve closed
10/31/2011	11:56:58 AM	Bypass valve opened
10/31/2011	11:56:58 AM	Helium MFC set to  0.000000
10/31/2011	11:56:58 AM	H2 MFC set to  0.000000
10/31/2011	11:56:58 AM	BCl3 MFC set to  0.000000
10/31/2011	11:56:58 AM	PHl3 MFC set to  0.000000
10/31/2011	11:56:58 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:56:58 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:56:58 AM	Tube furnace set to 150
10/31/2011	11:57:13 AM	Run aborted at 11:57 AM
10/31/2011	11:57:13 AM	Helium valve closed
10/31/2011	11:57:13 AM	H2 valve closed
10/31/2011	11:57:13 AM	BCl3 valve closed
10/31/2011	11:57:13 AM	PH3 valve closed
10/31/2011	11:57:13 AM	SiCl4 pre valve closed
10/31/2011	11:57:13 AM	SiCl4 post valve closed
10/31/2011	11:57:13 AM	Bypass valve closed
10/31/2011	11:57:13 AM	Main Vac valve closed
10/31/2011	11:57:13 AM	Bubbler valve closed
10/31/2011	11:57:13 AM	Helium MFC set to  0.000000
10/31/2011	11:57:13 AM	H2 MFC set to  0.000000
10/31/2011	11:57:13 AM	BCl3 MFC set to  0.000000
10/31/2011	11:57:13 AM	PHl3 MFC set to  0.000000
10/31/2011	11:57:13 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:57:13 AM	Tube furnace set to 0
10/31/2011	11:57:24 AM	Main Vac valve opened
10/31/2011	11:57:50 AM	Main Vac valve closed
10/31/2011	11:58:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	11:58:09 AM	Recipe started at 11:58 AM
10/31/2011	11:58:09 AM	Helium valve closed
10/31/2011	11:58:09 AM	H2 valve closed
10/31/2011	11:58:09 AM	BCl3 valve closed
10/31/2011	11:58:09 AM	PH3 valve closed
10/31/2011	11:58:09 AM	SiCl4 pre valve closed
10/31/2011	11:58:09 AM	SiCl4 post valve closed
10/31/2011	11:58:09 AM	Main Vac valve closed
10/31/2011	11:58:09 AM	Bypass valve closed
10/31/2011	11:58:09 AM	Bubbler valve closed
10/31/2011	11:58:09 AM	Helium MFC set to  0.000000
10/31/2011	11:58:09 AM	H2 MFC set to  0.000000
10/31/2011	11:58:09 AM	BCl3 MFC set to  0.000000
10/31/2011	11:58:09 AM	PHl3 MFC set to  0.000000
10/31/2011	11:58:09 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:58:09 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:58:10 AM	Tube furnace set to 0
10/31/2011	11:58:13 AM	H2 valve closed
10/31/2011	11:58:13 AM	BCl3 valve closed
10/31/2011	11:58:13 AM	PH3 valve closed
10/31/2011	11:58:13 AM	SiCl4 pre valve closed
10/31/2011	11:58:13 AM	SiCl4 post valve closed
10/31/2011	11:58:13 AM	Main Vac valve closed
10/31/2011	11:58:13 AM	Bypass valve closed
10/31/2011	11:58:13 AM	Bubbler valve closed
10/31/2011	11:58:13 AM	Helium valve opened
10/31/2011	11:58:13 AM	Helium MFC set to  500.000000
10/31/2011	11:58:13 AM	H2 MFC set to  0.000000
10/31/2011	11:58:13 AM	BCl3 MFC set to  0.000000
10/31/2011	11:58:13 AM	PHl3 MFC set to  0.000000
10/31/2011	11:58:13 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:58:13 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:58:13 AM	Tube furnace set to 0
10/31/2011	11:59:16 AM	Helium valve closed
10/31/2011	11:59:16 AM	H2 valve closed
10/31/2011	11:59:16 AM	BCl3 valve closed
10/31/2011	11:59:16 AM	PH3 valve closed
10/31/2011	11:59:16 AM	SiCl4 pre valve closed
10/31/2011	11:59:16 AM	SiCl4 post valve closed
10/31/2011	11:59:16 AM	Main Vac valve closed
10/31/2011	11:59:16 AM	Bypass valve closed
10/31/2011	11:59:16 AM	Bubbler valve closed
10/31/2011	11:59:16 AM	Helium MFC set to  0.000000
10/31/2011	11:59:16 AM	H2 MFC set to  0.000000
10/31/2011	11:59:16 AM	BCl3 MFC set to  0.000000
10/31/2011	11:59:16 AM	PHl3 MFC set to  0.000000
10/31/2011	11:59:16 AM	SiCl4 MFC set to  0.000000
10/31/2011	11:59:16 AM	Bypass solenoid MFC set to  0.000000
10/31/2011	11:59:16 AM	Tube furnace set to 0
10/31/2011	11:59:17 AM	Run finished at 11:59 AM
10/31/2011	11:59:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	12:16:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	12:16:15 PM	Recipe started at 12:16 PM
10/31/2011	12:16:15 PM	Helium valve closed
10/31/2011	12:16:15 PM	H2 valve closed
10/31/2011	12:16:15 PM	BCl3 valve closed
10/31/2011	12:16:15 PM	PH3 valve closed
10/31/2011	12:16:15 PM	SiCl4 pre valve closed
10/31/2011	12:16:15 PM	SiCl4 post valve closed
10/31/2011	12:16:15 PM	Main Vac valve closed
10/31/2011	12:16:15 PM	Bubbler valve closed
10/31/2011	12:16:15 PM	Bypass valve opened
10/31/2011	12:16:15 PM	Helium MFC set to  0.000000
10/31/2011	12:16:15 PM	H2 MFC set to  0.000000
10/31/2011	12:16:15 PM	BCl3 MFC set to  0.000000
10/31/2011	12:16:15 PM	PHl3 MFC set to  0.000000
10/31/2011	12:16:15 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:16:15 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:16:15 PM	Tube furnace set to 0
10/31/2011	12:17:25 PM	Helium valve closed
10/31/2011	12:17:25 PM	H2 valve closed
10/31/2011	12:17:25 PM	BCl3 valve closed
10/31/2011	12:17:25 PM	PH3 valve closed
10/31/2011	12:17:25 PM	SiCl4 pre valve closed
10/31/2011	12:17:25 PM	SiCl4 post valve closed
10/31/2011	12:17:25 PM	Main Vac valve closed
10/31/2011	12:17:25 PM	Bubbler valve closed
10/31/2011	12:17:25 PM	Bypass valve opened
10/31/2011	12:17:25 PM	Helium MFC set to  0.000000
10/31/2011	12:17:25 PM	H2 MFC set to  0.000000
10/31/2011	12:17:25 PM	BCl3 MFC set to  0.000000
10/31/2011	12:17:25 PM	PHl3 MFC set to  0.000000
10/31/2011	12:17:25 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:17:25 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:17:26 PM	Tube furnace set to 0
10/31/2011	12:17:37 PM	Helium valve closed
10/31/2011	12:17:37 PM	H2 valve closed
10/31/2011	12:17:37 PM	BCl3 valve closed
10/31/2011	12:17:37 PM	PH3 valve closed
10/31/2011	12:17:37 PM	SiCl4 pre valve closed
10/31/2011	12:17:37 PM	SiCl4 post valve closed
10/31/2011	12:17:37 PM	Bypass valve closed
10/31/2011	12:17:37 PM	Bubbler valve closed
10/31/2011	12:17:37 PM	Main Vac valve opened
10/31/2011	12:17:37 PM	Helium MFC set to  0.000000
10/31/2011	12:17:37 PM	H2 MFC set to  0.000000
10/31/2011	12:17:37 PM	BCl3 MFC set to  0.000000
10/31/2011	12:17:37 PM	PHl3 MFC set to  0.000000
10/31/2011	12:17:37 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:17:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:17:37 PM	Tube furnace set to 0
10/31/2011	12:17:38 PM	Run finished at 12:17 PM
10/31/2011	12:17:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	12:17:55 PM	Recipe started at 12:17 PM
10/31/2011	12:17:55 PM	Helium valve closed
10/31/2011	12:17:55 PM	H2 valve closed
10/31/2011	12:17:55 PM	BCl3 valve closed
10/31/2011	12:17:55 PM	PH3 valve closed
10/31/2011	12:17:55 PM	SiCl4 pre valve closed
10/31/2011	12:17:55 PM	SiCl4 post valve closed
10/31/2011	12:17:55 PM	Main Vac valve closed
10/31/2011	12:17:55 PM	Bubbler valve closed
10/31/2011	12:17:55 PM	Bypass valve opened
10/31/2011	12:17:55 PM	Helium MFC set to  0.000000
10/31/2011	12:17:55 PM	H2 MFC set to  0.000000
10/31/2011	12:17:55 PM	BCl3 MFC set to  0.000000
10/31/2011	12:17:55 PM	PHl3 MFC set to  0.000000
10/31/2011	12:17:55 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:17:55 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:17:56 PM	Tube furnace set to 150
10/31/2011	12:17:56 PM	Helium valve closed
10/31/2011	12:17:56 PM	H2 valve closed
10/31/2011	12:17:56 PM	BCl3 valve closed
10/31/2011	12:17:56 PM	PH3 valve closed
10/31/2011	12:17:56 PM	SiCl4 pre valve closed
10/31/2011	12:17:56 PM	SiCl4 post valve closed
10/31/2011	12:17:56 PM	Main Vac valve closed
10/31/2011	12:17:56 PM	Bubbler valve closed
10/31/2011	12:17:56 PM	Bypass valve opened
10/31/2011	12:17:56 PM	Helium MFC set to  0.000000
10/31/2011	12:17:56 PM	H2 MFC set to  0.000000
10/31/2011	12:17:56 PM	BCl3 MFC set to  0.000000
10/31/2011	12:17:56 PM	PHl3 MFC set to  0.000000
10/31/2011	12:17:56 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:17:56 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:17:56 PM	Tube furnace set to 150
10/31/2011	12:18:26 PM	Helium valve closed
10/31/2011	12:18:26 PM	H2 valve closed
10/31/2011	12:18:26 PM	BCl3 valve closed
10/31/2011	12:18:26 PM	PH3 valve closed
10/31/2011	12:18:26 PM	SiCl4 pre valve closed
10/31/2011	12:18:26 PM	SiCl4 post valve closed
10/31/2011	12:18:26 PM	Bypass valve closed
10/31/2011	12:18:26 PM	Bubbler valve closed
10/31/2011	12:18:26 PM	Main Vac valve opened
10/31/2011	12:18:26 PM	Helium MFC set to  0.000000
10/31/2011	12:18:26 PM	H2 MFC set to  0.000000
10/31/2011	12:18:26 PM	BCl3 MFC set to  0.000000
10/31/2011	12:18:26 PM	PHl3 MFC set to  0.000000
10/31/2011	12:18:26 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:18:26 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:18:26 PM	Tube furnace set to 150
10/31/2011	12:18:56 PM	H2 valve closed
10/31/2011	12:18:56 PM	BCl3 valve closed
10/31/2011	12:18:56 PM	PH3 valve closed
10/31/2011	12:18:56 PM	SiCl4 pre valve closed
10/31/2011	12:18:56 PM	SiCl4 post valve closed
10/31/2011	12:18:56 PM	Bypass valve closed
10/31/2011	12:18:56 PM	Bubbler valve closed
10/31/2011	12:18:56 PM	Helium valve opened
10/31/2011	12:18:56 PM	Main Vac valve opened
10/31/2011	12:18:56 PM	Helium MFC set to  20.000000
10/31/2011	12:18:56 PM	H2 MFC set to  0.000000
10/31/2011	12:18:56 PM	BCl3 MFC set to  0.000000
10/31/2011	12:18:56 PM	PHl3 MFC set to  0.000000
10/31/2011	12:18:56 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:18:56 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:18:56 PM	Tube furnace set to 150
10/31/2011	12:19:26 PM	Helium valve closed
10/31/2011	12:19:26 PM	H2 valve closed
10/31/2011	12:19:26 PM	BCl3 valve closed
10/31/2011	12:19:26 PM	PH3 valve closed
10/31/2011	12:19:26 PM	SiCl4 pre valve closed
10/31/2011	12:19:26 PM	SiCl4 post valve closed
10/31/2011	12:19:26 PM	Bypass valve closed
10/31/2011	12:19:26 PM	Bubbler valve closed
10/31/2011	12:19:26 PM	Main Vac valve opened
10/31/2011	12:19:26 PM	Helium MFC set to  0.000000
10/31/2011	12:19:26 PM	H2 MFC set to  0.000000
10/31/2011	12:19:26 PM	BCl3 MFC set to  0.000000
10/31/2011	12:19:26 PM	PHl3 MFC set to  0.000000
10/31/2011	12:19:26 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:19:26 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:19:27 PM	Tube furnace set to 150
10/31/2011	12:19:57 PM	H2 valve closed
10/31/2011	12:19:57 PM	BCl3 valve closed
10/31/2011	12:19:57 PM	PH3 valve closed
10/31/2011	12:19:57 PM	SiCl4 pre valve closed
10/31/2011	12:19:57 PM	SiCl4 post valve closed
10/31/2011	12:19:57 PM	Bypass valve closed
10/31/2011	12:19:57 PM	Bubbler valve closed
10/31/2011	12:19:57 PM	Helium valve opened
10/31/2011	12:19:57 PM	Main Vac valve opened
10/31/2011	12:19:57 PM	Helium MFC set to  20.000000
10/31/2011	12:19:57 PM	H2 MFC set to  0.000000
10/31/2011	12:19:57 PM	BCl3 MFC set to  0.000000
10/31/2011	12:19:57 PM	PHl3 MFC set to  0.000000
10/31/2011	12:19:57 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:19:57 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:19:57 PM	Tube furnace set to 150
10/31/2011	12:20:27 PM	Helium valve closed
10/31/2011	12:20:27 PM	H2 valve closed
10/31/2011	12:20:27 PM	BCl3 valve closed
10/31/2011	12:20:27 PM	PH3 valve closed
10/31/2011	12:20:27 PM	SiCl4 pre valve closed
10/31/2011	12:20:27 PM	SiCl4 post valve closed
10/31/2011	12:20:27 PM	Bypass valve closed
10/31/2011	12:20:27 PM	Bubbler valve closed
10/31/2011	12:20:27 PM	Main Vac valve opened
10/31/2011	12:20:27 PM	Helium MFC set to  0.000000
10/31/2011	12:20:27 PM	H2 MFC set to  0.000000
10/31/2011	12:20:27 PM	BCl3 MFC set to  0.000000
10/31/2011	12:20:27 PM	PHl3 MFC set to  0.000000
10/31/2011	12:20:27 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:20:27 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:20:27 PM	Tube furnace set to 150
10/31/2011	12:20:57 PM	H2 valve closed
10/31/2011	12:20:57 PM	BCl3 valve closed
10/31/2011	12:20:57 PM	PH3 valve closed
10/31/2011	12:20:57 PM	SiCl4 pre valve closed
10/31/2011	12:20:57 PM	SiCl4 post valve closed
10/31/2011	12:20:57 PM	Bypass valve closed
10/31/2011	12:20:57 PM	Bubbler valve closed
10/31/2011	12:20:57 PM	Helium valve opened
10/31/2011	12:20:57 PM	Main Vac valve opened
10/31/2011	12:20:57 PM	Helium MFC set to  20.000000
10/31/2011	12:20:57 PM	H2 MFC set to  0.000000
10/31/2011	12:20:57 PM	BCl3 MFC set to  0.000000
10/31/2011	12:20:57 PM	PHl3 MFC set to  0.000000
10/31/2011	12:20:57 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:20:57 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:20:57 PM	Tube furnace set to 150
10/31/2011	12:21:27 PM	Helium valve closed
10/31/2011	12:21:27 PM	H2 valve closed
10/31/2011	12:21:27 PM	BCl3 valve closed
10/31/2011	12:21:27 PM	PH3 valve closed
10/31/2011	12:21:27 PM	SiCl4 pre valve closed
10/31/2011	12:21:27 PM	SiCl4 post valve closed
10/31/2011	12:21:27 PM	Bypass valve closed
10/31/2011	12:21:27 PM	Bubbler valve closed
10/31/2011	12:21:27 PM	Main Vac valve opened
10/31/2011	12:21:27 PM	Helium MFC set to  0.000000
10/31/2011	12:21:27 PM	H2 MFC set to  0.000000
10/31/2011	12:21:27 PM	BCl3 MFC set to  0.000000
10/31/2011	12:21:27 PM	PHl3 MFC set to  0.000000
10/31/2011	12:21:27 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:21:27 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:21:27 PM	Tube furnace set to 150
10/31/2011	12:21:57 PM	H2 valve closed
10/31/2011	12:21:57 PM	BCl3 valve closed
10/31/2011	12:21:57 PM	PH3 valve closed
10/31/2011	12:21:57 PM	SiCl4 pre valve closed
10/31/2011	12:21:57 PM	SiCl4 post valve closed
10/31/2011	12:21:57 PM	Bypass valve closed
10/31/2011	12:21:57 PM	Bubbler valve closed
10/31/2011	12:21:57 PM	Helium valve opened
10/31/2011	12:21:57 PM	Main Vac valve opened
10/31/2011	12:21:57 PM	Helium MFC set to  20.000000
10/31/2011	12:21:57 PM	H2 MFC set to  0.000000
10/31/2011	12:21:57 PM	BCl3 MFC set to  0.000000
10/31/2011	12:21:57 PM	PHl3 MFC set to  0.000000
10/31/2011	12:21:57 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:21:57 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:21:58 PM	Tube furnace set to 150
10/31/2011	12:22:28 PM	Helium valve closed
10/31/2011	12:22:28 PM	H2 valve closed
10/31/2011	12:22:28 PM	BCl3 valve closed
10/31/2011	12:22:28 PM	PH3 valve closed
10/31/2011	12:22:28 PM	SiCl4 pre valve closed
10/31/2011	12:22:28 PM	SiCl4 post valve closed
10/31/2011	12:22:28 PM	Bypass valve closed
10/31/2011	12:22:28 PM	Bubbler valve closed
10/31/2011	12:22:28 PM	Main Vac valve opened
10/31/2011	12:22:28 PM	Helium MFC set to  0.000000
10/31/2011	12:22:28 PM	H2 MFC set to  0.000000
10/31/2011	12:22:28 PM	BCl3 MFC set to  0.000000
10/31/2011	12:22:28 PM	PHl3 MFC set to  0.000000
10/31/2011	12:22:28 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:22:28 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:22:28 PM	Tube furnace set to 150
10/31/2011	12:22:58 PM	H2 valve closed
10/31/2011	12:22:58 PM	BCl3 valve closed
10/31/2011	12:22:58 PM	PH3 valve closed
10/31/2011	12:22:58 PM	SiCl4 pre valve closed
10/31/2011	12:22:58 PM	SiCl4 post valve closed
10/31/2011	12:22:58 PM	Bypass valve closed
10/31/2011	12:22:58 PM	Bubbler valve closed
10/31/2011	12:22:58 PM	Helium valve opened
10/31/2011	12:22:58 PM	Main Vac valve opened
10/31/2011	12:22:58 PM	Helium MFC set to  20.000000
10/31/2011	12:22:58 PM	H2 MFC set to  0.000000
10/31/2011	12:22:58 PM	BCl3 MFC set to  0.000000
10/31/2011	12:22:58 PM	PHl3 MFC set to  0.000000
10/31/2011	12:22:58 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:22:58 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:22:58 PM	Tube furnace set to 150
10/31/2011	12:23:28 PM	Helium valve closed
10/31/2011	12:23:28 PM	H2 valve closed
10/31/2011	12:23:28 PM	BCl3 valve closed
10/31/2011	12:23:28 PM	PH3 valve closed
10/31/2011	12:23:28 PM	SiCl4 pre valve closed
10/31/2011	12:23:28 PM	SiCl4 post valve closed
10/31/2011	12:23:28 PM	Bypass valve closed
10/31/2011	12:23:28 PM	Bubbler valve closed
10/31/2011	12:23:28 PM	Main Vac valve opened
10/31/2011	12:23:28 PM	Helium MFC set to  0.000000
10/31/2011	12:23:28 PM	H2 MFC set to  0.000000
10/31/2011	12:23:28 PM	BCl3 MFC set to  0.000000
10/31/2011	12:23:28 PM	PHl3 MFC set to  0.000000
10/31/2011	12:23:28 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:23:28 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:23:28 PM	Tube furnace set to 150
10/31/2011	12:23:58 PM	H2 valve closed
10/31/2011	12:23:58 PM	BCl3 valve closed
10/31/2011	12:23:58 PM	PH3 valve closed
10/31/2011	12:23:58 PM	SiCl4 pre valve closed
10/31/2011	12:23:58 PM	SiCl4 post valve closed
10/31/2011	12:23:58 PM	Bypass valve closed
10/31/2011	12:23:58 PM	Bubbler valve closed
10/31/2011	12:23:58 PM	Helium valve opened
10/31/2011	12:23:58 PM	Main Vac valve opened
10/31/2011	12:23:58 PM	Helium MFC set to  20.000000
10/31/2011	12:23:58 PM	H2 MFC set to  0.000000
10/31/2011	12:23:58 PM	BCl3 MFC set to  0.000000
10/31/2011	12:23:58 PM	PHl3 MFC set to  0.000000
10/31/2011	12:23:58 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:23:58 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:23:58 PM	Tube furnace set to 150
10/31/2011	12:24:28 PM	Helium valve closed
10/31/2011	12:24:28 PM	H2 valve closed
10/31/2011	12:24:28 PM	BCl3 valve closed
10/31/2011	12:24:28 PM	PH3 valve closed
10/31/2011	12:24:28 PM	SiCl4 pre valve closed
10/31/2011	12:24:28 PM	SiCl4 post valve closed
10/31/2011	12:24:28 PM	Bypass valve closed
10/31/2011	12:24:28 PM	Bubbler valve closed
10/31/2011	12:24:28 PM	Main Vac valve opened
10/31/2011	12:24:28 PM	Helium MFC set to  0.000000
10/31/2011	12:24:28 PM	H2 MFC set to  0.000000
10/31/2011	12:24:28 PM	BCl3 MFC set to  0.000000
10/31/2011	12:24:28 PM	PHl3 MFC set to  0.000000
10/31/2011	12:24:28 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:24:28 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:24:29 PM	Tube furnace set to 150
10/31/2011	12:24:59 PM	H2 valve closed
10/31/2011	12:24:59 PM	BCl3 valve closed
10/31/2011	12:24:59 PM	PH3 valve closed
10/31/2011	12:24:59 PM	SiCl4 pre valve closed
10/31/2011	12:24:59 PM	SiCl4 post valve closed
10/31/2011	12:24:59 PM	Bypass valve closed
10/31/2011	12:24:59 PM	Bubbler valve closed
10/31/2011	12:24:59 PM	Helium valve opened
10/31/2011	12:24:59 PM	Main Vac valve opened
10/31/2011	12:24:59 PM	Helium MFC set to  20.000000
10/31/2011	12:24:59 PM	H2 MFC set to  0.000000
10/31/2011	12:24:59 PM	BCl3 MFC set to  0.000000
10/31/2011	12:24:59 PM	PHl3 MFC set to  0.000000
10/31/2011	12:24:59 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:24:59 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:24:59 PM	Tube furnace set to 150
10/31/2011	12:25:29 PM	Helium valve closed
10/31/2011	12:25:29 PM	H2 valve closed
10/31/2011	12:25:29 PM	BCl3 valve closed
10/31/2011	12:25:29 PM	PH3 valve closed
10/31/2011	12:25:29 PM	SiCl4 pre valve closed
10/31/2011	12:25:29 PM	SiCl4 post valve closed
10/31/2011	12:25:29 PM	Bypass valve closed
10/31/2011	12:25:29 PM	Bubbler valve closed
10/31/2011	12:25:29 PM	Main Vac valve opened
10/31/2011	12:25:29 PM	Helium MFC set to  0.000000
10/31/2011	12:25:29 PM	H2 MFC set to  0.000000
10/31/2011	12:25:29 PM	BCl3 MFC set to  0.000000
10/31/2011	12:25:29 PM	PHl3 MFC set to  0.000000
10/31/2011	12:25:29 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:25:29 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:25:29 PM	Tube furnace set to 150
10/31/2011	12:25:59 PM	H2 valve closed
10/31/2011	12:25:59 PM	BCl3 valve closed
10/31/2011	12:25:59 PM	PH3 valve closed
10/31/2011	12:25:59 PM	SiCl4 pre valve closed
10/31/2011	12:25:59 PM	SiCl4 post valve closed
10/31/2011	12:25:59 PM	Bypass valve closed
10/31/2011	12:25:59 PM	Bubbler valve closed
10/31/2011	12:25:59 PM	Helium valve opened
10/31/2011	12:25:59 PM	Main Vac valve opened
10/31/2011	12:25:59 PM	Helium MFC set to  20.000000
10/31/2011	12:25:59 PM	H2 MFC set to  0.000000
10/31/2011	12:25:59 PM	BCl3 MFC set to  0.000000
10/31/2011	12:25:59 PM	PHl3 MFC set to  0.000000
10/31/2011	12:25:59 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:25:59 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:25:59 PM	Tube furnace set to 150
10/31/2011	12:26:29 PM	Helium valve closed
10/31/2011	12:26:29 PM	H2 valve closed
10/31/2011	12:26:29 PM	BCl3 valve closed
10/31/2011	12:26:29 PM	PH3 valve closed
10/31/2011	12:26:29 PM	SiCl4 pre valve closed
10/31/2011	12:26:29 PM	SiCl4 post valve closed
10/31/2011	12:26:29 PM	Bypass valve closed
10/31/2011	12:26:29 PM	Bubbler valve closed
10/31/2011	12:26:29 PM	Main Vac valve opened
10/31/2011	12:26:29 PM	Helium MFC set to  0.000000
10/31/2011	12:26:29 PM	H2 MFC set to  0.000000
10/31/2011	12:26:29 PM	BCl3 MFC set to  0.000000
10/31/2011	12:26:29 PM	PHl3 MFC set to  0.000000
10/31/2011	12:26:29 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:26:29 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:26:29 PM	Tube furnace set to 150
10/31/2011	12:26:59 PM	H2 valve closed
10/31/2011	12:26:59 PM	BCl3 valve closed
10/31/2011	12:26:59 PM	PH3 valve closed
10/31/2011	12:26:59 PM	SiCl4 pre valve closed
10/31/2011	12:26:59 PM	SiCl4 post valve closed
10/31/2011	12:26:59 PM	Bypass valve closed
10/31/2011	12:26:59 PM	Bubbler valve closed
10/31/2011	12:26:59 PM	Helium valve opened
10/31/2011	12:26:59 PM	Main Vac valve opened
10/31/2011	12:26:59 PM	Helium MFC set to  20.000000
10/31/2011	12:26:59 PM	H2 MFC set to  0.000000
10/31/2011	12:26:59 PM	BCl3 MFC set to  0.000000
10/31/2011	12:26:59 PM	PHl3 MFC set to  0.000000
10/31/2011	12:26:59 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:26:59 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:27:00 PM	Tube furnace set to 150
10/31/2011	12:27:30 PM	Helium valve closed
10/31/2011	12:27:30 PM	H2 valve closed
10/31/2011	12:27:30 PM	BCl3 valve closed
10/31/2011	12:27:30 PM	PH3 valve closed
10/31/2011	12:27:30 PM	SiCl4 pre valve closed
10/31/2011	12:27:30 PM	SiCl4 post valve closed
10/31/2011	12:27:30 PM	Bypass valve closed
10/31/2011	12:27:30 PM	Bubbler valve closed
10/31/2011	12:27:30 PM	Main Vac valve opened
10/31/2011	12:27:30 PM	Helium MFC set to  0.000000
10/31/2011	12:27:30 PM	H2 MFC set to  0.000000
10/31/2011	12:27:30 PM	BCl3 MFC set to  0.000000
10/31/2011	12:27:30 PM	PHl3 MFC set to  0.000000
10/31/2011	12:27:30 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:27:30 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:27:30 PM	Tube furnace set to 150
10/31/2011	12:28:00 PM	H2 valve closed
10/31/2011	12:28:00 PM	BCl3 valve closed
10/31/2011	12:28:00 PM	PH3 valve closed
10/31/2011	12:28:00 PM	SiCl4 pre valve closed
10/31/2011	12:28:00 PM	SiCl4 post valve closed
10/31/2011	12:28:00 PM	Bypass valve closed
10/31/2011	12:28:00 PM	Bubbler valve closed
10/31/2011	12:28:00 PM	Helium valve opened
10/31/2011	12:28:00 PM	Main Vac valve opened
10/31/2011	12:28:00 PM	Helium MFC set to  20.000000
10/31/2011	12:28:00 PM	H2 MFC set to  0.000000
10/31/2011	12:28:00 PM	BCl3 MFC set to  0.000000
10/31/2011	12:28:00 PM	PHl3 MFC set to  0.000000
10/31/2011	12:28:00 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:28:00 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:28:00 PM	Tube furnace set to 150
10/31/2011	12:28:30 PM	Helium valve closed
10/31/2011	12:28:30 PM	H2 valve closed
10/31/2011	12:28:30 PM	BCl3 valve closed
10/31/2011	12:28:30 PM	PH3 valve closed
10/31/2011	12:28:30 PM	SiCl4 pre valve closed
10/31/2011	12:28:30 PM	SiCl4 post valve closed
10/31/2011	12:28:30 PM	Bypass valve closed
10/31/2011	12:28:30 PM	Bubbler valve closed
10/31/2011	12:28:30 PM	Main Vac valve opened
10/31/2011	12:28:30 PM	Helium MFC set to  0.000000
10/31/2011	12:28:30 PM	H2 MFC set to  0.000000
10/31/2011	12:28:30 PM	BCl3 MFC set to  0.000000
10/31/2011	12:28:30 PM	PHl3 MFC set to  0.000000
10/31/2011	12:28:30 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:28:30 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:28:30 PM	Tube furnace set to 150
10/31/2011	12:29:00 PM	H2 valve closed
10/31/2011	12:29:00 PM	BCl3 valve closed
10/31/2011	12:29:00 PM	PH3 valve closed
10/31/2011	12:29:00 PM	SiCl4 pre valve closed
10/31/2011	12:29:00 PM	SiCl4 post valve closed
10/31/2011	12:29:00 PM	Bypass valve closed
10/31/2011	12:29:00 PM	Bubbler valve closed
10/31/2011	12:29:00 PM	Helium valve opened
10/31/2011	12:29:00 PM	Main Vac valve opened
10/31/2011	12:29:00 PM	Helium MFC set to  20.000000
10/31/2011	12:29:00 PM	H2 MFC set to  0.000000
10/31/2011	12:29:00 PM	BCl3 MFC set to  0.000000
10/31/2011	12:29:00 PM	PHl3 MFC set to  0.000000
10/31/2011	12:29:00 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:29:00 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:29:00 PM	Tube furnace set to 150
10/31/2011	12:29:30 PM	Helium valve closed
10/31/2011	12:29:30 PM	H2 valve closed
10/31/2011	12:29:30 PM	BCl3 valve closed
10/31/2011	12:29:30 PM	PH3 valve closed
10/31/2011	12:29:30 PM	SiCl4 pre valve closed
10/31/2011	12:29:30 PM	SiCl4 post valve closed
10/31/2011	12:29:30 PM	Bypass valve closed
10/31/2011	12:29:30 PM	Bubbler valve closed
10/31/2011	12:29:30 PM	Main Vac valve opened
10/31/2011	12:29:30 PM	Helium MFC set to  0.000000
10/31/2011	12:29:30 PM	H2 MFC set to  0.000000
10/31/2011	12:29:30 PM	BCl3 MFC set to  0.000000
10/31/2011	12:29:30 PM	PHl3 MFC set to  0.000000
10/31/2011	12:29:30 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:29:30 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:29:31 PM	Tube furnace set to 150
10/31/2011	12:30:01 PM	H2 valve closed
10/31/2011	12:30:01 PM	BCl3 valve closed
10/31/2011	12:30:01 PM	PH3 valve closed
10/31/2011	12:30:01 PM	SiCl4 pre valve closed
10/31/2011	12:30:01 PM	SiCl4 post valve closed
10/31/2011	12:30:01 PM	Bypass valve closed
10/31/2011	12:30:01 PM	Bubbler valve closed
10/31/2011	12:30:01 PM	Helium valve opened
10/31/2011	12:30:01 PM	Main Vac valve opened
10/31/2011	12:30:01 PM	Helium MFC set to  20.000000
10/31/2011	12:30:01 PM	H2 MFC set to  0.000000
10/31/2011	12:30:01 PM	BCl3 MFC set to  0.000000
10/31/2011	12:30:01 PM	PHl3 MFC set to  0.000000
10/31/2011	12:30:01 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:30:01 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:30:01 PM	Tube furnace set to 150
10/31/2011	12:30:31 PM	Helium valve closed
10/31/2011	12:30:31 PM	H2 valve closed
10/31/2011	12:30:31 PM	BCl3 valve closed
10/31/2011	12:30:31 PM	PH3 valve closed
10/31/2011	12:30:31 PM	SiCl4 pre valve closed
10/31/2011	12:30:31 PM	SiCl4 post valve closed
10/31/2011	12:30:31 PM	Bypass valve closed
10/31/2011	12:30:31 PM	Bubbler valve closed
10/31/2011	12:30:31 PM	Main Vac valve opened
10/31/2011	12:30:31 PM	Helium MFC set to  0.000000
10/31/2011	12:30:31 PM	H2 MFC set to  0.000000
10/31/2011	12:30:31 PM	BCl3 MFC set to  0.000000
10/31/2011	12:30:31 PM	PHl3 MFC set to  0.000000
10/31/2011	12:30:31 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:30:31 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:30:31 PM	Tube furnace set to 150
10/31/2011	12:31:01 PM	H2 valve closed
10/31/2011	12:31:01 PM	BCl3 valve closed
10/31/2011	12:31:01 PM	PH3 valve closed
10/31/2011	12:31:01 PM	SiCl4 pre valve closed
10/31/2011	12:31:01 PM	SiCl4 post valve closed
10/31/2011	12:31:01 PM	Bypass valve closed
10/31/2011	12:31:01 PM	Bubbler valve closed
10/31/2011	12:31:01 PM	Helium valve opened
10/31/2011	12:31:01 PM	Main Vac valve opened
10/31/2011	12:31:01 PM	Helium MFC set to  20.000000
10/31/2011	12:31:01 PM	H2 MFC set to  0.000000
10/31/2011	12:31:01 PM	BCl3 MFC set to  0.000000
10/31/2011	12:31:01 PM	PHl3 MFC set to  0.000000
10/31/2011	12:31:01 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:31:01 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:31:01 PM	Tube furnace set to 150
10/31/2011	12:31:31 PM	Helium valve closed
10/31/2011	12:31:31 PM	H2 valve closed
10/31/2011	12:31:31 PM	BCl3 valve closed
10/31/2011	12:31:31 PM	PH3 valve closed
10/31/2011	12:31:31 PM	SiCl4 pre valve closed
10/31/2011	12:31:31 PM	SiCl4 post valve closed
10/31/2011	12:31:31 PM	Bypass valve closed
10/31/2011	12:31:31 PM	Bubbler valve closed
10/31/2011	12:31:31 PM	Main Vac valve opened
10/31/2011	12:31:31 PM	Helium MFC set to  0.000000
10/31/2011	12:31:31 PM	H2 MFC set to  0.000000
10/31/2011	12:31:31 PM	BCl3 MFC set to  0.000000
10/31/2011	12:31:31 PM	PHl3 MFC set to  0.000000
10/31/2011	12:31:31 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:31:31 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:31:31 PM	Tube furnace set to 150
10/31/2011	12:32:01 PM	H2 valve closed
10/31/2011	12:32:01 PM	BCl3 valve closed
10/31/2011	12:32:01 PM	PH3 valve closed
10/31/2011	12:32:01 PM	SiCl4 pre valve closed
10/31/2011	12:32:01 PM	SiCl4 post valve closed
10/31/2011	12:32:01 PM	Bypass valve closed
10/31/2011	12:32:01 PM	Bubbler valve closed
10/31/2011	12:32:01 PM	Helium valve opened
10/31/2011	12:32:01 PM	Main Vac valve opened
10/31/2011	12:32:01 PM	Helium MFC set to  20.000000
10/31/2011	12:32:01 PM	H2 MFC set to  0.000000
10/31/2011	12:32:01 PM	BCl3 MFC set to  0.000000
10/31/2011	12:32:01 PM	PHl3 MFC set to  0.000000
10/31/2011	12:32:01 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:32:01 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:32:02 PM	Tube furnace set to 150
10/31/2011	12:32:32 PM	Helium valve closed
10/31/2011	12:32:32 PM	H2 valve closed
10/31/2011	12:32:32 PM	BCl3 valve closed
10/31/2011	12:32:32 PM	PH3 valve closed
10/31/2011	12:32:32 PM	SiCl4 pre valve closed
10/31/2011	12:32:32 PM	SiCl4 post valve closed
10/31/2011	12:32:32 PM	Bypass valve closed
10/31/2011	12:32:32 PM	Bubbler valve closed
10/31/2011	12:32:32 PM	Main Vac valve opened
10/31/2011	12:32:32 PM	Helium MFC set to  0.000000
10/31/2011	12:32:32 PM	H2 MFC set to  0.000000
10/31/2011	12:32:32 PM	BCl3 MFC set to  0.000000
10/31/2011	12:32:32 PM	PHl3 MFC set to  0.000000
10/31/2011	12:32:32 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:32:32 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:32:32 PM	Tube furnace set to 150
10/31/2011	12:33:02 PM	H2 valve closed
10/31/2011	12:33:02 PM	BCl3 valve closed
10/31/2011	12:33:02 PM	PH3 valve closed
10/31/2011	12:33:02 PM	SiCl4 pre valve closed
10/31/2011	12:33:02 PM	SiCl4 post valve closed
10/31/2011	12:33:02 PM	Bypass valve closed
10/31/2011	12:33:02 PM	Bubbler valve closed
10/31/2011	12:33:02 PM	Helium valve opened
10/31/2011	12:33:02 PM	Main Vac valve opened
10/31/2011	12:33:02 PM	Helium MFC set to  20.000000
10/31/2011	12:33:02 PM	H2 MFC set to  0.000000
10/31/2011	12:33:02 PM	BCl3 MFC set to  0.000000
10/31/2011	12:33:02 PM	PHl3 MFC set to  0.000000
10/31/2011	12:33:02 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:33:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:33:02 PM	Tube furnace set to 150
10/31/2011	12:33:32 PM	Helium valve closed
10/31/2011	12:33:32 PM	H2 valve closed
10/31/2011	12:33:32 PM	BCl3 valve closed
10/31/2011	12:33:32 PM	PH3 valve closed
10/31/2011	12:33:32 PM	SiCl4 pre valve closed
10/31/2011	12:33:32 PM	SiCl4 post valve closed
10/31/2011	12:33:32 PM	Bypass valve closed
10/31/2011	12:33:32 PM	Bubbler valve closed
10/31/2011	12:33:32 PM	Main Vac valve opened
10/31/2011	12:33:32 PM	Helium MFC set to  0.000000
10/31/2011	12:33:32 PM	H2 MFC set to  0.000000
10/31/2011	12:33:32 PM	BCl3 MFC set to  0.000000
10/31/2011	12:33:32 PM	PHl3 MFC set to  0.000000
10/31/2011	12:33:32 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:33:32 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:33:32 PM	Tube furnace set to 150
10/31/2011	12:34:02 PM	H2 valve closed
10/31/2011	12:34:02 PM	BCl3 valve closed
10/31/2011	12:34:02 PM	PH3 valve closed
10/31/2011	12:34:02 PM	SiCl4 pre valve closed
10/31/2011	12:34:02 PM	SiCl4 post valve closed
10/31/2011	12:34:02 PM	Bypass valve closed
10/31/2011	12:34:02 PM	Bubbler valve closed
10/31/2011	12:34:02 PM	Helium valve opened
10/31/2011	12:34:02 PM	Main Vac valve opened
10/31/2011	12:34:02 PM	Helium MFC set to  20.000000
10/31/2011	12:34:02 PM	H2 MFC set to  0.000000
10/31/2011	12:34:02 PM	BCl3 MFC set to  0.000000
10/31/2011	12:34:02 PM	PHl3 MFC set to  0.000000
10/31/2011	12:34:02 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:34:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:34:02 PM	Tube furnace set to 150
10/31/2011	12:34:33 PM	Helium valve closed
10/31/2011	12:34:33 PM	H2 valve closed
10/31/2011	12:34:33 PM	BCl3 valve closed
10/31/2011	12:34:33 PM	PH3 valve closed
10/31/2011	12:34:33 PM	SiCl4 pre valve closed
10/31/2011	12:34:33 PM	SiCl4 post valve closed
10/31/2011	12:34:33 PM	Bypass valve closed
10/31/2011	12:34:33 PM	Bubbler valve closed
10/31/2011	12:34:33 PM	Main Vac valve opened
10/31/2011	12:34:33 PM	Helium MFC set to  0.000000
10/31/2011	12:34:33 PM	H2 MFC set to  0.000000
10/31/2011	12:34:33 PM	BCl3 MFC set to  0.000000
10/31/2011	12:34:33 PM	PHl3 MFC set to  0.000000
10/31/2011	12:34:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:34:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:34:33 PM	Tube furnace set to 150
10/31/2011	12:35:03 PM	H2 valve closed
10/31/2011	12:35:03 PM	BCl3 valve closed
10/31/2011	12:35:03 PM	PH3 valve closed
10/31/2011	12:35:03 PM	SiCl4 pre valve closed
10/31/2011	12:35:03 PM	SiCl4 post valve closed
10/31/2011	12:35:03 PM	Bypass valve closed
10/31/2011	12:35:03 PM	Bubbler valve closed
10/31/2011	12:35:03 PM	Helium valve opened
10/31/2011	12:35:03 PM	Main Vac valve opened
10/31/2011	12:35:03 PM	Helium MFC set to  20.000000
10/31/2011	12:35:03 PM	H2 MFC set to  0.000000
10/31/2011	12:35:03 PM	BCl3 MFC set to  0.000000
10/31/2011	12:35:03 PM	PHl3 MFC set to  0.000000
10/31/2011	12:35:03 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:35:03 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:35:03 PM	Tube furnace set to 150
10/31/2011	12:35:33 PM	Helium valve closed
10/31/2011	12:35:33 PM	H2 valve closed
10/31/2011	12:35:33 PM	BCl3 valve closed
10/31/2011	12:35:33 PM	PH3 valve closed
10/31/2011	12:35:33 PM	SiCl4 pre valve closed
10/31/2011	12:35:33 PM	SiCl4 post valve closed
10/31/2011	12:35:33 PM	Bypass valve closed
10/31/2011	12:35:33 PM	Bubbler valve closed
10/31/2011	12:35:33 PM	Main Vac valve opened
10/31/2011	12:35:33 PM	Helium MFC set to  0.000000
10/31/2011	12:35:33 PM	H2 MFC set to  0.000000
10/31/2011	12:35:33 PM	BCl3 MFC set to  0.000000
10/31/2011	12:35:33 PM	PHl3 MFC set to  0.000000
10/31/2011	12:35:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:35:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:35:33 PM	Tube furnace set to 150
10/31/2011	12:36:03 PM	H2 valve closed
10/31/2011	12:36:03 PM	BCl3 valve closed
10/31/2011	12:36:03 PM	PH3 valve closed
10/31/2011	12:36:03 PM	SiCl4 pre valve closed
10/31/2011	12:36:03 PM	SiCl4 post valve closed
10/31/2011	12:36:03 PM	Bypass valve closed
10/31/2011	12:36:03 PM	Bubbler valve closed
10/31/2011	12:36:03 PM	Helium valve opened
10/31/2011	12:36:03 PM	Main Vac valve opened
10/31/2011	12:36:03 PM	Helium MFC set to  20.000000
10/31/2011	12:36:03 PM	H2 MFC set to  0.000000
10/31/2011	12:36:03 PM	BCl3 MFC set to  0.000000
10/31/2011	12:36:03 PM	PHl3 MFC set to  0.000000
10/31/2011	12:36:03 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:36:03 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:36:03 PM	Tube furnace set to 150
10/31/2011	12:36:33 PM	Helium valve closed
10/31/2011	12:36:33 PM	H2 valve closed
10/31/2011	12:36:33 PM	BCl3 valve closed
10/31/2011	12:36:33 PM	PH3 valve closed
10/31/2011	12:36:33 PM	SiCl4 pre valve closed
10/31/2011	12:36:33 PM	SiCl4 post valve closed
10/31/2011	12:36:33 PM	Bypass valve closed
10/31/2011	12:36:33 PM	Bubbler valve closed
10/31/2011	12:36:33 PM	Main Vac valve opened
10/31/2011	12:36:33 PM	Helium MFC set to  0.000000
10/31/2011	12:36:33 PM	H2 MFC set to  0.000000
10/31/2011	12:36:33 PM	BCl3 MFC set to  0.000000
10/31/2011	12:36:33 PM	PHl3 MFC set to  0.000000
10/31/2011	12:36:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:36:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:36:34 PM	Tube furnace set to 150
10/31/2011	12:37:04 PM	H2 valve closed
10/31/2011	12:37:04 PM	BCl3 valve closed
10/31/2011	12:37:04 PM	PH3 valve closed
10/31/2011	12:37:04 PM	SiCl4 pre valve closed
10/31/2011	12:37:04 PM	SiCl4 post valve closed
10/31/2011	12:37:04 PM	Bypass valve closed
10/31/2011	12:37:04 PM	Bubbler valve closed
10/31/2011	12:37:04 PM	Helium valve opened
10/31/2011	12:37:04 PM	Main Vac valve opened
10/31/2011	12:37:04 PM	Helium MFC set to  20.000000
10/31/2011	12:37:04 PM	H2 MFC set to  0.000000
10/31/2011	12:37:04 PM	BCl3 MFC set to  0.000000
10/31/2011	12:37:04 PM	PHl3 MFC set to  0.000000
10/31/2011	12:37:04 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:37:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:37:04 PM	Tube furnace set to 150
10/31/2011	12:37:34 PM	Helium valve closed
10/31/2011	12:37:34 PM	H2 valve closed
10/31/2011	12:37:34 PM	BCl3 valve closed
10/31/2011	12:37:34 PM	PH3 valve closed
10/31/2011	12:37:34 PM	SiCl4 pre valve closed
10/31/2011	12:37:34 PM	SiCl4 post valve closed
10/31/2011	12:37:34 PM	Bypass valve closed
10/31/2011	12:37:34 PM	Bubbler valve closed
10/31/2011	12:37:34 PM	Main Vac valve opened
10/31/2011	12:37:34 PM	Helium MFC set to  0.000000
10/31/2011	12:37:34 PM	H2 MFC set to  0.000000
10/31/2011	12:37:34 PM	BCl3 MFC set to  0.000000
10/31/2011	12:37:34 PM	PHl3 MFC set to  0.000000
10/31/2011	12:37:34 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:37:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:37:34 PM	Tube furnace set to 150
10/31/2011	12:38:04 PM	H2 valve closed
10/31/2011	12:38:04 PM	BCl3 valve closed
10/31/2011	12:38:04 PM	PH3 valve closed
10/31/2011	12:38:04 PM	SiCl4 pre valve closed
10/31/2011	12:38:04 PM	SiCl4 post valve closed
10/31/2011	12:38:04 PM	Bypass valve closed
10/31/2011	12:38:04 PM	Bubbler valve closed
10/31/2011	12:38:04 PM	Helium valve opened
10/31/2011	12:38:04 PM	Main Vac valve opened
10/31/2011	12:38:04 PM	Helium MFC set to  20.000000
10/31/2011	12:38:04 PM	H2 MFC set to  0.000000
10/31/2011	12:38:04 PM	BCl3 MFC set to  0.000000
10/31/2011	12:38:04 PM	PHl3 MFC set to  0.000000
10/31/2011	12:38:04 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:38:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:38:04 PM	Tube furnace set to 150
10/31/2011	12:38:34 PM	Helium valve closed
10/31/2011	12:38:34 PM	H2 valve closed
10/31/2011	12:38:34 PM	BCl3 valve closed
10/31/2011	12:38:34 PM	PH3 valve closed
10/31/2011	12:38:34 PM	SiCl4 pre valve closed
10/31/2011	12:38:34 PM	SiCl4 post valve closed
10/31/2011	12:38:34 PM	Bypass valve closed
10/31/2011	12:38:34 PM	Bubbler valve closed
10/31/2011	12:38:34 PM	Main Vac valve opened
10/31/2011	12:38:34 PM	Helium MFC set to  0.000000
10/31/2011	12:38:34 PM	H2 MFC set to  0.000000
10/31/2011	12:38:34 PM	BCl3 MFC set to  0.000000
10/31/2011	12:38:34 PM	PHl3 MFC set to  0.000000
10/31/2011	12:38:34 PM	SiCl4 MFC set to  0.000000
10/31/2011	12:38:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	12:38:34 PM	Tube furnace set to 180
10/31/2011	12:38:39 PM	Run finished at 12:38 PM
10/31/2011	1:01:13 PM	Recipe started at 1:00 PM
10/31/2011	1:01:13 PM	Helium valve closed
10/31/2011	1:01:13 PM	H2 valve closed
10/31/2011	1:01:13 PM	BCl3 valve closed
10/31/2011	1:01:13 PM	PH3 valve closed
10/31/2011	1:01:13 PM	SiCl4 pre valve closed
10/31/2011	1:01:13 PM	SiCl4 post valve closed
10/31/2011	1:01:13 PM	Main Vac valve closed
10/31/2011	1:01:13 PM	Bubbler valve closed
10/31/2011	1:01:13 PM	Bypass valve opened
10/31/2011	1:01:13 PM	Helium MFC set to  0.000000
10/31/2011	1:01:13 PM	H2 MFC set to  0.000000
10/31/2011	1:01:13 PM	BCl3 MFC set to  0.000000
10/31/2011	1:01:13 PM	PHl3 MFC set to  0.000000
10/31/2011	1:01:13 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:01:13 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:01:13 PM	Tube furnace set to 150
10/31/2011	1:01:13 PM	Helium valve closed
10/31/2011	1:01:13 PM	H2 valve closed
10/31/2011	1:01:13 PM	BCl3 valve closed
10/31/2011	1:01:13 PM	PH3 valve closed
10/31/2011	1:01:13 PM	SiCl4 pre valve closed
10/31/2011	1:01:13 PM	SiCl4 post valve closed
10/31/2011	1:01:13 PM	Main Vac valve closed
10/31/2011	1:01:13 PM	Bubbler valve closed
10/31/2011	1:01:13 PM	Bypass valve opened
10/31/2011	1:01:13 PM	Helium MFC set to  0.000000
10/31/2011	1:01:13 PM	H2 MFC set to  0.000000
10/31/2011	1:01:13 PM	BCl3 MFC set to  0.000000
10/31/2011	1:01:14 PM	PHl3 MFC set to  0.000000
10/31/2011	1:01:14 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:01:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:01:14 PM	Tube furnace set to 150
10/31/2011	1:01:44 PM	Helium valve closed
10/31/2011	1:01:44 PM	H2 valve closed
10/31/2011	1:01:44 PM	BCl3 valve closed
10/31/2011	1:01:44 PM	PH3 valve closed
10/31/2011	1:01:44 PM	SiCl4 pre valve closed
10/31/2011	1:01:44 PM	SiCl4 post valve closed
10/31/2011	1:01:44 PM	Bypass valve closed
10/31/2011	1:01:44 PM	Bubbler valve closed
10/31/2011	1:01:44 PM	Main Vac valve opened
10/31/2011	1:01:44 PM	Helium MFC set to  0.000000
10/31/2011	1:01:44 PM	H2 MFC set to  0.000000
10/31/2011	1:01:44 PM	BCl3 MFC set to  0.000000
10/31/2011	1:01:44 PM	PHl3 MFC set to  0.000000
10/31/2011	1:01:44 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:01:44 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:01:44 PM	Tube furnace set to 150
10/31/2011	1:02:14 PM	H2 valve closed
10/31/2011	1:02:14 PM	BCl3 valve closed
10/31/2011	1:02:14 PM	PH3 valve closed
10/31/2011	1:02:14 PM	SiCl4 pre valve closed
10/31/2011	1:02:14 PM	SiCl4 post valve closed
10/31/2011	1:02:14 PM	Bypass valve closed
10/31/2011	1:02:14 PM	Bubbler valve closed
10/31/2011	1:02:14 PM	Helium valve opened
10/31/2011	1:02:14 PM	Main Vac valve opened
10/31/2011	1:02:14 PM	Helium MFC set to  20.000000
10/31/2011	1:02:14 PM	H2 MFC set to  0.000000
10/31/2011	1:02:14 PM	BCl3 MFC set to  0.000000
10/31/2011	1:02:14 PM	PHl3 MFC set to  0.000000
10/31/2011	1:02:14 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:02:14 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:02:14 PM	Tube furnace set to 150
10/31/2011	1:02:26 PM	Run aborted at 1:02 PM
10/31/2011	1:02:26 PM	Helium valve closed
10/31/2011	1:02:26 PM	H2 valve closed
10/31/2011	1:02:26 PM	BCl3 valve closed
10/31/2011	1:02:26 PM	PH3 valve closed
10/31/2011	1:02:26 PM	SiCl4 pre valve closed
10/31/2011	1:02:26 PM	SiCl4 post valve closed
10/31/2011	1:02:26 PM	Bypass valve closed
10/31/2011	1:02:26 PM	Main Vac valve closed
10/31/2011	1:02:26 PM	Bubbler valve closed
10/31/2011	1:02:26 PM	Helium MFC set to  0.000000
10/31/2011	1:02:26 PM	H2 MFC set to  0.000000
10/31/2011	1:02:26 PM	BCl3 MFC set to  0.000000
10/31/2011	1:02:26 PM	PHl3 MFC set to  0.000000
10/31/2011	1:02:26 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:02:26 PM	Tube furnace set to 0
10/31/2011	1:02:29 PM	Main Vac valve opened
10/31/2011	1:03:21 PM	Main Vac valve closed
10/31/2011	1:03:40 PM	Main Vac valve opened
10/31/2011	1:05:01 PM	Recipe started at 1:04 PM
10/31/2011	1:05:01 PM	Helium valve closed
10/31/2011	1:05:01 PM	H2 valve closed
10/31/2011	1:05:01 PM	BCl3 valve closed
10/31/2011	1:05:01 PM	PH3 valve closed
10/31/2011	1:05:01 PM	SiCl4 pre valve closed
10/31/2011	1:05:01 PM	SiCl4 post valve closed
10/31/2011	1:05:01 PM	Main Vac valve closed
10/31/2011	1:05:01 PM	Bubbler valve closed
10/31/2011	1:05:01 PM	Bypass valve opened
10/31/2011	1:05:01 PM	Helium MFC set to  0.000000
10/31/2011	1:05:01 PM	H2 MFC set to  0.000000
10/31/2011	1:05:01 PM	BCl3 MFC set to  0.000000
10/31/2011	1:05:01 PM	PHl3 MFC set to  0.000000
10/31/2011	1:05:01 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:05:01 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:05:01 PM	Tube furnace set to 150
10/31/2011	1:05:02 PM	Helium valve closed
10/31/2011	1:05:02 PM	H2 valve closed
10/31/2011	1:05:02 PM	BCl3 valve closed
10/31/2011	1:05:02 PM	PH3 valve closed
10/31/2011	1:05:02 PM	SiCl4 pre valve closed
10/31/2011	1:05:02 PM	SiCl4 post valve closed
10/31/2011	1:05:02 PM	Main Vac valve closed
10/31/2011	1:05:02 PM	Bubbler valve closed
10/31/2011	1:05:02 PM	Bypass valve opened
10/31/2011	1:05:02 PM	Helium MFC set to  0.000000
10/31/2011	1:05:02 PM	H2 MFC set to  0.000000
10/31/2011	1:05:02 PM	BCl3 MFC set to  0.000000
10/31/2011	1:05:02 PM	PHl3 MFC set to  0.000000
10/31/2011	1:05:02 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:05:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:05:02 PM	Tube furnace set to 150
10/31/2011	1:05:32 PM	Helium valve closed
10/31/2011	1:05:32 PM	H2 valve closed
10/31/2011	1:05:32 PM	BCl3 valve closed
10/31/2011	1:05:32 PM	PH3 valve closed
10/31/2011	1:05:32 PM	SiCl4 pre valve closed
10/31/2011	1:05:32 PM	SiCl4 post valve closed
10/31/2011	1:05:32 PM	Bypass valve closed
10/31/2011	1:05:32 PM	Bubbler valve closed
10/31/2011	1:05:32 PM	Main Vac valve opened
10/31/2011	1:05:32 PM	Helium MFC set to  0.000000
10/31/2011	1:05:32 PM	H2 MFC set to  0.000000
10/31/2011	1:05:32 PM	BCl3 MFC set to  0.000000
10/31/2011	1:05:32 PM	PHl3 MFC set to  0.000000
10/31/2011	1:05:32 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:05:32 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:05:32 PM	Tube furnace set to 150
10/31/2011	1:06:02 PM	H2 valve closed
10/31/2011	1:06:02 PM	BCl3 valve closed
10/31/2011	1:06:02 PM	PH3 valve closed
10/31/2011	1:06:02 PM	SiCl4 pre valve closed
10/31/2011	1:06:02 PM	SiCl4 post valve closed
10/31/2011	1:06:02 PM	Bypass valve closed
10/31/2011	1:06:02 PM	Bubbler valve closed
10/31/2011	1:06:02 PM	Helium valve opened
10/31/2011	1:06:02 PM	Main Vac valve opened
10/31/2011	1:06:02 PM	Helium MFC set to  20.000000
10/31/2011	1:06:02 PM	H2 MFC set to  0.000000
10/31/2011	1:06:02 PM	BCl3 MFC set to  0.000000
10/31/2011	1:06:02 PM	PHl3 MFC set to  0.000000
10/31/2011	1:06:02 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:06:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:06:02 PM	Tube furnace set to 150
10/31/2011	1:06:32 PM	Helium valve closed
10/31/2011	1:06:32 PM	H2 valve closed
10/31/2011	1:06:32 PM	BCl3 valve closed
10/31/2011	1:06:32 PM	PH3 valve closed
10/31/2011	1:06:32 PM	SiCl4 pre valve closed
10/31/2011	1:06:32 PM	SiCl4 post valve closed
10/31/2011	1:06:32 PM	Bypass valve closed
10/31/2011	1:06:32 PM	Bubbler valve closed
10/31/2011	1:06:32 PM	Main Vac valve opened
10/31/2011	1:06:32 PM	Helium MFC set to  0.000000
10/31/2011	1:06:32 PM	H2 MFC set to  0.000000
10/31/2011	1:06:32 PM	BCl3 MFC set to  0.000000
10/31/2011	1:06:32 PM	PHl3 MFC set to  0.000000
10/31/2011	1:06:32 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:06:32 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:06:32 PM	Tube furnace set to 150
10/31/2011	1:07:02 PM	H2 valve closed
10/31/2011	1:07:02 PM	BCl3 valve closed
10/31/2011	1:07:02 PM	PH3 valve closed
10/31/2011	1:07:02 PM	SiCl4 pre valve closed
10/31/2011	1:07:02 PM	SiCl4 post valve closed
10/31/2011	1:07:02 PM	Bypass valve closed
10/31/2011	1:07:02 PM	Bubbler valve closed
10/31/2011	1:07:02 PM	Helium valve opened
10/31/2011	1:07:02 PM	Main Vac valve opened
10/31/2011	1:07:02 PM	Helium MFC set to  20.000000
10/31/2011	1:07:02 PM	H2 MFC set to  0.000000
10/31/2011	1:07:02 PM	BCl3 MFC set to  0.000000
10/31/2011	1:07:02 PM	PHl3 MFC set to  0.000000
10/31/2011	1:07:02 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:07:02 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:07:03 PM	Tube furnace set to 150
10/31/2011	1:07:33 PM	Helium valve closed
10/31/2011	1:07:33 PM	H2 valve closed
10/31/2011	1:07:33 PM	BCl3 valve closed
10/31/2011	1:07:33 PM	PH3 valve closed
10/31/2011	1:07:33 PM	SiCl4 pre valve closed
10/31/2011	1:07:33 PM	SiCl4 post valve closed
10/31/2011	1:07:33 PM	Bypass valve closed
10/31/2011	1:07:33 PM	Bubbler valve closed
10/31/2011	1:07:33 PM	Main Vac valve opened
10/31/2011	1:07:33 PM	Helium MFC set to  0.000000
10/31/2011	1:07:33 PM	H2 MFC set to  0.000000
10/31/2011	1:07:33 PM	BCl3 MFC set to  0.000000
10/31/2011	1:07:33 PM	PHl3 MFC set to  0.000000
10/31/2011	1:07:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:07:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:07:33 PM	Tube furnace set to 150
10/31/2011	1:08:03 PM	H2 valve closed
10/31/2011	1:08:03 PM	BCl3 valve closed
10/31/2011	1:08:03 PM	PH3 valve closed
10/31/2011	1:08:03 PM	SiCl4 pre valve closed
10/31/2011	1:08:03 PM	SiCl4 post valve closed
10/31/2011	1:08:03 PM	Bypass valve closed
10/31/2011	1:08:03 PM	Bubbler valve closed
10/31/2011	1:08:03 PM	Helium valve opened
10/31/2011	1:08:03 PM	Main Vac valve opened
10/31/2011	1:08:03 PM	Helium MFC set to  20.000000
10/31/2011	1:08:03 PM	H2 MFC set to  0.000000
10/31/2011	1:08:03 PM	BCl3 MFC set to  0.000000
10/31/2011	1:08:03 PM	PHl3 MFC set to  0.000000
10/31/2011	1:08:03 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:08:03 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:08:03 PM	Tube furnace set to 150
10/31/2011	1:08:33 PM	Helium valve closed
10/31/2011	1:08:33 PM	H2 valve closed
10/31/2011	1:08:33 PM	BCl3 valve closed
10/31/2011	1:08:33 PM	PH3 valve closed
10/31/2011	1:08:33 PM	SiCl4 pre valve closed
10/31/2011	1:08:33 PM	SiCl4 post valve closed
10/31/2011	1:08:33 PM	Bypass valve closed
10/31/2011	1:08:33 PM	Bubbler valve closed
10/31/2011	1:08:33 PM	Main Vac valve opened
10/31/2011	1:08:33 PM	Helium MFC set to  0.000000
10/31/2011	1:08:33 PM	H2 MFC set to  0.000000
10/31/2011	1:08:33 PM	BCl3 MFC set to  0.000000
10/31/2011	1:08:33 PM	PHl3 MFC set to  0.000000
10/31/2011	1:08:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:08:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:08:33 PM	Tube furnace set to 150
10/31/2011	1:09:03 PM	H2 valve closed
10/31/2011	1:09:03 PM	BCl3 valve closed
10/31/2011	1:09:03 PM	PH3 valve closed
10/31/2011	1:09:03 PM	SiCl4 pre valve closed
10/31/2011	1:09:03 PM	SiCl4 post valve closed
10/31/2011	1:09:03 PM	Bypass valve closed
10/31/2011	1:09:03 PM	Bubbler valve closed
10/31/2011	1:09:03 PM	Helium valve opened
10/31/2011	1:09:03 PM	Main Vac valve opened
10/31/2011	1:09:03 PM	Helium MFC set to  20.000000
10/31/2011	1:09:03 PM	H2 MFC set to  0.000000
10/31/2011	1:09:03 PM	BCl3 MFC set to  0.000000
10/31/2011	1:09:03 PM	PHl3 MFC set to  0.000000
10/31/2011	1:09:03 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:09:03 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:09:03 PM	Tube furnace set to 150
10/31/2011	1:09:33 PM	Helium valve closed
10/31/2011	1:09:33 PM	H2 valve closed
10/31/2011	1:09:33 PM	BCl3 valve closed
10/31/2011	1:09:33 PM	PH3 valve closed
10/31/2011	1:09:33 PM	SiCl4 pre valve closed
10/31/2011	1:09:33 PM	SiCl4 post valve closed
10/31/2011	1:09:33 PM	Bypass valve closed
10/31/2011	1:09:33 PM	Bubbler valve closed
10/31/2011	1:09:33 PM	Main Vac valve opened
10/31/2011	1:09:33 PM	Helium MFC set to  0.000000
10/31/2011	1:09:33 PM	H2 MFC set to  0.000000
10/31/2011	1:09:33 PM	BCl3 MFC set to  0.000000
10/31/2011	1:09:33 PM	PHl3 MFC set to  0.000000
10/31/2011	1:09:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:09:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:09:34 PM	Tube furnace set to 150
10/31/2011	1:10:04 PM	H2 valve closed
10/31/2011	1:10:04 PM	BCl3 valve closed
10/31/2011	1:10:04 PM	PH3 valve closed
10/31/2011	1:10:04 PM	SiCl4 pre valve closed
10/31/2011	1:10:04 PM	SiCl4 post valve closed
10/31/2011	1:10:04 PM	Bypass valve closed
10/31/2011	1:10:04 PM	Bubbler valve closed
10/31/2011	1:10:04 PM	Helium valve opened
10/31/2011	1:10:04 PM	Main Vac valve opened
10/31/2011	1:10:04 PM	Helium MFC set to  20.000000
10/31/2011	1:10:04 PM	H2 MFC set to  0.000000
10/31/2011	1:10:04 PM	BCl3 MFC set to  0.000000
10/31/2011	1:10:04 PM	PHl3 MFC set to  0.000000
10/31/2011	1:10:04 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:10:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:10:04 PM	Tube furnace set to 150
10/31/2011	1:10:34 PM	Helium valve closed
10/31/2011	1:10:34 PM	H2 valve closed
10/31/2011	1:10:34 PM	BCl3 valve closed
10/31/2011	1:10:34 PM	PH3 valve closed
10/31/2011	1:10:34 PM	SiCl4 pre valve closed
10/31/2011	1:10:34 PM	SiCl4 post valve closed
10/31/2011	1:10:34 PM	Bypass valve closed
10/31/2011	1:10:34 PM	Bubbler valve closed
10/31/2011	1:10:34 PM	Main Vac valve opened
10/31/2011	1:10:34 PM	Helium MFC set to  0.000000
10/31/2011	1:10:34 PM	H2 MFC set to  0.000000
10/31/2011	1:10:34 PM	BCl3 MFC set to  0.000000
10/31/2011	1:10:34 PM	PHl3 MFC set to  0.000000
10/31/2011	1:10:34 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:10:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:10:34 PM	Tube furnace set to 150
10/31/2011	1:11:04 PM	H2 valve closed
10/31/2011	1:11:04 PM	BCl3 valve closed
10/31/2011	1:11:04 PM	PH3 valve closed
10/31/2011	1:11:04 PM	SiCl4 pre valve closed
10/31/2011	1:11:04 PM	SiCl4 post valve closed
10/31/2011	1:11:04 PM	Bypass valve closed
10/31/2011	1:11:04 PM	Bubbler valve closed
10/31/2011	1:11:04 PM	Helium valve opened
10/31/2011	1:11:04 PM	Main Vac valve opened
10/31/2011	1:11:04 PM	Helium MFC set to  20.000000
10/31/2011	1:11:04 PM	H2 MFC set to  0.000000
10/31/2011	1:11:04 PM	BCl3 MFC set to  0.000000
10/31/2011	1:11:04 PM	PHl3 MFC set to  0.000000
10/31/2011	1:11:04 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:11:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:11:04 PM	Tube furnace set to 150
10/31/2011	1:11:34 PM	Helium valve closed
10/31/2011	1:11:34 PM	H2 valve closed
10/31/2011	1:11:34 PM	BCl3 valve closed
10/31/2011	1:11:34 PM	PH3 valve closed
10/31/2011	1:11:34 PM	SiCl4 pre valve closed
10/31/2011	1:11:34 PM	SiCl4 post valve closed
10/31/2011	1:11:34 PM	Bypass valve closed
10/31/2011	1:11:34 PM	Bubbler valve closed
10/31/2011	1:11:34 PM	Main Vac valve opened
10/31/2011	1:11:34 PM	Helium MFC set to  0.000000
10/31/2011	1:11:34 PM	H2 MFC set to  0.000000
10/31/2011	1:11:34 PM	BCl3 MFC set to  0.000000
10/31/2011	1:11:34 PM	PHl3 MFC set to  0.000000
10/31/2011	1:11:34 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:11:34 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:11:34 PM	Tube furnace set to 150
10/31/2011	1:12:04 PM	H2 valve closed
10/31/2011	1:12:04 PM	BCl3 valve closed
10/31/2011	1:12:04 PM	PH3 valve closed
10/31/2011	1:12:04 PM	SiCl4 pre valve closed
10/31/2011	1:12:04 PM	SiCl4 post valve closed
10/31/2011	1:12:04 PM	Bypass valve closed
10/31/2011	1:12:04 PM	Bubbler valve closed
10/31/2011	1:12:04 PM	Helium valve opened
10/31/2011	1:12:04 PM	Main Vac valve opened
10/31/2011	1:12:04 PM	Helium MFC set to  20.000000
10/31/2011	1:12:04 PM	H2 MFC set to  0.000000
10/31/2011	1:12:04 PM	BCl3 MFC set to  0.000000
10/31/2011	1:12:04 PM	PHl3 MFC set to  0.000000
10/31/2011	1:12:04 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:12:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:12:05 PM	Tube furnace set to 150
10/31/2011	1:12:35 PM	Helium valve closed
10/31/2011	1:12:35 PM	H2 valve closed
10/31/2011	1:12:35 PM	BCl3 valve closed
10/31/2011	1:12:35 PM	PH3 valve closed
10/31/2011	1:12:35 PM	SiCl4 pre valve closed
10/31/2011	1:12:35 PM	SiCl4 post valve closed
10/31/2011	1:12:35 PM	Bypass valve closed
10/31/2011	1:12:35 PM	Bubbler valve closed
10/31/2011	1:12:35 PM	Main Vac valve opened
10/31/2011	1:12:35 PM	Helium MFC set to  0.000000
10/31/2011	1:12:35 PM	H2 MFC set to  0.000000
10/31/2011	1:12:35 PM	BCl3 MFC set to  0.000000
10/31/2011	1:12:35 PM	PHl3 MFC set to  0.000000
10/31/2011	1:12:35 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:12:35 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:12:35 PM	Tube furnace set to 150
10/31/2011	1:13:05 PM	H2 valve closed
10/31/2011	1:13:05 PM	BCl3 valve closed
10/31/2011	1:13:05 PM	PH3 valve closed
10/31/2011	1:13:05 PM	SiCl4 pre valve closed
10/31/2011	1:13:05 PM	SiCl4 post valve closed
10/31/2011	1:13:05 PM	Bypass valve closed
10/31/2011	1:13:05 PM	Bubbler valve closed
10/31/2011	1:13:05 PM	Helium valve opened
10/31/2011	1:13:05 PM	Main Vac valve opened
10/31/2011	1:13:05 PM	Helium MFC set to  20.000000
10/31/2011	1:13:05 PM	H2 MFC set to  0.000000
10/31/2011	1:13:05 PM	BCl3 MFC set to  0.000000
10/31/2011	1:13:05 PM	PHl3 MFC set to  0.000000
10/31/2011	1:13:05 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:13:05 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:13:05 PM	Tube furnace set to 150
10/31/2011	1:13:35 PM	Helium valve closed
10/31/2011	1:13:35 PM	H2 valve closed
10/31/2011	1:13:35 PM	BCl3 valve closed
10/31/2011	1:13:35 PM	PH3 valve closed
10/31/2011	1:13:35 PM	SiCl4 pre valve closed
10/31/2011	1:13:35 PM	SiCl4 post valve closed
10/31/2011	1:13:35 PM	Bypass valve closed
10/31/2011	1:13:35 PM	Bubbler valve closed
10/31/2011	1:13:35 PM	Main Vac valve opened
10/31/2011	1:13:35 PM	Helium MFC set to  0.000000
10/31/2011	1:13:35 PM	H2 MFC set to  0.000000
10/31/2011	1:13:35 PM	BCl3 MFC set to  0.000000
10/31/2011	1:13:35 PM	PHl3 MFC set to  0.000000
10/31/2011	1:13:35 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:13:35 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:13:35 PM	Tube furnace set to 150
10/31/2011	1:14:05 PM	H2 valve closed
10/31/2011	1:14:05 PM	BCl3 valve closed
10/31/2011	1:14:05 PM	PH3 valve closed
10/31/2011	1:14:05 PM	SiCl4 pre valve closed
10/31/2011	1:14:05 PM	SiCl4 post valve closed
10/31/2011	1:14:05 PM	Bypass valve closed
10/31/2011	1:14:05 PM	Bubbler valve closed
10/31/2011	1:14:05 PM	Helium valve opened
10/31/2011	1:14:05 PM	Main Vac valve opened
10/31/2011	1:14:05 PM	Helium MFC set to  20.000000
10/31/2011	1:14:05 PM	H2 MFC set to  0.000000
10/31/2011	1:14:05 PM	BCl3 MFC set to  0.000000
10/31/2011	1:14:05 PM	PHl3 MFC set to  0.000000
10/31/2011	1:14:05 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:14:05 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:14:05 PM	Tube furnace set to 150
10/31/2011	1:14:35 PM	Helium valve closed
10/31/2011	1:14:35 PM	H2 valve closed
10/31/2011	1:14:35 PM	BCl3 valve closed
10/31/2011	1:14:35 PM	PH3 valve closed
10/31/2011	1:14:35 PM	SiCl4 pre valve closed
10/31/2011	1:14:35 PM	SiCl4 post valve closed
10/31/2011	1:14:35 PM	Bypass valve closed
10/31/2011	1:14:35 PM	Bubbler valve closed
10/31/2011	1:14:35 PM	Main Vac valve opened
10/31/2011	1:14:35 PM	Helium MFC set to  0.000000
10/31/2011	1:14:35 PM	H2 MFC set to  0.000000
10/31/2011	1:14:35 PM	BCl3 MFC set to  0.000000
10/31/2011	1:14:35 PM	PHl3 MFC set to  0.000000
10/31/2011	1:14:35 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:14:35 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:14:36 PM	Tube furnace set to 150
10/31/2011	1:15:06 PM	H2 valve closed
10/31/2011	1:15:06 PM	BCl3 valve closed
10/31/2011	1:15:06 PM	PH3 valve closed
10/31/2011	1:15:06 PM	SiCl4 pre valve closed
10/31/2011	1:15:06 PM	SiCl4 post valve closed
10/31/2011	1:15:06 PM	Bypass valve closed
10/31/2011	1:15:06 PM	Bubbler valve closed
10/31/2011	1:15:06 PM	Helium valve opened
10/31/2011	1:15:06 PM	Main Vac valve opened
10/31/2011	1:15:06 PM	Helium MFC set to  20.000000
10/31/2011	1:15:06 PM	H2 MFC set to  0.000000
10/31/2011	1:15:06 PM	BCl3 MFC set to  0.000000
10/31/2011	1:15:06 PM	PHl3 MFC set to  0.000000
10/31/2011	1:15:06 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:15:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:15:06 PM	Tube furnace set to 150
10/31/2011	1:15:36 PM	Helium valve closed
10/31/2011	1:15:36 PM	H2 valve closed
10/31/2011	1:15:36 PM	BCl3 valve closed
10/31/2011	1:15:36 PM	PH3 valve closed
10/31/2011	1:15:36 PM	SiCl4 pre valve closed
10/31/2011	1:15:36 PM	SiCl4 post valve closed
10/31/2011	1:15:36 PM	Bypass valve closed
10/31/2011	1:15:36 PM	Bubbler valve closed
10/31/2011	1:15:36 PM	Main Vac valve opened
10/31/2011	1:15:36 PM	Helium MFC set to  0.000000
10/31/2011	1:15:36 PM	H2 MFC set to  0.000000
10/31/2011	1:15:36 PM	BCl3 MFC set to  0.000000
10/31/2011	1:15:36 PM	PHl3 MFC set to  0.000000
10/31/2011	1:15:36 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:15:36 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:15:36 PM	Tube furnace set to 150
10/31/2011	1:16:06 PM	H2 valve closed
10/31/2011	1:16:06 PM	BCl3 valve closed
10/31/2011	1:16:06 PM	PH3 valve closed
10/31/2011	1:16:06 PM	SiCl4 pre valve closed
10/31/2011	1:16:06 PM	SiCl4 post valve closed
10/31/2011	1:16:06 PM	Bypass valve closed
10/31/2011	1:16:06 PM	Bubbler valve closed
10/31/2011	1:16:06 PM	Helium valve opened
10/31/2011	1:16:06 PM	Main Vac valve opened
10/31/2011	1:16:06 PM	Helium MFC set to  20.000000
10/31/2011	1:16:06 PM	H2 MFC set to  0.000000
10/31/2011	1:16:06 PM	BCl3 MFC set to  0.000000
10/31/2011	1:16:06 PM	PHl3 MFC set to  0.000000
10/31/2011	1:16:06 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:16:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:16:06 PM	Tube furnace set to 150
10/31/2011	1:16:36 PM	Helium valve closed
10/31/2011	1:16:36 PM	H2 valve closed
10/31/2011	1:16:36 PM	BCl3 valve closed
10/31/2011	1:16:36 PM	PH3 valve closed
10/31/2011	1:16:36 PM	SiCl4 pre valve closed
10/31/2011	1:16:36 PM	SiCl4 post valve closed
10/31/2011	1:16:36 PM	Bypass valve closed
10/31/2011	1:16:36 PM	Bubbler valve closed
10/31/2011	1:16:36 PM	Main Vac valve opened
10/31/2011	1:16:36 PM	Helium MFC set to  0.000000
10/31/2011	1:16:36 PM	H2 MFC set to  0.000000
10/31/2011	1:16:36 PM	BCl3 MFC set to  0.000000
10/31/2011	1:16:36 PM	PHl3 MFC set to  0.000000
10/31/2011	1:16:36 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:16:36 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:16:36 PM	Tube furnace set to 150
10/31/2011	1:17:06 PM	H2 valve closed
10/31/2011	1:17:06 PM	BCl3 valve closed
10/31/2011	1:17:06 PM	PH3 valve closed
10/31/2011	1:17:06 PM	SiCl4 pre valve closed
10/31/2011	1:17:06 PM	SiCl4 post valve closed
10/31/2011	1:17:06 PM	Bypass valve closed
10/31/2011	1:17:06 PM	Bubbler valve closed
10/31/2011	1:17:06 PM	Helium valve opened
10/31/2011	1:17:06 PM	Main Vac valve opened
10/31/2011	1:17:06 PM	Helium MFC set to  20.000000
10/31/2011	1:17:06 PM	H2 MFC set to  0.000000
10/31/2011	1:17:06 PM	BCl3 MFC set to  0.000000
10/31/2011	1:17:06 PM	PHl3 MFC set to  0.000000
10/31/2011	1:17:06 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:17:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:17:07 PM	Tube furnace set to 150
10/31/2011	1:17:37 PM	Helium valve closed
10/31/2011	1:17:37 PM	H2 valve closed
10/31/2011	1:17:37 PM	BCl3 valve closed
10/31/2011	1:17:37 PM	PH3 valve closed
10/31/2011	1:17:37 PM	SiCl4 pre valve closed
10/31/2011	1:17:37 PM	SiCl4 post valve closed
10/31/2011	1:17:37 PM	Bypass valve closed
10/31/2011	1:17:37 PM	Bubbler valve closed
10/31/2011	1:17:37 PM	Main Vac valve opened
10/31/2011	1:17:37 PM	Helium MFC set to  0.000000
10/31/2011	1:17:37 PM	H2 MFC set to  0.000000
10/31/2011	1:17:37 PM	BCl3 MFC set to  0.000000
10/31/2011	1:17:37 PM	PHl3 MFC set to  0.000000
10/31/2011	1:17:37 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:17:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:17:37 PM	Tube furnace set to 150
10/31/2011	1:18:07 PM	H2 valve closed
10/31/2011	1:18:07 PM	BCl3 valve closed
10/31/2011	1:18:07 PM	PH3 valve closed
10/31/2011	1:18:07 PM	SiCl4 pre valve closed
10/31/2011	1:18:07 PM	SiCl4 post valve closed
10/31/2011	1:18:07 PM	Bypass valve closed
10/31/2011	1:18:07 PM	Bubbler valve closed
10/31/2011	1:18:07 PM	Helium valve opened
10/31/2011	1:18:07 PM	Main Vac valve opened
10/31/2011	1:18:07 PM	Helium MFC set to  20.000000
10/31/2011	1:18:07 PM	H2 MFC set to  0.000000
10/31/2011	1:18:07 PM	BCl3 MFC set to  0.000000
10/31/2011	1:18:07 PM	PHl3 MFC set to  0.000000
10/31/2011	1:18:07 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:18:07 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:18:07 PM	Tube furnace set to 150
10/31/2011	1:18:37 PM	Helium valve closed
10/31/2011	1:18:37 PM	H2 valve closed
10/31/2011	1:18:37 PM	BCl3 valve closed
10/31/2011	1:18:37 PM	PH3 valve closed
10/31/2011	1:18:37 PM	SiCl4 pre valve closed
10/31/2011	1:18:37 PM	SiCl4 post valve closed
10/31/2011	1:18:37 PM	Bypass valve closed
10/31/2011	1:18:37 PM	Bubbler valve closed
10/31/2011	1:18:37 PM	Main Vac valve opened
10/31/2011	1:18:37 PM	Helium MFC set to  0.000000
10/31/2011	1:18:37 PM	H2 MFC set to  0.000000
10/31/2011	1:18:37 PM	BCl3 MFC set to  0.000000
10/31/2011	1:18:37 PM	PHl3 MFC set to  0.000000
10/31/2011	1:18:37 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:18:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:18:37 PM	Tube furnace set to 150
10/31/2011	1:19:07 PM	H2 valve closed
10/31/2011	1:19:07 PM	BCl3 valve closed
10/31/2011	1:19:07 PM	PH3 valve closed
10/31/2011	1:19:07 PM	SiCl4 pre valve closed
10/31/2011	1:19:07 PM	SiCl4 post valve closed
10/31/2011	1:19:07 PM	Bypass valve closed
10/31/2011	1:19:07 PM	Bubbler valve closed
10/31/2011	1:19:07 PM	Helium valve opened
10/31/2011	1:19:07 PM	Main Vac valve opened
10/31/2011	1:19:07 PM	Helium MFC set to  20.000000
10/31/2011	1:19:07 PM	H2 MFC set to  0.000000
10/31/2011	1:19:07 PM	BCl3 MFC set to  0.000000
10/31/2011	1:19:07 PM	PHl3 MFC set to  0.000000
10/31/2011	1:19:07 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:19:07 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:19:07 PM	Tube furnace set to 150
10/31/2011	1:19:37 PM	Helium valve closed
10/31/2011	1:19:37 PM	H2 valve closed
10/31/2011	1:19:37 PM	BCl3 valve closed
10/31/2011	1:19:37 PM	PH3 valve closed
10/31/2011	1:19:37 PM	SiCl4 pre valve closed
10/31/2011	1:19:37 PM	SiCl4 post valve closed
10/31/2011	1:19:37 PM	Bypass valve closed
10/31/2011	1:19:37 PM	Bubbler valve closed
10/31/2011	1:19:37 PM	Main Vac valve opened
10/31/2011	1:19:37 PM	Helium MFC set to  0.000000
10/31/2011	1:19:37 PM	H2 MFC set to  0.000000
10/31/2011	1:19:38 PM	BCl3 MFC set to  0.000000
10/31/2011	1:19:38 PM	PHl3 MFC set to  0.000000
10/31/2011	1:19:38 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:19:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:19:38 PM	Tube furnace set to 150
10/31/2011	1:20:08 PM	H2 valve closed
10/31/2011	1:20:08 PM	BCl3 valve closed
10/31/2011	1:20:08 PM	PH3 valve closed
10/31/2011	1:20:08 PM	SiCl4 pre valve closed
10/31/2011	1:20:08 PM	SiCl4 post valve closed
10/31/2011	1:20:08 PM	Bypass valve closed
10/31/2011	1:20:08 PM	Bubbler valve closed
10/31/2011	1:20:08 PM	Helium valve opened
10/31/2011	1:20:08 PM	Main Vac valve opened
10/31/2011	1:20:08 PM	Helium MFC set to  20.000000
10/31/2011	1:20:08 PM	H2 MFC set to  0.000000
10/31/2011	1:20:08 PM	BCl3 MFC set to  0.000000
10/31/2011	1:20:08 PM	PHl3 MFC set to  0.000000
10/31/2011	1:20:08 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:20:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:20:08 PM	Tube furnace set to 150
10/31/2011	1:20:38 PM	Helium valve closed
10/31/2011	1:20:38 PM	H2 valve closed
10/31/2011	1:20:38 PM	BCl3 valve closed
10/31/2011	1:20:38 PM	PH3 valve closed
10/31/2011	1:20:38 PM	SiCl4 pre valve closed
10/31/2011	1:20:38 PM	SiCl4 post valve closed
10/31/2011	1:20:38 PM	Bypass valve closed
10/31/2011	1:20:38 PM	Bubbler valve closed
10/31/2011	1:20:38 PM	Main Vac valve opened
10/31/2011	1:20:38 PM	Helium MFC set to  0.000000
10/31/2011	1:20:38 PM	H2 MFC set to  0.000000
10/31/2011	1:20:38 PM	BCl3 MFC set to  0.000000
10/31/2011	1:20:38 PM	PHl3 MFC set to  0.000000
10/31/2011	1:20:38 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:20:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:20:38 PM	Tube furnace set to 150
10/31/2011	1:21:08 PM	H2 valve closed
10/31/2011	1:21:08 PM	BCl3 valve closed
10/31/2011	1:21:08 PM	PH3 valve closed
10/31/2011	1:21:08 PM	SiCl4 pre valve closed
10/31/2011	1:21:08 PM	SiCl4 post valve closed
10/31/2011	1:21:08 PM	Bypass valve closed
10/31/2011	1:21:08 PM	Bubbler valve closed
10/31/2011	1:21:08 PM	Helium valve opened
10/31/2011	1:21:08 PM	Main Vac valve opened
10/31/2011	1:21:08 PM	Helium MFC set to  20.000000
10/31/2011	1:21:08 PM	H2 MFC set to  0.000000
10/31/2011	1:21:08 PM	BCl3 MFC set to  0.000000
10/31/2011	1:21:08 PM	PHl3 MFC set to  0.000000
10/31/2011	1:21:08 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:21:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:21:08 PM	Tube furnace set to 150
10/31/2011	1:21:38 PM	Helium valve closed
10/31/2011	1:21:38 PM	H2 valve closed
10/31/2011	1:21:38 PM	BCl3 valve closed
10/31/2011	1:21:38 PM	PH3 valve closed
10/31/2011	1:21:38 PM	SiCl4 pre valve closed
10/31/2011	1:21:38 PM	SiCl4 post valve closed
10/31/2011	1:21:38 PM	Bypass valve closed
10/31/2011	1:21:38 PM	Bubbler valve closed
10/31/2011	1:21:38 PM	Main Vac valve opened
10/31/2011	1:21:38 PM	Helium MFC set to  0.000000
10/31/2011	1:21:38 PM	H2 MFC set to  0.000000
10/31/2011	1:21:38 PM	BCl3 MFC set to  0.000000
10/31/2011	1:21:38 PM	PHl3 MFC set to  0.000000
10/31/2011	1:21:38 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:21:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:21:39 PM	Tube furnace set to 150
10/31/2011	1:22:09 PM	H2 valve closed
10/31/2011	1:22:09 PM	BCl3 valve closed
10/31/2011	1:22:09 PM	PH3 valve closed
10/31/2011	1:22:09 PM	SiCl4 pre valve closed
10/31/2011	1:22:09 PM	SiCl4 post valve closed
10/31/2011	1:22:09 PM	Bypass valve closed
10/31/2011	1:22:09 PM	Bubbler valve closed
10/31/2011	1:22:09 PM	Helium valve opened
10/31/2011	1:22:09 PM	Main Vac valve opened
10/31/2011	1:22:09 PM	Helium MFC set to  20.000000
10/31/2011	1:22:09 PM	H2 MFC set to  0.000000
10/31/2011	1:22:09 PM	BCl3 MFC set to  0.000000
10/31/2011	1:22:09 PM	PHl3 MFC set to  0.000000
10/31/2011	1:22:09 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:22:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:22:09 PM	Tube furnace set to 150
10/31/2011	1:22:39 PM	Helium valve closed
10/31/2011	1:22:39 PM	H2 valve closed
10/31/2011	1:22:39 PM	BCl3 valve closed
10/31/2011	1:22:39 PM	PH3 valve closed
10/31/2011	1:22:39 PM	SiCl4 pre valve closed
10/31/2011	1:22:39 PM	SiCl4 post valve closed
10/31/2011	1:22:39 PM	Bypass valve closed
10/31/2011	1:22:39 PM	Bubbler valve closed
10/31/2011	1:22:39 PM	Main Vac valve opened
10/31/2011	1:22:39 PM	Helium MFC set to  0.000000
10/31/2011	1:22:39 PM	H2 MFC set to  0.000000
10/31/2011	1:22:39 PM	BCl3 MFC set to  0.000000
10/31/2011	1:22:39 PM	PHl3 MFC set to  0.000000
10/31/2011	1:22:39 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:22:39 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:22:39 PM	Tube furnace set to 150
10/31/2011	1:23:09 PM	H2 valve closed
10/31/2011	1:23:09 PM	BCl3 valve closed
10/31/2011	1:23:09 PM	PH3 valve closed
10/31/2011	1:23:09 PM	SiCl4 pre valve closed
10/31/2011	1:23:09 PM	SiCl4 post valve closed
10/31/2011	1:23:09 PM	Bypass valve closed
10/31/2011	1:23:09 PM	Bubbler valve closed
10/31/2011	1:23:09 PM	Helium valve opened
10/31/2011	1:23:09 PM	Main Vac valve opened
10/31/2011	1:23:09 PM	Helium MFC set to  20.000000
10/31/2011	1:23:09 PM	H2 MFC set to  0.000000
10/31/2011	1:23:09 PM	BCl3 MFC set to  0.000000
10/31/2011	1:23:09 PM	PHl3 MFC set to  0.000000
10/31/2011	1:23:09 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:23:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:23:09 PM	Tube furnace set to 150
10/31/2011	1:23:39 PM	Helium valve closed
10/31/2011	1:23:39 PM	H2 valve closed
10/31/2011	1:23:39 PM	BCl3 valve closed
10/31/2011	1:23:39 PM	PH3 valve closed
10/31/2011	1:23:39 PM	SiCl4 pre valve closed
10/31/2011	1:23:39 PM	SiCl4 post valve closed
10/31/2011	1:23:39 PM	Bypass valve closed
10/31/2011	1:23:39 PM	Bubbler valve closed
10/31/2011	1:23:39 PM	Main Vac valve opened
10/31/2011	1:23:39 PM	Helium MFC set to  0.000000
10/31/2011	1:23:39 PM	H2 MFC set to  0.000000
10/31/2011	1:23:39 PM	BCl3 MFC set to  0.000000
10/31/2011	1:23:39 PM	PHl3 MFC set to  0.000000
10/31/2011	1:23:39 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:23:39 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:23:39 PM	Tube furnace set to 150
10/31/2011	1:24:09 PM	H2 valve closed
10/31/2011	1:24:09 PM	BCl3 valve closed
10/31/2011	1:24:09 PM	PH3 valve closed
10/31/2011	1:24:09 PM	SiCl4 pre valve closed
10/31/2011	1:24:09 PM	SiCl4 post valve closed
10/31/2011	1:24:09 PM	Bypass valve closed
10/31/2011	1:24:09 PM	Bubbler valve closed
10/31/2011	1:24:09 PM	Helium valve opened
10/31/2011	1:24:09 PM	Main Vac valve opened
10/31/2011	1:24:09 PM	Helium MFC set to  20.000000
10/31/2011	1:24:09 PM	H2 MFC set to  0.000000
10/31/2011	1:24:09 PM	BCl3 MFC set to  0.000000
10/31/2011	1:24:09 PM	PHl3 MFC set to  0.000000
10/31/2011	1:24:09 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:24:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:24:10 PM	Tube furnace set to 150
10/31/2011	1:24:40 PM	Helium valve closed
10/31/2011	1:24:40 PM	H2 valve closed
10/31/2011	1:24:40 PM	BCl3 valve closed
10/31/2011	1:24:40 PM	PH3 valve closed
10/31/2011	1:24:40 PM	SiCl4 pre valve closed
10/31/2011	1:24:40 PM	SiCl4 post valve closed
10/31/2011	1:24:40 PM	Bypass valve closed
10/31/2011	1:24:40 PM	Bubbler valve closed
10/31/2011	1:24:40 PM	Main Vac valve opened
10/31/2011	1:24:40 PM	Helium MFC set to  0.000000
10/31/2011	1:24:40 PM	H2 MFC set to  0.000000
10/31/2011	1:24:40 PM	BCl3 MFC set to  0.000000
10/31/2011	1:24:40 PM	PHl3 MFC set to  0.000000
10/31/2011	1:24:40 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:24:40 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:24:40 PM	Tube furnace set to 150
10/31/2011	1:25:10 PM	H2 valve closed
10/31/2011	1:25:10 PM	BCl3 valve closed
10/31/2011	1:25:10 PM	PH3 valve closed
10/31/2011	1:25:10 PM	SiCl4 pre valve closed
10/31/2011	1:25:10 PM	SiCl4 post valve closed
10/31/2011	1:25:10 PM	Bypass valve closed
10/31/2011	1:25:10 PM	Bubbler valve closed
10/31/2011	1:25:10 PM	Helium valve opened
10/31/2011	1:25:10 PM	Main Vac valve opened
10/31/2011	1:25:10 PM	Helium MFC set to  20.000000
10/31/2011	1:25:10 PM	H2 MFC set to  0.000000
10/31/2011	1:25:10 PM	BCl3 MFC set to  0.000000
10/31/2011	1:25:10 PM	PHl3 MFC set to  0.000000
10/31/2011	1:25:10 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:25:10 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:25:10 PM	Tube furnace set to 150
10/31/2011	1:25:40 PM	Helium valve closed
10/31/2011	1:25:40 PM	H2 valve closed
10/31/2011	1:25:40 PM	BCl3 valve closed
10/31/2011	1:25:40 PM	PH3 valve closed
10/31/2011	1:25:40 PM	SiCl4 pre valve closed
10/31/2011	1:25:40 PM	SiCl4 post valve closed
10/31/2011	1:25:40 PM	Bypass valve closed
10/31/2011	1:25:40 PM	Bubbler valve closed
10/31/2011	1:25:40 PM	Main Vac valve opened
10/31/2011	1:25:40 PM	Helium MFC set to  0.000000
10/31/2011	1:25:40 PM	H2 MFC set to  0.000000
10/31/2011	1:25:40 PM	BCl3 MFC set to  0.000000
10/31/2011	1:25:40 PM	PHl3 MFC set to  0.000000
10/31/2011	1:25:40 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:25:40 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:25:40 PM	Tube furnace set to 180
10/31/2011	1:25:45 PM	Run finished at 1:25 PM
10/31/2011	1:28:36 PM	Main Vac valve closed
10/31/2011	1:28:50 PM	Main Vac valve opened
10/31/2011	1:57:29 PM	Main Vac valve closed
10/31/2011	1:57:45 PM	Main Vac valve opened
10/31/2011	1:57:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	1:57:54 PM	Recipe started at 1:57 PM
10/31/2011	1:57:54 PM	Helium valve closed
10/31/2011	1:57:54 PM	H2 valve closed
10/31/2011	1:57:54 PM	BCl3 valve closed
10/31/2011	1:57:54 PM	PH3 valve closed
10/31/2011	1:57:54 PM	SiCl4 pre valve closed
10/31/2011	1:57:54 PM	SiCl4 post valve closed
10/31/2011	1:57:54 PM	Main Vac valve closed
10/31/2011	1:57:54 PM	Bypass valve closed
10/31/2011	1:57:54 PM	Bubbler valve closed
10/31/2011	1:57:54 PM	Helium MFC set to  0.000000
10/31/2011	1:57:54 PM	H2 MFC set to  0.000000
10/31/2011	1:57:54 PM	BCl3 MFC set to  0.000000
10/31/2011	1:57:54 PM	PHl3 MFC set to  0.000000
10/31/2011	1:57:54 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:57:54 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:57:55 PM	Tube furnace set to 0
10/31/2011	1:57:58 PM	H2 valve closed
10/31/2011	1:57:58 PM	BCl3 valve closed
10/31/2011	1:57:58 PM	PH3 valve closed
10/31/2011	1:57:58 PM	SiCl4 pre valve closed
10/31/2011	1:57:58 PM	SiCl4 post valve closed
10/31/2011	1:57:58 PM	Main Vac valve closed
10/31/2011	1:57:58 PM	Bypass valve closed
10/31/2011	1:57:58 PM	Bubbler valve closed
10/31/2011	1:57:58 PM	Helium valve opened
10/31/2011	1:57:58 PM	Helium MFC set to  500.000000
10/31/2011	1:57:58 PM	H2 MFC set to  0.000000
10/31/2011	1:57:58 PM	BCl3 MFC set to  0.000000
10/31/2011	1:57:58 PM	PHl3 MFC set to  0.000000
10/31/2011	1:57:58 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:57:58 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:57:58 PM	Tube furnace set to 0
10/31/2011	1:59:00 PM	Helium valve closed
10/31/2011	1:59:00 PM	H2 valve closed
10/31/2011	1:59:00 PM	BCl3 valve closed
10/31/2011	1:59:00 PM	PH3 valve closed
10/31/2011	1:59:00 PM	SiCl4 pre valve closed
10/31/2011	1:59:00 PM	SiCl4 post valve closed
10/31/2011	1:59:00 PM	Main Vac valve closed
10/31/2011	1:59:00 PM	Bypass valve closed
10/31/2011	1:59:00 PM	Bubbler valve closed
10/31/2011	1:59:00 PM	Helium MFC set to  0.000000
10/31/2011	1:59:00 PM	H2 MFC set to  0.000000
10/31/2011	1:59:00 PM	BCl3 MFC set to  0.000000
10/31/2011	1:59:00 PM	PHl3 MFC set to  0.000000
10/31/2011	1:59:00 PM	SiCl4 MFC set to  0.000000
10/31/2011	1:59:00 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	1:59:00 PM	Tube furnace set to 0
10/31/2011	1:59:01 PM	Run finished at 1:59 PM
10/31/2011	1:59:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	2:01:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	2:01:04 PM	Recipe started at 2:01 PM
10/31/2011	2:01:04 PM	Helium valve closed
10/31/2011	2:01:04 PM	H2 valve closed
10/31/2011	2:01:04 PM	BCl3 valve closed
10/31/2011	2:01:04 PM	PH3 valve closed
10/31/2011	2:01:04 PM	SiCl4 pre valve closed
10/31/2011	2:01:04 PM	SiCl4 post valve closed
10/31/2011	2:01:04 PM	Main Vac valve closed
10/31/2011	2:01:04 PM	Bubbler valve closed
10/31/2011	2:01:04 PM	Bypass valve opened
10/31/2011	2:01:04 PM	Helium MFC set to  0.000000
10/31/2011	2:01:04 PM	H2 MFC set to  0.000000
10/31/2011	2:01:04 PM	BCl3 MFC set to  0.000000
10/31/2011	2:01:04 PM	PHl3 MFC set to  0.000000
10/31/2011	2:01:04 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:01:04 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:01:04 PM	Tube furnace set to 0
10/31/2011	2:02:06 PM	Helium valve closed
10/31/2011	2:02:06 PM	H2 valve closed
10/31/2011	2:02:06 PM	BCl3 valve closed
10/31/2011	2:02:06 PM	PH3 valve closed
10/31/2011	2:02:06 PM	SiCl4 pre valve closed
10/31/2011	2:02:06 PM	SiCl4 post valve closed
10/31/2011	2:02:06 PM	Main Vac valve closed
10/31/2011	2:02:06 PM	Bubbler valve closed
10/31/2011	2:02:06 PM	Bypass valve opened
10/31/2011	2:02:06 PM	Helium MFC set to  0.000000
10/31/2011	2:02:06 PM	H2 MFC set to  0.000000
10/31/2011	2:02:06 PM	BCl3 MFC set to  0.000000
10/31/2011	2:02:06 PM	PHl3 MFC set to  0.000000
10/31/2011	2:02:06 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:02:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:02:06 PM	Tube furnace set to 0
10/31/2011	2:02:50 PM	Helium valve closed
10/31/2011	2:02:50 PM	H2 valve closed
10/31/2011	2:02:50 PM	BCl3 valve closed
10/31/2011	2:02:50 PM	PH3 valve closed
10/31/2011	2:02:50 PM	SiCl4 pre valve closed
10/31/2011	2:02:50 PM	SiCl4 post valve closed
10/31/2011	2:02:50 PM	Bypass valve closed
10/31/2011	2:02:50 PM	Bubbler valve closed
10/31/2011	2:02:50 PM	Main Vac valve opened
10/31/2011	2:02:50 PM	Helium MFC set to  0.000000
10/31/2011	2:02:50 PM	H2 MFC set to  0.000000
10/31/2011	2:02:50 PM	BCl3 MFC set to  0.000000
10/31/2011	2:02:50 PM	PHl3 MFC set to  0.000000
10/31/2011	2:02:50 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:02:50 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:02:50 PM	Tube furnace set to 0
10/31/2011	2:02:51 PM	Run finished at 2:02 PM
10/31/2011	2:02:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	2:05:17 PM	Recipe started at 2:05 PM
10/31/2011	2:05:17 PM	Helium valve closed
10/31/2011	2:05:17 PM	H2 valve closed
10/31/2011	2:05:17 PM	BCl3 valve closed
10/31/2011	2:05:17 PM	PH3 valve closed
10/31/2011	2:05:17 PM	SiCl4 pre valve closed
10/31/2011	2:05:17 PM	SiCl4 post valve closed
10/31/2011	2:05:17 PM	Main Vac valve closed
10/31/2011	2:05:17 PM	Bubbler valve closed
10/31/2011	2:05:17 PM	Bypass valve opened
10/31/2011	2:05:17 PM	Helium MFC set to  0.000000
10/31/2011	2:05:17 PM	H2 MFC set to  0.000000
10/31/2011	2:05:17 PM	BCl3 MFC set to  0.000000
10/31/2011	2:05:17 PM	PHl3 MFC set to  0.000000
10/31/2011	2:05:17 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:05:17 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:05:18 PM	Tube furnace set to 150
10/31/2011	2:05:18 PM	Helium valve closed
10/31/2011	2:05:18 PM	H2 valve closed
10/31/2011	2:05:18 PM	BCl3 valve closed
10/31/2011	2:05:18 PM	PH3 valve closed
10/31/2011	2:05:18 PM	SiCl4 pre valve closed
10/31/2011	2:05:18 PM	SiCl4 post valve closed
10/31/2011	2:05:18 PM	Main Vac valve closed
10/31/2011	2:05:18 PM	Bubbler valve closed
10/31/2011	2:05:18 PM	Bypass valve opened
10/31/2011	2:05:18 PM	Helium MFC set to  0.000000
10/31/2011	2:05:18 PM	H2 MFC set to  0.000000
10/31/2011	2:05:18 PM	BCl3 MFC set to  0.000000
10/31/2011	2:05:18 PM	PHl3 MFC set to  0.000000
10/31/2011	2:05:18 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:05:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:05:18 PM	Tube furnace set to 150
10/31/2011	2:05:48 PM	Helium valve closed
10/31/2011	2:05:48 PM	H2 valve closed
10/31/2011	2:05:48 PM	BCl3 valve closed
10/31/2011	2:05:48 PM	PH3 valve closed
10/31/2011	2:05:48 PM	SiCl4 pre valve closed
10/31/2011	2:05:48 PM	SiCl4 post valve closed
10/31/2011	2:05:48 PM	Bypass valve closed
10/31/2011	2:05:48 PM	Bubbler valve closed
10/31/2011	2:05:48 PM	Main Vac valve opened
10/31/2011	2:05:48 PM	Helium MFC set to  0.000000
10/31/2011	2:05:48 PM	H2 MFC set to  0.000000
10/31/2011	2:05:48 PM	BCl3 MFC set to  0.000000
10/31/2011	2:05:48 PM	PHl3 MFC set to  0.000000
10/31/2011	2:05:48 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:05:48 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:05:48 PM	Tube furnace set to 150
10/31/2011	2:06:18 PM	H2 valve closed
10/31/2011	2:06:18 PM	BCl3 valve closed
10/31/2011	2:06:18 PM	PH3 valve closed
10/31/2011	2:06:18 PM	SiCl4 pre valve closed
10/31/2011	2:06:18 PM	SiCl4 post valve closed
10/31/2011	2:06:18 PM	Bypass valve closed
10/31/2011	2:06:18 PM	Bubbler valve closed
10/31/2011	2:06:18 PM	Helium valve opened
10/31/2011	2:06:18 PM	Main Vac valve opened
10/31/2011	2:06:18 PM	Helium MFC set to  20.000000
10/31/2011	2:06:18 PM	H2 MFC set to  0.000000
10/31/2011	2:06:18 PM	BCl3 MFC set to  0.000000
10/31/2011	2:06:18 PM	PHl3 MFC set to  0.000000
10/31/2011	2:06:18 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:06:18 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:06:18 PM	Tube furnace set to 150
10/31/2011	2:06:49 PM	Helium valve closed
10/31/2011	2:06:49 PM	H2 valve closed
10/31/2011	2:06:49 PM	BCl3 valve closed
10/31/2011	2:06:49 PM	PH3 valve closed
10/31/2011	2:06:49 PM	SiCl4 pre valve closed
10/31/2011	2:06:49 PM	SiCl4 post valve closed
10/31/2011	2:06:49 PM	Bypass valve closed
10/31/2011	2:06:49 PM	Bubbler valve closed
10/31/2011	2:06:49 PM	Main Vac valve opened
10/31/2011	2:06:49 PM	Helium MFC set to  0.000000
10/31/2011	2:06:49 PM	H2 MFC set to  0.000000
10/31/2011	2:06:49 PM	BCl3 MFC set to  0.000000
10/31/2011	2:06:49 PM	PHl3 MFC set to  0.000000
10/31/2011	2:06:49 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:06:49 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:06:49 PM	Tube furnace set to 150
10/31/2011	2:07:19 PM	H2 valve closed
10/31/2011	2:07:19 PM	BCl3 valve closed
10/31/2011	2:07:19 PM	PH3 valve closed
10/31/2011	2:07:19 PM	SiCl4 pre valve closed
10/31/2011	2:07:19 PM	SiCl4 post valve closed
10/31/2011	2:07:19 PM	Bypass valve closed
10/31/2011	2:07:19 PM	Bubbler valve closed
10/31/2011	2:07:19 PM	Helium valve opened
10/31/2011	2:07:19 PM	Main Vac valve opened
10/31/2011	2:07:19 PM	Helium MFC set to  20.000000
10/31/2011	2:07:19 PM	H2 MFC set to  0.000000
10/31/2011	2:07:19 PM	BCl3 MFC set to  0.000000
10/31/2011	2:07:19 PM	PHl3 MFC set to  0.000000
10/31/2011	2:07:19 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:07:19 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:07:19 PM	Tube furnace set to 150
10/31/2011	2:07:49 PM	Helium valve closed
10/31/2011	2:07:49 PM	H2 valve closed
10/31/2011	2:07:49 PM	BCl3 valve closed
10/31/2011	2:07:49 PM	PH3 valve closed
10/31/2011	2:07:49 PM	SiCl4 pre valve closed
10/31/2011	2:07:49 PM	SiCl4 post valve closed
10/31/2011	2:07:49 PM	Bypass valve closed
10/31/2011	2:07:49 PM	Bubbler valve closed
10/31/2011	2:07:49 PM	Main Vac valve opened
10/31/2011	2:07:49 PM	Helium MFC set to  0.000000
10/31/2011	2:07:49 PM	H2 MFC set to  0.000000
10/31/2011	2:07:49 PM	BCl3 MFC set to  0.000000
10/31/2011	2:07:49 PM	PHl3 MFC set to  0.000000
10/31/2011	2:07:49 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:07:49 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:07:49 PM	Tube furnace set to 150
10/31/2011	2:08:19 PM	H2 valve closed
10/31/2011	2:08:19 PM	BCl3 valve closed
10/31/2011	2:08:19 PM	PH3 valve closed
10/31/2011	2:08:19 PM	SiCl4 pre valve closed
10/31/2011	2:08:19 PM	SiCl4 post valve closed
10/31/2011	2:08:19 PM	Bypass valve closed
10/31/2011	2:08:19 PM	Bubbler valve closed
10/31/2011	2:08:19 PM	Helium valve opened
10/31/2011	2:08:19 PM	Main Vac valve opened
10/31/2011	2:08:19 PM	Helium MFC set to  20.000000
10/31/2011	2:08:19 PM	H2 MFC set to  0.000000
10/31/2011	2:08:19 PM	BCl3 MFC set to  0.000000
10/31/2011	2:08:19 PM	PHl3 MFC set to  0.000000
10/31/2011	2:08:19 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:08:19 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:08:19 PM	Tube furnace set to 150
10/31/2011	2:08:49 PM	Helium valve closed
10/31/2011	2:08:49 PM	H2 valve closed
10/31/2011	2:08:49 PM	BCl3 valve closed
10/31/2011	2:08:49 PM	PH3 valve closed
10/31/2011	2:08:49 PM	SiCl4 pre valve closed
10/31/2011	2:08:49 PM	SiCl4 post valve closed
10/31/2011	2:08:49 PM	Bypass valve closed
10/31/2011	2:08:49 PM	Bubbler valve closed
10/31/2011	2:08:49 PM	Main Vac valve opened
10/31/2011	2:08:49 PM	Helium MFC set to  0.000000
10/31/2011	2:08:49 PM	H2 MFC set to  0.000000
10/31/2011	2:08:49 PM	BCl3 MFC set to  0.000000
10/31/2011	2:08:49 PM	PHl3 MFC set to  0.000000
10/31/2011	2:08:49 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:08:49 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:08:49 PM	Tube furnace set to 150
10/31/2011	2:09:19 PM	H2 valve closed
10/31/2011	2:09:19 PM	BCl3 valve closed
10/31/2011	2:09:19 PM	PH3 valve closed
10/31/2011	2:09:19 PM	SiCl4 pre valve closed
10/31/2011	2:09:19 PM	SiCl4 post valve closed
10/31/2011	2:09:19 PM	Bypass valve closed
10/31/2011	2:09:19 PM	Bubbler valve closed
10/31/2011	2:09:19 PM	Helium valve opened
10/31/2011	2:09:19 PM	Main Vac valve opened
10/31/2011	2:09:19 PM	Helium MFC set to  20.000000
10/31/2011	2:09:20 PM	H2 MFC set to  0.000000
10/31/2011	2:09:20 PM	BCl3 MFC set to  0.000000
10/31/2011	2:09:20 PM	PHl3 MFC set to  0.000000
10/31/2011	2:09:20 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:09:20 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:09:20 PM	Tube furnace set to 150
10/31/2011	2:09:50 PM	Helium valve closed
10/31/2011	2:09:50 PM	H2 valve closed
10/31/2011	2:09:50 PM	BCl3 valve closed
10/31/2011	2:09:50 PM	PH3 valve closed
10/31/2011	2:09:50 PM	SiCl4 pre valve closed
10/31/2011	2:09:50 PM	SiCl4 post valve closed
10/31/2011	2:09:50 PM	Bypass valve closed
10/31/2011	2:09:50 PM	Bubbler valve closed
10/31/2011	2:09:50 PM	Main Vac valve opened
10/31/2011	2:09:50 PM	Helium MFC set to  0.000000
10/31/2011	2:09:50 PM	H2 MFC set to  0.000000
10/31/2011	2:09:50 PM	BCl3 MFC set to  0.000000
10/31/2011	2:09:50 PM	PHl3 MFC set to  0.000000
10/31/2011	2:09:50 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:09:50 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:09:50 PM	Tube furnace set to 150
10/31/2011	2:10:20 PM	H2 valve closed
10/31/2011	2:10:20 PM	BCl3 valve closed
10/31/2011	2:10:20 PM	PH3 valve closed
10/31/2011	2:10:20 PM	SiCl4 pre valve closed
10/31/2011	2:10:20 PM	SiCl4 post valve closed
10/31/2011	2:10:20 PM	Bypass valve closed
10/31/2011	2:10:20 PM	Bubbler valve closed
10/31/2011	2:10:20 PM	Helium valve opened
10/31/2011	2:10:20 PM	Main Vac valve opened
10/31/2011	2:10:20 PM	Helium MFC set to  20.000000
10/31/2011	2:10:20 PM	H2 MFC set to  0.000000
10/31/2011	2:10:20 PM	BCl3 MFC set to  0.000000
10/31/2011	2:10:20 PM	PHl3 MFC set to  0.000000
10/31/2011	2:10:20 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:10:20 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:10:20 PM	Tube furnace set to 150
10/31/2011	2:10:50 PM	Helium valve closed
10/31/2011	2:10:50 PM	H2 valve closed
10/31/2011	2:10:50 PM	BCl3 valve closed
10/31/2011	2:10:50 PM	PH3 valve closed
10/31/2011	2:10:50 PM	SiCl4 pre valve closed
10/31/2011	2:10:50 PM	SiCl4 post valve closed
10/31/2011	2:10:50 PM	Bypass valve closed
10/31/2011	2:10:50 PM	Bubbler valve closed
10/31/2011	2:10:50 PM	Main Vac valve opened
10/31/2011	2:10:50 PM	Helium MFC set to  0.000000
10/31/2011	2:10:50 PM	H2 MFC set to  0.000000
10/31/2011	2:10:50 PM	BCl3 MFC set to  0.000000
10/31/2011	2:10:50 PM	PHl3 MFC set to  0.000000
10/31/2011	2:10:50 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:10:50 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:10:50 PM	Tube furnace set to 150
10/31/2011	2:11:20 PM	H2 valve closed
10/31/2011	2:11:20 PM	BCl3 valve closed
10/31/2011	2:11:20 PM	PH3 valve closed
10/31/2011	2:11:20 PM	SiCl4 pre valve closed
10/31/2011	2:11:20 PM	SiCl4 post valve closed
10/31/2011	2:11:20 PM	Bypass valve closed
10/31/2011	2:11:20 PM	Bubbler valve closed
10/31/2011	2:11:20 PM	Helium valve opened
10/31/2011	2:11:20 PM	Main Vac valve opened
10/31/2011	2:11:20 PM	Helium MFC set to  20.000000
10/31/2011	2:11:20 PM	H2 MFC set to  0.000000
10/31/2011	2:11:20 PM	BCl3 MFC set to  0.000000
10/31/2011	2:11:20 PM	PHl3 MFC set to  0.000000
10/31/2011	2:11:20 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:11:20 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:11:20 PM	Tube furnace set to 150
10/31/2011	2:11:50 PM	Helium valve closed
10/31/2011	2:11:50 PM	H2 valve closed
10/31/2011	2:11:50 PM	BCl3 valve closed
10/31/2011	2:11:50 PM	PH3 valve closed
10/31/2011	2:11:50 PM	SiCl4 pre valve closed
10/31/2011	2:11:50 PM	SiCl4 post valve closed
10/31/2011	2:11:50 PM	Bypass valve closed
10/31/2011	2:11:50 PM	Bubbler valve closed
10/31/2011	2:11:50 PM	Main Vac valve opened
10/31/2011	2:11:50 PM	Helium MFC set to  0.000000
10/31/2011	2:11:50 PM	H2 MFC set to  0.000000
10/31/2011	2:11:50 PM	BCl3 MFC set to  0.000000
10/31/2011	2:11:50 PM	PHl3 MFC set to  0.000000
10/31/2011	2:11:50 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:11:50 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:11:51 PM	Tube furnace set to 150
10/31/2011	2:12:21 PM	H2 valve closed
10/31/2011	2:12:21 PM	BCl3 valve closed
10/31/2011	2:12:21 PM	PH3 valve closed
10/31/2011	2:12:21 PM	SiCl4 pre valve closed
10/31/2011	2:12:21 PM	SiCl4 post valve closed
10/31/2011	2:12:21 PM	Bypass valve closed
10/31/2011	2:12:21 PM	Bubbler valve closed
10/31/2011	2:12:21 PM	Helium valve opened
10/31/2011	2:12:21 PM	Main Vac valve opened
10/31/2011	2:12:21 PM	Helium MFC set to  20.000000
10/31/2011	2:12:21 PM	H2 MFC set to  0.000000
10/31/2011	2:12:21 PM	BCl3 MFC set to  0.000000
10/31/2011	2:12:21 PM	PHl3 MFC set to  0.000000
10/31/2011	2:12:21 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:12:21 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:12:21 PM	Tube furnace set to 150
10/31/2011	2:12:51 PM	Helium valve closed
10/31/2011	2:12:51 PM	H2 valve closed
10/31/2011	2:12:51 PM	BCl3 valve closed
10/31/2011	2:12:51 PM	PH3 valve closed
10/31/2011	2:12:51 PM	SiCl4 pre valve closed
10/31/2011	2:12:51 PM	SiCl4 post valve closed
10/31/2011	2:12:51 PM	Bypass valve closed
10/31/2011	2:12:51 PM	Bubbler valve closed
10/31/2011	2:12:51 PM	Main Vac valve opened
10/31/2011	2:12:51 PM	Helium MFC set to  0.000000
10/31/2011	2:12:51 PM	H2 MFC set to  0.000000
10/31/2011	2:12:51 PM	BCl3 MFC set to  0.000000
10/31/2011	2:12:51 PM	PHl3 MFC set to  0.000000
10/31/2011	2:12:51 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:12:51 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:12:51 PM	Tube furnace set to 150
10/31/2011	2:13:21 PM	H2 valve closed
10/31/2011	2:13:21 PM	BCl3 valve closed
10/31/2011	2:13:21 PM	PH3 valve closed
10/31/2011	2:13:21 PM	SiCl4 pre valve closed
10/31/2011	2:13:21 PM	SiCl4 post valve closed
10/31/2011	2:13:21 PM	Bypass valve closed
10/31/2011	2:13:21 PM	Bubbler valve closed
10/31/2011	2:13:21 PM	Helium valve opened
10/31/2011	2:13:21 PM	Main Vac valve opened
10/31/2011	2:13:21 PM	Helium MFC set to  20.000000
10/31/2011	2:13:21 PM	H2 MFC set to  0.000000
10/31/2011	2:13:21 PM	BCl3 MFC set to  0.000000
10/31/2011	2:13:21 PM	PHl3 MFC set to  0.000000
10/31/2011	2:13:21 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:13:21 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:13:21 PM	Tube furnace set to 150
10/31/2011	2:13:51 PM	Helium valve closed
10/31/2011	2:13:51 PM	H2 valve closed
10/31/2011	2:13:51 PM	BCl3 valve closed
10/31/2011	2:13:51 PM	PH3 valve closed
10/31/2011	2:13:51 PM	SiCl4 pre valve closed
10/31/2011	2:13:51 PM	SiCl4 post valve closed
10/31/2011	2:13:51 PM	Bypass valve closed
10/31/2011	2:13:51 PM	Bubbler valve closed
10/31/2011	2:13:51 PM	Main Vac valve opened
10/31/2011	2:13:51 PM	Helium MFC set to  0.000000
10/31/2011	2:13:51 PM	H2 MFC set to  0.000000
10/31/2011	2:13:51 PM	BCl3 MFC set to  0.000000
10/31/2011	2:13:51 PM	PHl3 MFC set to  0.000000
10/31/2011	2:13:51 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:13:51 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:13:51 PM	Tube furnace set to 150
10/31/2011	2:14:21 PM	H2 valve closed
10/31/2011	2:14:21 PM	BCl3 valve closed
10/31/2011	2:14:21 PM	PH3 valve closed
10/31/2011	2:14:21 PM	SiCl4 pre valve closed
10/31/2011	2:14:21 PM	SiCl4 post valve closed
10/31/2011	2:14:21 PM	Bypass valve closed
10/31/2011	2:14:21 PM	Bubbler valve closed
10/31/2011	2:14:22 PM	Helium valve opened
10/31/2011	2:14:22 PM	Main Vac valve opened
10/31/2011	2:14:22 PM	Helium MFC set to  20.000000
10/31/2011	2:14:22 PM	H2 MFC set to  0.000000
10/31/2011	2:14:22 PM	BCl3 MFC set to  0.000000
10/31/2011	2:14:22 PM	PHl3 MFC set to  0.000000
10/31/2011	2:14:22 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:14:22 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:14:22 PM	Tube furnace set to 150
10/31/2011	2:14:52 PM	Helium valve closed
10/31/2011	2:14:52 PM	H2 valve closed
10/31/2011	2:14:52 PM	BCl3 valve closed
10/31/2011	2:14:52 PM	PH3 valve closed
10/31/2011	2:14:52 PM	SiCl4 pre valve closed
10/31/2011	2:14:52 PM	SiCl4 post valve closed
10/31/2011	2:14:52 PM	Bypass valve closed
10/31/2011	2:14:52 PM	Bubbler valve closed
10/31/2011	2:14:52 PM	Main Vac valve opened
10/31/2011	2:14:52 PM	Helium MFC set to  0.000000
10/31/2011	2:14:52 PM	H2 MFC set to  0.000000
10/31/2011	2:14:52 PM	BCl3 MFC set to  0.000000
10/31/2011	2:14:52 PM	PHl3 MFC set to  0.000000
10/31/2011	2:14:52 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:14:52 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:14:52 PM	Tube furnace set to 150
10/31/2011	2:15:22 PM	H2 valve closed
10/31/2011	2:15:22 PM	BCl3 valve closed
10/31/2011	2:15:22 PM	PH3 valve closed
10/31/2011	2:15:22 PM	SiCl4 pre valve closed
10/31/2011	2:15:22 PM	SiCl4 post valve closed
10/31/2011	2:15:22 PM	Bypass valve closed
10/31/2011	2:15:22 PM	Bubbler valve closed
10/31/2011	2:15:22 PM	Helium valve opened
10/31/2011	2:15:22 PM	Main Vac valve opened
10/31/2011	2:15:22 PM	Helium MFC set to  20.000000
10/31/2011	2:15:22 PM	H2 MFC set to  0.000000
10/31/2011	2:15:22 PM	BCl3 MFC set to  0.000000
10/31/2011	2:15:22 PM	PHl3 MFC set to  0.000000
10/31/2011	2:15:22 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:15:22 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:15:22 PM	Tube furnace set to 150
10/31/2011	2:15:52 PM	Helium valve closed
10/31/2011	2:15:52 PM	H2 valve closed
10/31/2011	2:15:52 PM	BCl3 valve closed
10/31/2011	2:15:52 PM	PH3 valve closed
10/31/2011	2:15:52 PM	SiCl4 pre valve closed
10/31/2011	2:15:52 PM	SiCl4 post valve closed
10/31/2011	2:15:52 PM	Bypass valve closed
10/31/2011	2:15:52 PM	Bubbler valve closed
10/31/2011	2:15:52 PM	Main Vac valve opened
10/31/2011	2:15:52 PM	Helium MFC set to  0.000000
10/31/2011	2:15:52 PM	H2 MFC set to  0.000000
10/31/2011	2:15:52 PM	BCl3 MFC set to  0.000000
10/31/2011	2:15:52 PM	PHl3 MFC set to  0.000000
10/31/2011	2:15:52 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:15:52 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:15:52 PM	Tube furnace set to 150
10/31/2011	2:16:22 PM	H2 valve closed
10/31/2011	2:16:22 PM	BCl3 valve closed
10/31/2011	2:16:22 PM	PH3 valve closed
10/31/2011	2:16:22 PM	SiCl4 pre valve closed
10/31/2011	2:16:22 PM	SiCl4 post valve closed
10/31/2011	2:16:22 PM	Bypass valve closed
10/31/2011	2:16:22 PM	Bubbler valve closed
10/31/2011	2:16:22 PM	Helium valve opened
10/31/2011	2:16:22 PM	Main Vac valve opened
10/31/2011	2:16:22 PM	Helium MFC set to  20.000000
10/31/2011	2:16:22 PM	H2 MFC set to  0.000000
10/31/2011	2:16:22 PM	BCl3 MFC set to  0.000000
10/31/2011	2:16:22 PM	PHl3 MFC set to  0.000000
10/31/2011	2:16:22 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:16:22 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:16:23 PM	Tube furnace set to 150
10/31/2011	2:16:53 PM	Helium valve closed
10/31/2011	2:16:53 PM	H2 valve closed
10/31/2011	2:16:53 PM	BCl3 valve closed
10/31/2011	2:16:53 PM	PH3 valve closed
10/31/2011	2:16:53 PM	SiCl4 pre valve closed
10/31/2011	2:16:53 PM	SiCl4 post valve closed
10/31/2011	2:16:53 PM	Bypass valve closed
10/31/2011	2:16:53 PM	Bubbler valve closed
10/31/2011	2:16:53 PM	Main Vac valve opened
10/31/2011	2:16:53 PM	Helium MFC set to  0.000000
10/31/2011	2:16:53 PM	H2 MFC set to  0.000000
10/31/2011	2:16:53 PM	BCl3 MFC set to  0.000000
10/31/2011	2:16:53 PM	PHl3 MFC set to  0.000000
10/31/2011	2:16:53 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:16:53 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:16:53 PM	Tube furnace set to 150
10/31/2011	2:17:23 PM	H2 valve closed
10/31/2011	2:17:23 PM	BCl3 valve closed
10/31/2011	2:17:23 PM	PH3 valve closed
10/31/2011	2:17:23 PM	SiCl4 pre valve closed
10/31/2011	2:17:23 PM	SiCl4 post valve closed
10/31/2011	2:17:23 PM	Bypass valve closed
10/31/2011	2:17:23 PM	Bubbler valve closed
10/31/2011	2:17:23 PM	Helium valve opened
10/31/2011	2:17:23 PM	Main Vac valve opened
10/31/2011	2:17:23 PM	Helium MFC set to  20.000000
10/31/2011	2:17:23 PM	H2 MFC set to  0.000000
10/31/2011	2:17:23 PM	BCl3 MFC set to  0.000000
10/31/2011	2:17:23 PM	PHl3 MFC set to  0.000000
10/31/2011	2:17:23 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:17:23 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:17:23 PM	Tube furnace set to 150
10/31/2011	2:17:53 PM	Helium valve closed
10/31/2011	2:17:53 PM	H2 valve closed
10/31/2011	2:17:53 PM	BCl3 valve closed
10/31/2011	2:17:53 PM	PH3 valve closed
10/31/2011	2:17:53 PM	SiCl4 pre valve closed
10/31/2011	2:17:53 PM	SiCl4 post valve closed
10/31/2011	2:17:53 PM	Bypass valve closed
10/31/2011	2:17:53 PM	Bubbler valve closed
10/31/2011	2:17:53 PM	Main Vac valve opened
10/31/2011	2:17:53 PM	Helium MFC set to  0.000000
10/31/2011	2:17:53 PM	H2 MFC set to  0.000000
10/31/2011	2:17:53 PM	BCl3 MFC set to  0.000000
10/31/2011	2:17:53 PM	PHl3 MFC set to  0.000000
10/31/2011	2:17:53 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:17:53 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:17:53 PM	Tube furnace set to 150
10/31/2011	2:18:23 PM	H2 valve closed
10/31/2011	2:18:23 PM	BCl3 valve closed
10/31/2011	2:18:23 PM	PH3 valve closed
10/31/2011	2:18:23 PM	SiCl4 pre valve closed
10/31/2011	2:18:23 PM	SiCl4 post valve closed
10/31/2011	2:18:23 PM	Bypass valve closed
10/31/2011	2:18:23 PM	Bubbler valve closed
10/31/2011	2:18:23 PM	Helium valve opened
10/31/2011	2:18:23 PM	Main Vac valve opened
10/31/2011	2:18:23 PM	Helium MFC set to  20.000000
10/31/2011	2:18:23 PM	H2 MFC set to  0.000000
10/31/2011	2:18:23 PM	BCl3 MFC set to  0.000000
10/31/2011	2:18:23 PM	PHl3 MFC set to  0.000000
10/31/2011	2:18:23 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:18:23 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:18:23 PM	Tube furnace set to 150
10/31/2011	2:18:53 PM	Helium valve closed
10/31/2011	2:18:53 PM	H2 valve closed
10/31/2011	2:18:53 PM	BCl3 valve closed
10/31/2011	2:18:53 PM	PH3 valve closed
10/31/2011	2:18:53 PM	SiCl4 pre valve closed
10/31/2011	2:18:53 PM	SiCl4 post valve closed
10/31/2011	2:18:53 PM	Bypass valve closed
10/31/2011	2:18:53 PM	Bubbler valve closed
10/31/2011	2:18:53 PM	Main Vac valve opened
10/31/2011	2:18:53 PM	Helium MFC set to  0.000000
10/31/2011	2:18:53 PM	H2 MFC set to  0.000000
10/31/2011	2:18:53 PM	BCl3 MFC set to  0.000000
10/31/2011	2:18:53 PM	PHl3 MFC set to  0.000000
10/31/2011	2:18:53 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:18:53 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:18:54 PM	Tube furnace set to 150
10/31/2011	2:19:24 PM	H2 valve closed
10/31/2011	2:19:24 PM	BCl3 valve closed
10/31/2011	2:19:24 PM	PH3 valve closed
10/31/2011	2:19:24 PM	SiCl4 pre valve closed
10/31/2011	2:19:24 PM	SiCl4 post valve closed
10/31/2011	2:19:24 PM	Bypass valve closed
10/31/2011	2:19:24 PM	Bubbler valve closed
10/31/2011	2:19:24 PM	Helium valve opened
10/31/2011	2:19:24 PM	Main Vac valve opened
10/31/2011	2:19:24 PM	Helium MFC set to  20.000000
10/31/2011	2:19:24 PM	H2 MFC set to  0.000000
10/31/2011	2:19:24 PM	BCl3 MFC set to  0.000000
10/31/2011	2:19:24 PM	PHl3 MFC set to  0.000000
10/31/2011	2:19:24 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:19:24 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:19:24 PM	Tube furnace set to 150
10/31/2011	2:19:54 PM	Helium valve closed
10/31/2011	2:19:54 PM	H2 valve closed
10/31/2011	2:19:54 PM	BCl3 valve closed
10/31/2011	2:19:54 PM	PH3 valve closed
10/31/2011	2:19:54 PM	SiCl4 pre valve closed
10/31/2011	2:19:54 PM	SiCl4 post valve closed
10/31/2011	2:19:54 PM	Bypass valve closed
10/31/2011	2:19:54 PM	Bubbler valve closed
10/31/2011	2:19:54 PM	Main Vac valve opened
10/31/2011	2:19:54 PM	Helium MFC set to  0.000000
10/31/2011	2:19:54 PM	H2 MFC set to  0.000000
10/31/2011	2:19:54 PM	BCl3 MFC set to  0.000000
10/31/2011	2:19:54 PM	PHl3 MFC set to  0.000000
10/31/2011	2:19:54 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:19:54 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:19:54 PM	Tube furnace set to 150
10/31/2011	2:20:24 PM	H2 valve closed
10/31/2011	2:20:24 PM	BCl3 valve closed
10/31/2011	2:20:24 PM	PH3 valve closed
10/31/2011	2:20:24 PM	SiCl4 pre valve closed
10/31/2011	2:20:24 PM	SiCl4 post valve closed
10/31/2011	2:20:24 PM	Bypass valve closed
10/31/2011	2:20:24 PM	Bubbler valve closed
10/31/2011	2:20:24 PM	Helium valve opened
10/31/2011	2:20:24 PM	Main Vac valve opened
10/31/2011	2:20:24 PM	Helium MFC set to  20.000000
10/31/2011	2:20:24 PM	H2 MFC set to  0.000000
10/31/2011	2:20:24 PM	BCl3 MFC set to  0.000000
10/31/2011	2:20:24 PM	PHl3 MFC set to  0.000000
10/31/2011	2:20:24 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:20:24 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:20:24 PM	Tube furnace set to 150
10/31/2011	2:20:54 PM	Helium valve closed
10/31/2011	2:20:54 PM	H2 valve closed
10/31/2011	2:20:54 PM	BCl3 valve closed
10/31/2011	2:20:54 PM	PH3 valve closed
10/31/2011	2:20:54 PM	SiCl4 pre valve closed
10/31/2011	2:20:54 PM	SiCl4 post valve closed
10/31/2011	2:20:54 PM	Bypass valve closed
10/31/2011	2:20:54 PM	Bubbler valve closed
10/31/2011	2:20:54 PM	Main Vac valve opened
10/31/2011	2:20:54 PM	Helium MFC set to  0.000000
10/31/2011	2:20:54 PM	H2 MFC set to  0.000000
10/31/2011	2:20:54 PM	BCl3 MFC set to  0.000000
10/31/2011	2:20:54 PM	PHl3 MFC set to  0.000000
10/31/2011	2:20:54 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:20:54 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:20:54 PM	Tube furnace set to 150
10/31/2011	2:21:24 PM	H2 valve closed
10/31/2011	2:21:24 PM	BCl3 valve closed
10/31/2011	2:21:24 PM	PH3 valve closed
10/31/2011	2:21:24 PM	SiCl4 pre valve closed
10/31/2011	2:21:25 PM	SiCl4 post valve closed
10/31/2011	2:21:25 PM	Bypass valve closed
10/31/2011	2:21:25 PM	Bubbler valve closed
10/31/2011	2:21:25 PM	Helium valve opened
10/31/2011	2:21:25 PM	Main Vac valve opened
10/31/2011	2:21:25 PM	Helium MFC set to  20.000000
10/31/2011	2:21:25 PM	H2 MFC set to  0.000000
10/31/2011	2:21:25 PM	BCl3 MFC set to  0.000000
10/31/2011	2:21:25 PM	PHl3 MFC set to  0.000000
10/31/2011	2:21:25 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:21:25 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:21:25 PM	Tube furnace set to 150
10/31/2011	2:21:55 PM	Helium valve closed
10/31/2011	2:21:55 PM	H2 valve closed
10/31/2011	2:21:55 PM	BCl3 valve closed
10/31/2011	2:21:55 PM	PH3 valve closed
10/31/2011	2:21:55 PM	SiCl4 pre valve closed
10/31/2011	2:21:55 PM	SiCl4 post valve closed
10/31/2011	2:21:55 PM	Bypass valve closed
10/31/2011	2:21:55 PM	Bubbler valve closed
10/31/2011	2:21:55 PM	Main Vac valve opened
10/31/2011	2:21:55 PM	Helium MFC set to  0.000000
10/31/2011	2:21:55 PM	H2 MFC set to  0.000000
10/31/2011	2:21:55 PM	BCl3 MFC set to  0.000000
10/31/2011	2:21:55 PM	PHl3 MFC set to  0.000000
10/31/2011	2:21:55 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:21:55 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:21:55 PM	Tube furnace set to 150
10/31/2011	2:22:25 PM	H2 valve closed
10/31/2011	2:22:25 PM	BCl3 valve closed
10/31/2011	2:22:25 PM	PH3 valve closed
10/31/2011	2:22:25 PM	SiCl4 pre valve closed
10/31/2011	2:22:25 PM	SiCl4 post valve closed
10/31/2011	2:22:25 PM	Bypass valve closed
10/31/2011	2:22:25 PM	Bubbler valve closed
10/31/2011	2:22:25 PM	Helium valve opened
10/31/2011	2:22:25 PM	Main Vac valve opened
10/31/2011	2:22:25 PM	Helium MFC set to  20.000000
10/31/2011	2:22:25 PM	H2 MFC set to  0.000000
10/31/2011	2:22:25 PM	BCl3 MFC set to  0.000000
10/31/2011	2:22:25 PM	PHl3 MFC set to  0.000000
10/31/2011	2:22:25 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:22:25 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:22:25 PM	Tube furnace set to 150
10/31/2011	2:22:55 PM	Helium valve closed
10/31/2011	2:22:55 PM	H2 valve closed
10/31/2011	2:22:55 PM	BCl3 valve closed
10/31/2011	2:22:55 PM	PH3 valve closed
10/31/2011	2:22:55 PM	SiCl4 pre valve closed
10/31/2011	2:22:55 PM	SiCl4 post valve closed
10/31/2011	2:22:55 PM	Bypass valve closed
10/31/2011	2:22:55 PM	Bubbler valve closed
10/31/2011	2:22:55 PM	Main Vac valve opened
10/31/2011	2:22:55 PM	Helium MFC set to  0.000000
10/31/2011	2:22:55 PM	H2 MFC set to  0.000000
10/31/2011	2:22:55 PM	BCl3 MFC set to  0.000000
10/31/2011	2:22:55 PM	PHl3 MFC set to  0.000000
10/31/2011	2:22:55 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:22:55 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:22:55 PM	Tube furnace set to 150
10/31/2011	2:23:25 PM	H2 valve closed
10/31/2011	2:23:25 PM	BCl3 valve closed
10/31/2011	2:23:25 PM	PH3 valve closed
10/31/2011	2:23:25 PM	SiCl4 pre valve closed
10/31/2011	2:23:25 PM	SiCl4 post valve closed
10/31/2011	2:23:25 PM	Bypass valve closed
10/31/2011	2:23:25 PM	Bubbler valve closed
10/31/2011	2:23:25 PM	Helium valve opened
10/31/2011	2:23:25 PM	Main Vac valve opened
10/31/2011	2:23:25 PM	Helium MFC set to  20.000000
10/31/2011	2:23:25 PM	H2 MFC set to  0.000000
10/31/2011	2:23:25 PM	BCl3 MFC set to  0.000000
10/31/2011	2:23:25 PM	PHl3 MFC set to  0.000000
10/31/2011	2:23:25 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:23:25 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:23:26 PM	Tube furnace set to 150
10/31/2011	2:23:56 PM	Helium valve closed
10/31/2011	2:23:56 PM	H2 valve closed
10/31/2011	2:23:56 PM	BCl3 valve closed
10/31/2011	2:23:56 PM	PH3 valve closed
10/31/2011	2:23:56 PM	SiCl4 pre valve closed
10/31/2011	2:23:56 PM	SiCl4 post valve closed
10/31/2011	2:23:56 PM	Bypass valve closed
10/31/2011	2:23:56 PM	Bubbler valve closed
10/31/2011	2:23:56 PM	Main Vac valve opened
10/31/2011	2:23:56 PM	Helium MFC set to  0.000000
10/31/2011	2:23:56 PM	H2 MFC set to  0.000000
10/31/2011	2:23:56 PM	BCl3 MFC set to  0.000000
10/31/2011	2:23:56 PM	PHl3 MFC set to  0.000000
10/31/2011	2:23:56 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:23:56 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:23:56 PM	Tube furnace set to 150
10/31/2011	2:24:26 PM	H2 valve closed
10/31/2011	2:24:26 PM	BCl3 valve closed
10/31/2011	2:24:26 PM	PH3 valve closed
10/31/2011	2:24:26 PM	SiCl4 pre valve closed
10/31/2011	2:24:26 PM	SiCl4 post valve closed
10/31/2011	2:24:26 PM	Bypass valve closed
10/31/2011	2:24:26 PM	Bubbler valve closed
10/31/2011	2:24:26 PM	Helium valve opened
10/31/2011	2:24:26 PM	Main Vac valve opened
10/31/2011	2:24:26 PM	Helium MFC set to  20.000000
10/31/2011	2:24:26 PM	H2 MFC set to  0.000000
10/31/2011	2:24:26 PM	BCl3 MFC set to  0.000000
10/31/2011	2:24:26 PM	PHl3 MFC set to  0.000000
10/31/2011	2:24:26 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:24:26 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:24:26 PM	Tube furnace set to 150
10/31/2011	2:24:56 PM	Helium valve closed
10/31/2011	2:24:56 PM	H2 valve closed
10/31/2011	2:24:56 PM	BCl3 valve closed
10/31/2011	2:24:56 PM	PH3 valve closed
10/31/2011	2:24:56 PM	SiCl4 pre valve closed
10/31/2011	2:24:56 PM	SiCl4 post valve closed
10/31/2011	2:24:56 PM	Bypass valve closed
10/31/2011	2:24:56 PM	Bubbler valve closed
10/31/2011	2:24:56 PM	Main Vac valve opened
10/31/2011	2:24:56 PM	Helium MFC set to  0.000000
10/31/2011	2:24:56 PM	H2 MFC set to  0.000000
10/31/2011	2:24:56 PM	BCl3 MFC set to  0.000000
10/31/2011	2:24:56 PM	PHl3 MFC set to  0.000000
10/31/2011	2:24:56 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:24:56 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:24:56 PM	Tube furnace set to 150
10/31/2011	2:25:26 PM	H2 valve closed
10/31/2011	2:25:26 PM	BCl3 valve closed
10/31/2011	2:25:26 PM	PH3 valve closed
10/31/2011	2:25:26 PM	SiCl4 pre valve closed
10/31/2011	2:25:26 PM	SiCl4 post valve closed
10/31/2011	2:25:26 PM	Bypass valve closed
10/31/2011	2:25:26 PM	Bubbler valve closed
10/31/2011	2:25:26 PM	Helium valve opened
10/31/2011	2:25:26 PM	Main Vac valve opened
10/31/2011	2:25:26 PM	Helium MFC set to  20.000000
10/31/2011	2:25:26 PM	H2 MFC set to  0.000000
10/31/2011	2:25:26 PM	BCl3 MFC set to  0.000000
10/31/2011	2:25:26 PM	PHl3 MFC set to  0.000000
10/31/2011	2:25:26 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:25:26 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:25:26 PM	Tube furnace set to 150
10/31/2011	2:25:56 PM	Helium valve closed
10/31/2011	2:25:56 PM	H2 valve closed
10/31/2011	2:25:56 PM	BCl3 valve closed
10/31/2011	2:25:56 PM	PH3 valve closed
10/31/2011	2:25:56 PM	SiCl4 pre valve closed
10/31/2011	2:25:56 PM	SiCl4 post valve closed
10/31/2011	2:25:56 PM	Main Vac valve closed
10/31/2011	2:25:56 PM	Bypass valve closed
10/31/2011	2:25:56 PM	Bubbler valve closed
10/31/2011	2:25:56 PM	Helium MFC set to  0.000000
10/31/2011	2:25:56 PM	H2 MFC set to  0.000000
10/31/2011	2:25:56 PM	BCl3 MFC set to  0.000000
10/31/2011	2:25:56 PM	PHl3 MFC set to  0.000000
10/31/2011	2:25:56 PM	SiCl4 MFC set to  0.000000
10/31/2011	2:25:56 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	2:25:57 PM	Tube furnace set to 180
10/31/2011	2:26:02 PM	Run finished at 2:26 PM
10/31/2011	6:11:43 PM	Main Vac valve opened
10/31/2011	6:24:47 PM	Main Vac valve closed
10/31/2011	6:24:59 PM	Main Vac valve opened
10/31/2011	6:27:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	6:27:45 PM	Recipe started at 6:27 PM
10/31/2011	6:27:45 PM	Helium valve closed
10/31/2011	6:27:45 PM	H2 valve closed
10/31/2011	6:27:45 PM	BCl3 valve closed
10/31/2011	6:27:45 PM	PH3 valve closed
10/31/2011	6:27:45 PM	SiCl4 pre valve closed
10/31/2011	6:27:45 PM	SiCl4 post valve closed
10/31/2011	6:27:45 PM	Main Vac valve closed
10/31/2011	6:27:45 PM	Bypass valve closed
10/31/2011	6:27:45 PM	Bubbler valve closed
10/31/2011	6:27:45 PM	Helium MFC set to  0.000000
10/31/2011	6:27:45 PM	H2 MFC set to  0.000000
10/31/2011	6:27:45 PM	BCl3 MFC set to  0.000000
10/31/2011	6:27:45 PM	PHl3 MFC set to  0.000000
10/31/2011	6:27:45 PM	SiCl4 MFC set to  0.000000
10/31/2011	6:27:45 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	6:27:45 PM	Tube furnace set to 0
10/31/2011	6:27:48 PM	H2 valve closed
10/31/2011	6:27:48 PM	BCl3 valve closed
10/31/2011	6:27:48 PM	PH3 valve closed
10/31/2011	6:27:48 PM	SiCl4 pre valve closed
10/31/2011	6:27:48 PM	SiCl4 post valve closed
10/31/2011	6:27:48 PM	Main Vac valve closed
10/31/2011	6:27:48 PM	Bypass valve closed
10/31/2011	6:27:48 PM	Bubbler valve closed
10/31/2011	6:27:48 PM	Helium valve opened
10/31/2011	6:27:48 PM	Helium MFC set to  500.000000
10/31/2011	6:27:48 PM	H2 MFC set to  0.000000
10/31/2011	6:27:48 PM	BCl3 MFC set to  0.000000
10/31/2011	6:27:48 PM	PHl3 MFC set to  0.000000
10/31/2011	6:27:48 PM	SiCl4 MFC set to  0.000000
10/31/2011	6:27:48 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	6:27:48 PM	Tube furnace set to 0
10/31/2011	6:28:50 PM	Helium valve closed
10/31/2011	6:28:50 PM	H2 valve closed
10/31/2011	6:28:50 PM	BCl3 valve closed
10/31/2011	6:28:50 PM	PH3 valve closed
10/31/2011	6:28:50 PM	SiCl4 pre valve closed
10/31/2011	6:28:50 PM	SiCl4 post valve closed
10/31/2011	6:28:50 PM	Main Vac valve closed
10/31/2011	6:28:50 PM	Bypass valve closed
10/31/2011	6:28:50 PM	Bubbler valve closed
10/31/2011	6:28:50 PM	Helium MFC set to  0.000000
10/31/2011	6:28:50 PM	H2 MFC set to  0.000000
10/31/2011	6:28:50 PM	BCl3 MFC set to  0.000000
10/31/2011	6:28:50 PM	PHl3 MFC set to  0.000000
10/31/2011	6:28:50 PM	SiCl4 MFC set to  0.000000
10/31/2011	6:28:50 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	6:28:50 PM	Tube furnace set to 0
10/31/2011	6:28:51 PM	Run finished at 6:28 PM
10/31/2011	6:28:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/31/2011	6:32:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	6:32:27 PM	Recipe started at 6:32 PM
10/31/2011	6:32:27 PM	Helium valve closed
10/31/2011	6:32:27 PM	H2 valve closed
10/31/2011	6:32:27 PM	BCl3 valve closed
10/31/2011	6:32:27 PM	PH3 valve closed
10/31/2011	6:32:27 PM	SiCl4 pre valve closed
10/31/2011	6:32:27 PM	SiCl4 post valve closed
10/31/2011	6:32:27 PM	Main Vac valve closed
10/31/2011	6:32:27 PM	Bubbler valve closed
10/31/2011	6:32:27 PM	Bypass valve opened
10/31/2011	6:32:27 PM	Helium MFC set to  0.000000
10/31/2011	6:32:27 PM	H2 MFC set to  0.000000
10/31/2011	6:32:27 PM	BCl3 MFC set to  0.000000
10/31/2011	6:32:27 PM	PHl3 MFC set to  0.000000
10/31/2011	6:32:27 PM	SiCl4 MFC set to  0.000000
10/31/2011	6:32:27 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	6:32:27 PM	Tube furnace set to 0
10/31/2011	6:33:33 PM	Helium valve closed
10/31/2011	6:33:33 PM	H2 valve closed
10/31/2011	6:33:33 PM	BCl3 valve closed
10/31/2011	6:33:33 PM	PH3 valve closed
10/31/2011	6:33:33 PM	SiCl4 pre valve closed
10/31/2011	6:33:33 PM	SiCl4 post valve closed
10/31/2011	6:33:33 PM	Main Vac valve closed
10/31/2011	6:33:33 PM	Bubbler valve closed
10/31/2011	6:33:33 PM	Bypass valve opened
10/31/2011	6:33:33 PM	Helium MFC set to  0.000000
10/31/2011	6:33:33 PM	H2 MFC set to  0.000000
10/31/2011	6:33:33 PM	BCl3 MFC set to  0.000000
10/31/2011	6:33:33 PM	PHl3 MFC set to  0.000000
10/31/2011	6:33:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	6:33:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	6:33:33 PM	Tube furnace set to 0
10/31/2011	6:34:33 PM	Helium valve closed
10/31/2011	6:34:33 PM	H2 valve closed
10/31/2011	6:34:33 PM	BCl3 valve closed
10/31/2011	6:34:33 PM	PH3 valve closed
10/31/2011	6:34:33 PM	SiCl4 pre valve closed
10/31/2011	6:34:33 PM	SiCl4 post valve closed
10/31/2011	6:34:33 PM	Bypass valve closed
10/31/2011	6:34:33 PM	Bubbler valve closed
10/31/2011	6:34:33 PM	Main Vac valve opened
10/31/2011	6:34:33 PM	Helium MFC set to  0.000000
10/31/2011	6:34:33 PM	H2 MFC set to  0.000000
10/31/2011	6:34:33 PM	BCl3 MFC set to  0.000000
10/31/2011	6:34:33 PM	PHl3 MFC set to  0.000000
10/31/2011	6:34:33 PM	SiCl4 MFC set to  0.000000
10/31/2011	6:34:33 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	6:34:33 PM	Tube furnace set to 0
10/31/2011	6:34:34 PM	Run finished at 6:34 PM
10/31/2011	6:34:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/31/2011	7:04:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/31/2011	7:05:06 PM	Recipe started at 7:04 PM
10/31/2011	7:05:06 PM	Helium valve closed
10/31/2011	7:05:06 PM	H2 valve closed
10/31/2011	7:05:06 PM	BCl3 valve closed
10/31/2011	7:05:06 PM	PH3 valve closed
10/31/2011	7:05:06 PM	SiCl4 pre valve closed
10/31/2011	7:05:06 PM	SiCl4 post valve closed
10/31/2011	7:05:06 PM	Main Vac valve closed
10/31/2011	7:05:06 PM	Bubbler valve closed
10/31/2011	7:05:06 PM	Bypass valve opened
10/31/2011	7:05:06 PM	Helium MFC set to  0.000000
10/31/2011	7:05:06 PM	H2 MFC set to  0.000000
10/31/2011	7:05:06 PM	BCl3 MFC set to  0.000000
10/31/2011	7:05:06 PM	PHl3 MFC set to  0.000000
10/31/2011	7:05:06 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:05:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:05:06 PM	Tube furnace set to 0
10/31/2011	7:05:06 PM	Helium valve closed
10/31/2011	7:05:06 PM	H2 valve closed
10/31/2011	7:05:06 PM	BCl3 valve closed
10/31/2011	7:05:06 PM	PH3 valve closed
10/31/2011	7:05:06 PM	SiCl4 pre valve closed
10/31/2011	7:05:06 PM	SiCl4 post valve closed
10/31/2011	7:05:06 PM	Main Vac valve closed
10/31/2011	7:05:06 PM	Bubbler valve closed
10/31/2011	7:05:06 PM	Bypass valve opened
10/31/2011	7:05:06 PM	Helium MFC set to  0.000000
10/31/2011	7:05:06 PM	H2 MFC set to  0.000000
10/31/2011	7:05:06 PM	BCl3 MFC set to  0.000000
10/31/2011	7:05:06 PM	PHl3 MFC set to  0.000000
10/31/2011	7:05:06 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:05:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:05:06 PM	Tube furnace set to 0
10/31/2011	7:05:36 PM	Helium valve closed
10/31/2011	7:05:36 PM	H2 valve closed
10/31/2011	7:05:36 PM	BCl3 valve closed
10/31/2011	7:05:36 PM	PH3 valve closed
10/31/2011	7:05:36 PM	SiCl4 pre valve closed
10/31/2011	7:05:36 PM	SiCl4 post valve closed
10/31/2011	7:05:36 PM	Bypass valve closed
10/31/2011	7:05:36 PM	Bubbler valve closed
10/31/2011	7:05:36 PM	Main Vac valve opened
10/31/2011	7:05:36 PM	Helium MFC set to  0.000000
10/31/2011	7:05:36 PM	H2 MFC set to  0.000000
10/31/2011	7:05:36 PM	BCl3 MFC set to  0.000000
10/31/2011	7:05:36 PM	PHl3 MFC set to  0.000000
10/31/2011	7:05:36 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:05:36 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:05:36 PM	Tube furnace set to 0
10/31/2011	7:06:06 PM	H2 valve closed
10/31/2011	7:06:06 PM	BCl3 valve closed
10/31/2011	7:06:06 PM	PH3 valve closed
10/31/2011	7:06:06 PM	SiCl4 pre valve closed
10/31/2011	7:06:06 PM	SiCl4 post valve closed
10/31/2011	7:06:06 PM	Bypass valve closed
10/31/2011	7:06:06 PM	Bubbler valve closed
10/31/2011	7:06:06 PM	Helium valve opened
10/31/2011	7:06:06 PM	Main Vac valve opened
10/31/2011	7:06:06 PM	Helium MFC set to  20.000000
10/31/2011	7:06:06 PM	H2 MFC set to  0.000000
10/31/2011	7:06:06 PM	BCl3 MFC set to  0.000000
10/31/2011	7:06:06 PM	PHl3 MFC set to  0.000000
10/31/2011	7:06:06 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:06:06 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:06:07 PM	Tube furnace set to 0
10/31/2011	7:06:37 PM	Helium valve closed
10/31/2011	7:06:37 PM	H2 valve closed
10/31/2011	7:06:37 PM	BCl3 valve closed
10/31/2011	7:06:37 PM	PH3 valve closed
10/31/2011	7:06:37 PM	SiCl4 pre valve closed
10/31/2011	7:06:37 PM	SiCl4 post valve closed
10/31/2011	7:06:37 PM	Bypass valve closed
10/31/2011	7:06:37 PM	Bubbler valve closed
10/31/2011	7:06:37 PM	Main Vac valve opened
10/31/2011	7:06:37 PM	Helium MFC set to  0.000000
10/31/2011	7:06:37 PM	H2 MFC set to  0.000000
10/31/2011	7:06:37 PM	BCl3 MFC set to  0.000000
10/31/2011	7:06:37 PM	PHl3 MFC set to  0.000000
10/31/2011	7:06:37 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:06:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:06:37 PM	Tube furnace set to 0
10/31/2011	7:07:07 PM	H2 valve closed
10/31/2011	7:07:07 PM	BCl3 valve closed
10/31/2011	7:07:07 PM	PH3 valve closed
10/31/2011	7:07:07 PM	SiCl4 pre valve closed
10/31/2011	7:07:07 PM	SiCl4 post valve closed
10/31/2011	7:07:07 PM	Bypass valve closed
10/31/2011	7:07:07 PM	Bubbler valve closed
10/31/2011	7:07:07 PM	Helium valve opened
10/31/2011	7:07:07 PM	Main Vac valve opened
10/31/2011	7:07:07 PM	Helium MFC set to  20.000000
10/31/2011	7:07:07 PM	H2 MFC set to  0.000000
10/31/2011	7:07:07 PM	BCl3 MFC set to  0.000000
10/31/2011	7:07:07 PM	PHl3 MFC set to  0.000000
10/31/2011	7:07:07 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:07:07 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:07:07 PM	Tube furnace set to 0
10/31/2011	7:07:37 PM	Helium valve closed
10/31/2011	7:07:37 PM	H2 valve closed
10/31/2011	7:07:37 PM	BCl3 valve closed
10/31/2011	7:07:37 PM	PH3 valve closed
10/31/2011	7:07:37 PM	SiCl4 pre valve closed
10/31/2011	7:07:37 PM	SiCl4 post valve closed
10/31/2011	7:07:37 PM	Bypass valve closed
10/31/2011	7:07:37 PM	Bubbler valve closed
10/31/2011	7:07:37 PM	Main Vac valve opened
10/31/2011	7:07:37 PM	Helium MFC set to  0.000000
10/31/2011	7:07:37 PM	H2 MFC set to  0.000000
10/31/2011	7:07:37 PM	BCl3 MFC set to  0.000000
10/31/2011	7:07:37 PM	PHl3 MFC set to  0.000000
10/31/2011	7:07:37 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:07:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:07:37 PM	Tube furnace set to 0
10/31/2011	7:08:07 PM	H2 valve closed
10/31/2011	7:08:07 PM	BCl3 valve closed
10/31/2011	7:08:07 PM	PH3 valve closed
10/31/2011	7:08:07 PM	SiCl4 pre valve closed
10/31/2011	7:08:07 PM	SiCl4 post valve closed
10/31/2011	7:08:07 PM	Bypass valve closed
10/31/2011	7:08:07 PM	Bubbler valve closed
10/31/2011	7:08:07 PM	Helium valve opened
10/31/2011	7:08:07 PM	Main Vac valve opened
10/31/2011	7:08:07 PM	Helium MFC set to  20.000000
10/31/2011	7:08:07 PM	H2 MFC set to  0.000000
10/31/2011	7:08:07 PM	BCl3 MFC set to  0.000000
10/31/2011	7:08:07 PM	PHl3 MFC set to  0.000000
10/31/2011	7:08:07 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:08:07 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:08:07 PM	Tube furnace set to 0
10/31/2011	7:08:37 PM	Helium valve closed
10/31/2011	7:08:37 PM	H2 valve closed
10/31/2011	7:08:37 PM	BCl3 valve closed
10/31/2011	7:08:37 PM	PH3 valve closed
10/31/2011	7:08:37 PM	SiCl4 pre valve closed
10/31/2011	7:08:37 PM	SiCl4 post valve closed
10/31/2011	7:08:37 PM	Bypass valve closed
10/31/2011	7:08:37 PM	Bubbler valve closed
10/31/2011	7:08:37 PM	Main Vac valve opened
10/31/2011	7:08:37 PM	Helium MFC set to  0.000000
10/31/2011	7:08:37 PM	H2 MFC set to  0.000000
10/31/2011	7:08:37 PM	BCl3 MFC set to  0.000000
10/31/2011	7:08:37 PM	PHl3 MFC set to  0.000000
10/31/2011	7:08:37 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:08:37 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:08:38 PM	Tube furnace set to 0
10/31/2011	7:09:08 PM	H2 valve closed
10/31/2011	7:09:08 PM	BCl3 valve closed
10/31/2011	7:09:08 PM	PH3 valve closed
10/31/2011	7:09:08 PM	SiCl4 pre valve closed
10/31/2011	7:09:08 PM	SiCl4 post valve closed
10/31/2011	7:09:08 PM	Bypass valve closed
10/31/2011	7:09:08 PM	Bubbler valve closed
10/31/2011	7:09:08 PM	Helium valve opened
10/31/2011	7:09:08 PM	Main Vac valve opened
10/31/2011	7:09:08 PM	Helium MFC set to  20.000000
10/31/2011	7:09:08 PM	H2 MFC set to  0.000000
10/31/2011	7:09:08 PM	BCl3 MFC set to  0.000000
10/31/2011	7:09:08 PM	PHl3 MFC set to  0.000000
10/31/2011	7:09:08 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:09:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:09:08 PM	Tube furnace set to 0
10/31/2011	7:09:38 PM	Helium valve closed
10/31/2011	7:09:38 PM	H2 valve closed
10/31/2011	7:09:38 PM	BCl3 valve closed
10/31/2011	7:09:38 PM	PH3 valve closed
10/31/2011	7:09:38 PM	SiCl4 pre valve closed
10/31/2011	7:09:38 PM	SiCl4 post valve closed
10/31/2011	7:09:38 PM	Bypass valve closed
10/31/2011	7:09:38 PM	Bubbler valve closed
10/31/2011	7:09:38 PM	Main Vac valve opened
10/31/2011	7:09:38 PM	Helium MFC set to  0.000000
10/31/2011	7:09:38 PM	H2 MFC set to  0.000000
10/31/2011	7:09:38 PM	BCl3 MFC set to  0.000000
10/31/2011	7:09:38 PM	PHl3 MFC set to  0.000000
10/31/2011	7:09:38 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:09:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:09:38 PM	Tube furnace set to 0
10/31/2011	7:10:08 PM	H2 valve closed
10/31/2011	7:10:08 PM	BCl3 valve closed
10/31/2011	7:10:08 PM	PH3 valve closed
10/31/2011	7:10:08 PM	SiCl4 pre valve closed
10/31/2011	7:10:08 PM	SiCl4 post valve closed
10/31/2011	7:10:08 PM	Bypass valve closed
10/31/2011	7:10:08 PM	Bubbler valve closed
10/31/2011	7:10:08 PM	Helium valve opened
10/31/2011	7:10:08 PM	Main Vac valve opened
10/31/2011	7:10:08 PM	Helium MFC set to  20.000000
10/31/2011	7:10:08 PM	H2 MFC set to  0.000000
10/31/2011	7:10:08 PM	BCl3 MFC set to  0.000000
10/31/2011	7:10:08 PM	PHl3 MFC set to  0.000000
10/31/2011	7:10:08 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:10:08 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:10:08 PM	Tube furnace set to 0
10/31/2011	7:10:38 PM	Helium valve closed
10/31/2011	7:10:38 PM	H2 valve closed
10/31/2011	7:10:38 PM	BCl3 valve closed
10/31/2011	7:10:38 PM	PH3 valve closed
10/31/2011	7:10:38 PM	SiCl4 pre valve closed
10/31/2011	7:10:38 PM	SiCl4 post valve closed
10/31/2011	7:10:38 PM	Bypass valve closed
10/31/2011	7:10:38 PM	Bubbler valve closed
10/31/2011	7:10:38 PM	Main Vac valve opened
10/31/2011	7:10:38 PM	Helium MFC set to  0.000000
10/31/2011	7:10:38 PM	H2 MFC set to  0.000000
10/31/2011	7:10:38 PM	BCl3 MFC set to  0.000000
10/31/2011	7:10:38 PM	PHl3 MFC set to  0.000000
10/31/2011	7:10:38 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:10:38 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:10:38 PM	Tube furnace set to 0
10/31/2011	7:11:08 PM	H2 valve closed
10/31/2011	7:11:08 PM	BCl3 valve closed
10/31/2011	7:11:08 PM	PH3 valve closed
10/31/2011	7:11:08 PM	SiCl4 pre valve closed
10/31/2011	7:11:08 PM	SiCl4 post valve closed
10/31/2011	7:11:09 PM	Bypass valve closed
10/31/2011	7:11:09 PM	Bubbler valve closed
10/31/2011	7:11:09 PM	Helium valve opened
10/31/2011	7:11:09 PM	Main Vac valve opened
10/31/2011	7:11:09 PM	Helium MFC set to  20.000000
10/31/2011	7:11:09 PM	H2 MFC set to  0.000000
10/31/2011	7:11:09 PM	BCl3 MFC set to  0.000000
10/31/2011	7:11:09 PM	PHl3 MFC set to  0.000000
10/31/2011	7:11:09 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:11:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:11:09 PM	Tube furnace set to 0
10/31/2011	7:11:39 PM	Helium valve closed
10/31/2011	7:11:39 PM	H2 valve closed
10/31/2011	7:11:39 PM	BCl3 valve closed
10/31/2011	7:11:39 PM	PH3 valve closed
10/31/2011	7:11:39 PM	SiCl4 pre valve closed
10/31/2011	7:11:39 PM	SiCl4 post valve closed
10/31/2011	7:11:39 PM	Bypass valve closed
10/31/2011	7:11:39 PM	Bubbler valve closed
10/31/2011	7:11:39 PM	Main Vac valve opened
10/31/2011	7:11:39 PM	Helium MFC set to  0.000000
10/31/2011	7:11:39 PM	H2 MFC set to  0.000000
10/31/2011	7:11:39 PM	BCl3 MFC set to  0.000000
10/31/2011	7:11:39 PM	PHl3 MFC set to  0.000000
10/31/2011	7:11:39 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:11:39 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:11:39 PM	Tube furnace set to 0
10/31/2011	7:12:09 PM	H2 valve closed
10/31/2011	7:12:09 PM	BCl3 valve closed
10/31/2011	7:12:09 PM	PH3 valve closed
10/31/2011	7:12:09 PM	SiCl4 pre valve closed
10/31/2011	7:12:09 PM	SiCl4 post valve closed
10/31/2011	7:12:09 PM	Bypass valve closed
10/31/2011	7:12:09 PM	Bubbler valve closed
10/31/2011	7:12:09 PM	Helium valve opened
10/31/2011	7:12:09 PM	Main Vac valve opened
10/31/2011	7:12:09 PM	Helium MFC set to  20.000000
10/31/2011	7:12:09 PM	H2 MFC set to  0.000000
10/31/2011	7:12:09 PM	BCl3 MFC set to  0.000000
10/31/2011	7:12:09 PM	PHl3 MFC set to  0.000000
10/31/2011	7:12:09 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:12:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:12:09 PM	Tube furnace set to 0
10/31/2011	7:12:39 PM	Helium valve closed
10/31/2011	7:12:39 PM	H2 valve closed
10/31/2011	7:12:39 PM	BCl3 valve closed
10/31/2011	7:12:39 PM	PH3 valve closed
10/31/2011	7:12:39 PM	SiCl4 pre valve closed
10/31/2011	7:12:39 PM	SiCl4 post valve closed
10/31/2011	7:12:39 PM	Bypass valve closed
10/31/2011	7:12:39 PM	Bubbler valve closed
10/31/2011	7:12:39 PM	Main Vac valve opened
10/31/2011	7:12:39 PM	Helium MFC set to  0.000000
10/31/2011	7:12:39 PM	H2 MFC set to  0.000000
10/31/2011	7:12:39 PM	BCl3 MFC set to  0.000000
10/31/2011	7:12:39 PM	PHl3 MFC set to  0.000000
10/31/2011	7:12:39 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:12:39 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:12:39 PM	Tube furnace set to 0
10/31/2011	7:13:09 PM	H2 valve closed
10/31/2011	7:13:09 PM	BCl3 valve closed
10/31/2011	7:13:09 PM	PH3 valve closed
10/31/2011	7:13:09 PM	SiCl4 pre valve closed
10/31/2011	7:13:09 PM	SiCl4 post valve closed
10/31/2011	7:13:09 PM	Bypass valve closed
10/31/2011	7:13:09 PM	Bubbler valve closed
10/31/2011	7:13:09 PM	Helium valve opened
10/31/2011	7:13:09 PM	Main Vac valve opened
10/31/2011	7:13:09 PM	Helium MFC set to  20.000000
10/31/2011	7:13:09 PM	H2 MFC set to  0.000000
10/31/2011	7:13:09 PM	BCl3 MFC set to  0.000000
10/31/2011	7:13:09 PM	PHl3 MFC set to  0.000000
10/31/2011	7:13:09 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:13:09 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:13:10 PM	Tube furnace set to 0
10/31/2011	7:13:40 PM	Helium valve closed
10/31/2011	7:13:40 PM	H2 valve closed
10/31/2011	7:13:40 PM	BCl3 valve closed
10/31/2011	7:13:40 PM	PH3 valve closed
10/31/2011	7:13:40 PM	SiCl4 pre valve closed
10/31/2011	7:13:40 PM	SiCl4 post valve closed
10/31/2011	7:13:40 PM	Bypass valve closed
10/31/2011	7:13:40 PM	Bubbler valve closed
10/31/2011	7:13:40 PM	Main Vac valve opened
10/31/2011	7:13:40 PM	Helium MFC set to  0.000000
10/31/2011	7:13:40 PM	H2 MFC set to  0.000000
10/31/2011	7:13:40 PM	BCl3 MFC set to  0.000000
10/31/2011	7:13:40 PM	PHl3 MFC set to  0.000000
10/31/2011	7:13:40 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:13:40 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:13:40 PM	Tube furnace set to 0
10/31/2011	7:14:10 PM	H2 valve closed
10/31/2011	7:14:10 PM	BCl3 valve closed
10/31/2011	7:14:10 PM	PH3 valve closed
10/31/2011	7:14:10 PM	SiCl4 pre valve closed
10/31/2011	7:14:10 PM	SiCl4 post valve closed
10/31/2011	7:14:10 PM	Bypass valve closed
10/31/2011	7:14:10 PM	Bubbler valve closed
10/31/2011	7:14:10 PM	Helium valve opened
10/31/2011	7:14:10 PM	Main Vac valve opened
10/31/2011	7:14:10 PM	Helium MFC set to  20.000000
10/31/2011	7:14:10 PM	H2 MFC set to  0.000000
10/31/2011	7:14:10 PM	BCl3 MFC set to  0.000000
10/31/2011	7:14:10 PM	PHl3 MFC set to  0.000000
10/31/2011	7:14:10 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:14:10 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:14:10 PM	Tube furnace set to 0
10/31/2011	7:14:40 PM	Helium valve closed
10/31/2011	7:14:40 PM	H2 valve closed
10/31/2011	7:14:40 PM	BCl3 valve closed
10/31/2011	7:14:40 PM	PH3 valve closed
10/31/2011	7:14:40 PM	SiCl4 pre valve closed
10/31/2011	7:14:40 PM	SiCl4 post valve closed
10/31/2011	7:14:40 PM	Bypass valve closed
10/31/2011	7:14:40 PM	Bubbler valve closed
10/31/2011	7:14:40 PM	Main Vac valve opened
10/31/2011	7:14:40 PM	Helium MFC set to  0.000000
10/31/2011	7:14:40 PM	H2 MFC set to  0.000000
10/31/2011	7:14:40 PM	BCl3 MFC set to  0.000000
10/31/2011	7:14:40 PM	PHl3 MFC set to  0.000000
10/31/2011	7:14:40 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:14:40 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:14:40 PM	Tube furnace set to 0
10/31/2011	7:15:10 PM	H2 valve closed
10/31/2011	7:15:10 PM	BCl3 valve closed
10/31/2011	7:15:10 PM	PH3 valve closed
10/31/2011	7:15:10 PM	SiCl4 pre valve closed
10/31/2011	7:15:10 PM	SiCl4 post valve closed
10/31/2011	7:15:10 PM	Bypass valve closed
10/31/2011	7:15:10 PM	Bubbler valve closed
10/31/2011	7:15:10 PM	Helium valve opened
10/31/2011	7:15:10 PM	Main Vac valve opened
10/31/2011	7:15:10 PM	Helium MFC set to  20.000000
10/31/2011	7:15:10 PM	H2 MFC set to  0.000000
10/31/2011	7:15:10 PM	BCl3 MFC set to  0.000000
10/31/2011	7:15:10 PM	PHl3 MFC set to  0.000000
10/31/2011	7:15:10 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:15:10 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:15:10 PM	Tube furnace set to 0
10/31/2011	7:15:40 PM	Helium valve closed
10/31/2011	7:15:40 PM	H2 valve closed
10/31/2011	7:15:40 PM	BCl3 valve closed
10/31/2011	7:15:40 PM	PH3 valve closed
10/31/2011	7:15:40 PM	SiCl4 pre valve closed
10/31/2011	7:15:40 PM	SiCl4 post valve closed
10/31/2011	7:15:40 PM	Bypass valve closed
10/31/2011	7:15:40 PM	Bubbler valve closed
10/31/2011	7:15:40 PM	Main Vac valve opened
10/31/2011	7:15:40 PM	Helium MFC set to  0.000000
10/31/2011	7:15:40 PM	H2 MFC set to  0.000000
10/31/2011	7:15:40 PM	BCl3 MFC set to  0.000000
10/31/2011	7:15:40 PM	PHl3 MFC set to  0.000000
10/31/2011	7:15:40 PM	SiCl4 MFC set to  0.000000
10/31/2011	7:15:40 PM	Bypass solenoid MFC set to  0.000000
10/31/2011	7:15:41 PM	Tube furnace set to 0
10/31/2011	7:15:42 PM	Run finished at 7:15 PM
10/31/2011	7:15:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
